公开(公告)号：US12165831B2

公开(公告)日：2024-12-10

申请号：US17829230

申请日：2022-05-31

Applicant: KLA CORPORATION

Inventor： Xinrong Jiang ,  Christopher Sears ,  Youfei Jiang ,  Sameet K. Shriyan ,  Jeong Ho Lee ,  Michael Steigerwald ,  Ralph Nyffenegger

IPC: H01J37/153 ,  H01J37/06 ,  H01J37/12 ,  H01J37/244 ,  H01J37/28

Abstract: A multi-electron beam system that forms hundreds of beamlets can focus the beamlets, reduce Coulomb interaction effects, and improve resolutions of the beamlets. A Wien filter with electrostatic and magnetic deflection fields can separate the secondary electron beams from the primary electron beams and can correct the astigmatism and source energy dispersion blurs for all the beamlets simultaneously.

公开(公告)号：US20240112884A1

公开(公告)日：2024-04-04

申请号：US17955252

申请日：2022-09-28

Applicant: KLA Corporation

Inventor： Michael I. Cook ,  Sameet K. Shriyan ,  David Dowling

IPC: H01J37/317 ,  H01J37/153 ,  H01J37/244

CPC classification number: H01J37/3177 ,  H01J37/153 ,  H01J37/244

Abstract: A system may include a controller couplable to an imaging sub-system utilizing multiple particle beams, where the imaging sub-system includes one or more control elements to manipulate the two or more particle beams that are adjustable with two or more control parameters. The controller may select values of the two or more control parameters by iteratively performing steps until one or more termination conditions are met. For example, the controller may receive measurements of changes of distortions of the particle beams resulting from individual adjustments of the control parameters. The controller may further calculate values of the control parameters that reduce the distortions of the particle beams based on the changes of the distortions resulting from the individual adjustments. The controller may further direct the adjustment of the values of the control parameters to the calculated values.

公开(公告)号：US11615939B2

公开(公告)日：2023-03-28

申请号：US17211018

申请日：2021-03-24

Applicant: KLA Corporation

Inventor： Tomas Plettner ,  Ernesto Escorcia ,  Sameet K. Shriyan ,  Jeong Ho Lee

IPC: H01J37/26 ,  H01J37/22 ,  G01N23/2251 ,  H01J37/28

Abstract: An aperture array for a multi-beam array system and a method of selecting a subset of a beam from a multi-beam array system are provided. The aperture array comprises an array body arranged proximate to a beam source. The array body comprises a plurality of apertures, at least two of the apertures having different geometries. The array body is movable, via an actuator, relative to an optical axis of the beam source, such that a subset of a beam from the beam source is selected based on the geometry of the aperture that is intersected by the optical axis.

公开(公告)号：US20230003615A1

公开(公告)日：2023-01-05

申请号：US17848860

申请日：2022-06-24

Applicant: KLA Corporation

Inventor： Sameet K. Shriyan ,  Frank Essmeier ,  Hedong Yang

IPC: G01M11/00 ,  G06T7/70 ,  G06T7/66 ,  G06T7/30 ,  G06T7/00

Abstract: A multi-beam system includes a light source configured to emit light; a fiber bundle connected to the light source; and a camera configured to capture an image set including images corresponding to each fiber connected to the light source. The fiber bundle includes a central fiber having one end connected to the light source, and N layers of fibers surrounding the central fiber. The first layer of fibers includes M fibers, each having one end connected to the light source, and the Nth layer of fibers includes more than M fibers, but only M fibers in the Nth layer of fibers have one end connected the light source. A processor is configured to determine a centroid of each image in the image set to produce a centroid map and generate a fiber location map comprising fiber locations of all fibers in the fiber bundle based on the centroid map.

公开(公告)号：US20220310355A1

公开(公告)日：2022-09-29

申请号：US17211018

申请日：2021-03-24

Applicant: KLA Corporation

Inventor： Tomas Plettner ,  Ernesto Escorcia ,  Sameet K. Shriyan ,  Jeong Ho Lee

IPC: H01J37/22 ,  G01N23/2251

Abstract: An aperture array for a multi-beam array system and a method of selecting a subset of a beam from a multi-beam array system are provided. The aperture array comprises an array body arranged proximate to a beam source. The array body comprises a plurality of apertures, at least two of the apertures having different geometries. The array body is movable, via an actuator, relative to an optical axis of the beam source, such that a subset of a beam from the beam source is selected based on the geometry of the aperture that is intersected by the optical axis.