公开(公告)号：US12165831B2

公开(公告)日：2024-12-10

申请号：US17829230

申请日：2022-05-31

Applicant: KLA CORPORATION

Inventor： Xinrong Jiang ,  Christopher Sears ,  Youfei Jiang ,  Sameet K. Shriyan ,  Jeong Ho Lee ,  Michael Steigerwald ,  Ralph Nyffenegger

IPC: H01J37/153 ,  H01J37/06 ,  H01J37/12 ,  H01J37/244 ,  H01J37/28

Abstract: A multi-electron beam system that forms hundreds of beamlets can focus the beamlets, reduce Coulomb interaction effects, and improve resolutions of the beamlets. A Wien filter with electrostatic and magnetic deflection fields can separate the secondary electron beams from the primary electron beams and can correct the astigmatism and source energy dispersion blurs for all the beamlets simultaneously.

公开(公告)号：US11615939B2

公开(公告)日：2023-03-28

申请号：US17211018

申请日：2021-03-24

Applicant: KLA Corporation

Inventor： Tomas Plettner ,  Ernesto Escorcia ,  Sameet K. Shriyan ,  Jeong Ho Lee

IPC: H01J37/26 ,  H01J37/22 ,  G01N23/2251 ,  H01J37/28

Abstract: An aperture array for a multi-beam array system and a method of selecting a subset of a beam from a multi-beam array system are provided. The aperture array comprises an array body arranged proximate to a beam source. The array body comprises a plurality of apertures, at least two of the apertures having different geometries. The array body is movable, via an actuator, relative to an optical axis of the beam source, such that a subset of a beam from the beam source is selected based on the geometry of the aperture that is intersected by the optical axis.

公开(公告)号：US20220310355A1

公开(公告)日：2022-09-29

申请号：US17211018

申请日：2021-03-24

Applicant: KLA Corporation

Inventor： Tomas Plettner ,  Ernesto Escorcia ,  Sameet K. Shriyan ,  Jeong Ho Lee

IPC: H01J37/22 ,  G01N23/2251

Abstract: An aperture array for a multi-beam array system and a method of selecting a subset of a beam from a multi-beam array system are provided. The aperture array comprises an array body arranged proximate to a beam source. The array body comprises a plurality of apertures, at least two of the apertures having different geometries. The array body is movable, via an actuator, relative to an optical axis of the beam source, such that a subset of a beam from the beam source is selected based on the geometry of the aperture that is intersected by the optical axis.