公开(公告)号：US20210096063A1

公开(公告)日：2021-04-01

申请号：US17036825

申请日：2020-09-29

Applicant: JEOL Ltd. ,  National Institute of Advanced Industrial Science and Technology

Inventor： Kenichi Tsutsumi ,  Akihiro Tanaka ,  Kazushiro Yokouchi ,  Tatsuya Uchida ,  Noboru Taguchi ,  Shingo Tanaka

IPC: G01N21/25

Abstract: An analysis method includes: obtaining n×m pieces of map data by repeating, m times, a map measurement in which n pieces of map data are obtained by scanning a specimen with a primary probe to detect electrons emitted from the specimen with an electron spectrometer, while measurement energy ranges of an analyzer are varied; and generating a spectral map in which a position on the specimen is associated with a spectrum based on the n×m pieces of map data, the measurement energy ranges of m times of the map measurement not overlapping each other.

公开(公告)号：US20230307206A1

公开(公告)日：2023-09-28

申请号：US18121289

申请日：2023-03-14

Applicant: JEOL Ltd.

Inventor： Kenichi Tsutsumi ,  Tatsuya Uchida ,  Kazushiro Yokouchi ,  Nobuyuki Ikeo ,  Konomi Ikita

IPC: H01J37/22 ,  H01J37/26 ,  H01J37/147

CPC classification number: H01J37/222 ,  H01J37/26 ,  H01J37/1474 ,  H01J2237/2511 ,  H01J2237/24578 ,  H01J37/244

Abstract: A charged particle beam apparatus that forms a probe with a charged particle beam and scans a specimen with the probe to acquire a scanning image. The charged particle beam apparatus includes an optical system for scanning the specimen with the probe; a detector that detects a signal generated from the specimen through the scanning of the specimen with the probe; and a control unit that controls the optical system. The control unit performs correction processing of acquiring a reference image obtained by the scanning of the specimen with the probe, comparing the reference image to a criterion image to determine a drift amount, and correcting a displacement of an irradiation position with the probe on the specimen based on the drift amount; and processing of setting a frequency with which the correction processing is to be performed based on the drift amount.

公开(公告)号：US11698336B2

公开(公告)日：2023-07-11

申请号：US17036825

申请日：2020-09-29

Applicant: JEOL Ltd. ,  National Institute of Advanced Industrial Science and Technology

Inventor： Kenichi Tsutsumi ,  Akihiro Tanaka ,  Kazushiro Yokouchi ,  Tatsuya Uchida ,  Noboru Taguchi ,  Shingo Tanaka

IPC: G01N21/17 ,  G01N21/25

CPC classification number: G01N21/25 ,  G01N2021/1765 ,  G01N2201/10 ,  G01N2201/127

Abstract: An analysis method includes: obtaining n×m pieces of map data by repeating, m times, a map measurement in which n pieces of map data are obtained by scanning a specimen with a primary probe to detect electrons emitted from the specimen with an electron spectrometer, while measurement energy ranges of an analyzer are varied; and generating a spectral map in which a position on the specimen is associated with a spectrum based on the n×m pieces of map data, the measurement energy ranges of m times of the map measurement not overlapping each other.

公开(公告)号：US09714850B2

公开(公告)日：2017-07-25

申请号：US14875764

申请日：2015-10-06

Applicant: JEOL Ltd.

Inventor： Kazushiro Yokouchi

IPC: G01D9/00 ,  G01N23/227 ,  G01N35/00

CPC classification number: G01D9/005 ,  G01N23/2273 ,  G01N23/2276 ,  G01N35/00722 ,  G01N2035/00891 ,  G01N2035/0091

Abstract: An information processing device includes a storage section 50 that stores a history relating to the acquisition of measurement data, a history relating to an analysis position within an analyzer, and a history relating to a predetermined operation performed on a specimen using the analyzer as log information linked to time information, and a display control section 22 that performs a control process that displays these histories within a log display area on a display screen 40 in time series based on the log information, the display control section 22 performing a control process that displays a measurement result image generated based on the measurement data on the display screen, and, when an operation input that selects one measurement result image, performing a control process that displays a history that corresponds to the measurement data used to generate the selected measurement result image.

公开(公告)号：US20160097659A1

公开(公告)日：2016-04-07

申请号：US14875764

申请日：2015-10-06

Applicant: JEOL Ltd.

Inventor： Kazushiro Yokouchi

IPC: G01D9/00 ,  G01N23/227

CPC classification number: G01D9/005 ,  G01N23/2273 ,  G01N23/2276 ,  G01N35/00722 ,  G01N2035/00891 ,  G01N2035/0091

Abstract: An information processing device includes a storage section 50 that stores a history relating to the acquisition of measurement data, a history relating to an analysis position within an analyzer, and a history relating to a predetermined operation performed on a specimen using the analyzer as log information linked to time information, and a display control section 22 that performs a control process that displays these histories within a log display area on a display screen 40 in time series based on the log information, the display control section 22 performing a control process that displays a measurement result image generated based on the measurement data on the display screen, and, when an operation input that selects one measurement result image, performing a control process that displays a history that corresponds to the measurement data used to generate the selected measurement result image.

Abstract translation: 信息处理装置包括存储部分50，其存储与测量数据的获取相关的历史，与分析器内的分析位置相关的历史，以及与使用分析器作为样本的预定操作相关的历史作为日志信息 链接到时间信息的显示控制部22以及显示控制部22，显示控制部22执行基于日志信息以时间顺序在显示画面40的日志显示区域内显示这些历史的控制处理，显示控制部22执行显示 基于显示画面上的测量数据生成的测量结果图像，以及当选择一个测量结果图像的操作输入时，执行显示与用于生成所选择的测量结果图像的测量数据相对应的历史的控制处理 。