Phase Change Switch with Multi Face Heater Configuration

    公开(公告)号:US20230119033A1

    公开(公告)日:2023-04-20

    申请号:US18086211

    申请日:2022-12-21

    IPC分类号: H10N70/00 H10N70/20

    摘要: A method includes providing a substrate having a main surface, forming a layer of thermally insulating material on the main surface, forming strips of phase change material on the layer of thermally insulating material such that strips of phase change material are separated from the main surface by thermally insulating material, forming first and second RF terminals on the main surface that are laterally spaced apart from one another and connected to the strips of phase change material, and forming a heater structure having heating elements that are configured to control a conductive connection between the first and second RF terminals by applying heat to the one or more strips of phase change material, wherein each of the strips of phase change material includes multiple outer faces, and wherein portions of both outer faces from the strips of phase change material are disposed against one of the heating elements.

    Phase Change Switch with Multi Face Heater Configuration

    公开(公告)号:US20210320250A1

    公开(公告)日:2021-10-14

    申请号:US16844450

    申请日:2020-04-09

    IPC分类号: H01L45/00

    摘要: A switching device includes first and second RF terminals disposed over a substrate, one or more strips of phase change material connected between the first and second RF terminals, a region of thermally insulating material that separates the one or more strips of phase change material from the substrate, and a heater structure comprising one or more heating elements that are configured to control a conductive connection between the first and second RF terminals by applying heat to the one or more strips of phase change material. Each of the one or more strips of phase change material includes a first outer face and a second outer face opposite from the first outer face. For each of the one or more strips of phase change material, at least portions of both of the first and second outer faces are disposed against one of the heating elements.

    Phase change switch with multi face heater configuration

    公开(公告)号:US11563174B2

    公开(公告)日:2023-01-24

    申请号:US16844450

    申请日:2020-04-09

    IPC分类号: H01L45/00

    摘要: A switching device includes first and second RF terminals disposed over a substrate, one or more strips of phase change material connected between the first and second RF terminals, a region of thermally insulating material that separates the one or more strips of phase change material from the substrate, and a heater structure comprising one or more heating elements that are configured to control a conductive connection between the first and second RF terminals by applying heat to the one or more strips of phase change material. Each of the one or more strips of phase change material includes a first outer face and a second outer face opposite from the first outer face. For each of the one or more strips of phase change material, at least portions of both of the first and second outer faces are disposed against one of the heating elements.

    METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
    10.
    发明申请
    METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE 有权
    制造半导体器件和半导体器件的方法

    公开(公告)号:US20150340277A1

    公开(公告)日:2015-11-26

    申请号:US14283242

    申请日:2014-05-21

    IPC分类号: H01L21/762 H01L29/06

    摘要: A method for manufacturing a semiconductor device in accordance with various embodiments may include: forming an opening in a first region of a semiconductor substrate, the opening having at least one sidewall and a bottom; implanting dopant atoms into the at least one sidewall and the bottom of the opening; configuring at least a portion of a second region of the semiconductor substrate laterally adjacent to the first region as at least one of an amorphous or polycrystalline region; and forming an interconnect over at least one of the first and second regions of the semiconductor substrate.

    摘要翻译: 根据各种实施例的用于制造半导体器件的方法可以包括:在半导体衬底的第一区域中形成开口,所述开口具有至少一个侧壁和底部; 将掺杂剂原子注入到所述开口的至少一个侧壁和底部中; 将所述半导体衬底的与所述第一区域横向相邻的第二区域的至少一部分配置为非晶区域或多晶区域中的至少一个; 以及在半导体衬底的第一和第二区域中的至少一个上形成互连。