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公开(公告)号：US20240171917A1
公开(公告)日：2024-05-23
申请号：US18448601
申请日：2023-08-11
发明人： Joseph Seeger , Dennis Mortensen
CPC分类号： H04R19/04 , H04R7/04 , H04R7/18 , H04R2201/003 , H04R2410/03
摘要： The present invention relates to split electrodes for microelectromechanical system (MEMS) microphones. In one embodiment, a MEMS sensor includes a membrane, a membrane electrode formed in a portion of the membrane, and a backplate situated parallel to the membrane and separated by a gap. The backplate includes a first region of the backplate, where the first region of the backplate has first perforations of a first density, a backplate electrode is formed in a portion of the first region of the backplate, and a portion of the membrane electrode overlaps a portion of the backplate electrode in a sensing region forming a sensing capacitor, the sensing capacitor being configured to sense motion of the membrane in response to acoustic pressure. The backplate also includes a second region of the backplate having second perforations of a second density, where the second density is greater than the first density.
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公开(公告)号：US11225409B2
公开(公告)日：2022-01-18
申请号：US16574037
申请日：2019-09-17
申请人： InvenSense, Inc.
发明人： Pei-Wen Yen , Ting-Yuan Liu , Jye Ren , Chung-Hsien Lin , Joseph Seeger , Calin Miclaus
IPC分类号： B81B7/00
摘要： A device includes a microelectromechanical system (MEMS) sensor die comprising a deformable membrane, a MEMS heating element, and a substrate. The MEMS heating element is integrated within a same layer and a same plane as the deformable membrane. The MEMS heating element surrounds the deformable membrane and is separated from the deformable membrane through a trench. The MEMS heating element is configured to generate heat to heat up the deformable membrane. The substrate is coupled to the deformable membrane.
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公开(公告)号：US11047685B2
公开(公告)日：2021-06-29
申请号：US16735351
申请日：2020-01-06
申请人： INVENSENSE, INC.
发明人： Ozan Anac , Joseph Seeger
IPC分类号： G01C19/5762 , G01C19/5733 , G01C19/5747 , G01P15/08 , B81B3/00
摘要： Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor. The modifications include any or any combination of providing a rigid element between rotating structures of the spring mass configuration, tuning a spring system between the rotating structures and coupling an electrical cancellation system to the rotating structures. In so doing unwanted nonlinear motion such as unwanted 2nd harmonic motion is minimized.
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公开(公告)号：US10399849B2
公开(公告)日：2019-09-03
申请号：US14681071
申请日：2015-04-07
申请人： INVENSENSE, INC.
摘要： A device with a first MEMS device and a second MEMS device is disclosed. The first MEMS device is configured to sense at least one external influence. The second MEMS device is responsive to the at least one external influence. The first MEMS device is configured to change a state when the at least one external influence exceeds a threshold value. The first MEMS device is configured to retain the state below the threshold value, wherein the change in state of the first MEMS device is done passively and wherein the state of the first MEMS device is indicative of a status of the second MEMS device.
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公开(公告)号：US20190185317A1
公开(公告)日：2019-06-20
申请号：US16206861
申请日：2018-11-30
申请人： INVENSENSE, INC.
发明人： Jongwoo Shin , Houri Johari-Galle , Bongsang Kim , Joseph Seeger , Dongyang Kang
CPC分类号： B81B7/008 , B81B2201/0235 , B81B2201/0242 , B81B2201/0257 , B81B2201/0264 , B81B2201/0292 , B81C1/00523 , B81C2203/0785
摘要： A device comprising a micro-electro-mechanical system (MEMS) substrate with protrusions of different heights that has been integrated with a complementary metal-oxide-semiconductor (CMOS) substrate is presented herein. The MEMS substrate comprises defined protrusions of respective distinct heights from a surface of the MEMS substrate, and the MEMS substrate is bonded to the CMOS substrate. In an aspect, the defined protrusions can be formed from the MEMS substrate. In another aspect, the defined protrusions can be deposited on, or attached to, the MEMS substrate. In yet another aspect, the MEMS substrate comprises monocrystalline silicon and/or polysilicon. In yet even another aspect, the defined protrusions comprise respective electrodes of sensors of the device.
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公开(公告)号：US20190144264A1
公开(公告)日：2019-05-16
申请号：US15811471
申请日：2017-11-13
申请人： InvenSense, Inc.
发明人： Ilya Gurin , Joseph Seeger , Matthew Thompson
CPC分类号： B81B3/0013 , B81B3/0008 , B81B3/0027 , B81B3/0086 , B81B2201/0235 , B81B2203/04 , B81B2203/055 , B81C99/003 , G01C19/5719 , G01P15/0802 , G01P15/125 , G01P15/131 , G01P21/00 , G01P2015/0808
摘要： A microelectromechanical system (MEMS) sensor includes a MEMS layer that includes fixed and movable electrodes. In response to an in-plane linear acceleration, the movable electrodes move with respect to the fixed electrodes, and acceleration is determined based on the resulting change in capacitance. A plurality of auxiliary electrodes are located on a substrate of the MEMS sensor and below the MEMS layer, such that a capacitance between the MEMS layer and the auxiliary loads changes in response to an out-of-plane movement of the MEMS layer or a portion thereof. The MEMS sensor compensates for the acceleration value based on the capacitance sensed by the auxiliary electrodes.
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公开(公告)号：US09846175B2
公开(公告)日：2017-12-19
申请号：US14606858
申请日：2015-01-27
申请人： InvenSense, Inc.
IPC分类号： G01P15/125 , G01P15/08 , G01P15/18 , B60R21/0132
CPC分类号： G01P15/0888 , B60R2021/01327 , G01P15/0802 , G01P15/125 , G01P15/18
摘要： A rotational sensor for measuring rotational acceleration is disclosed. The rotational sensor comprises a sense substrate; at least two proof masses, and a set of two transducers. Each of the at least two proof masses is anchored to the sense substrate via at least one flexure and electrically isolated from each other; and the at least two proof masses are capable of rotating in-plane about a Z-axis relative to the sense substrate, wherein the Z-axis is normal to the substrate. Each of the transducers can sense rotation of each proof mass with respect to the sense substrate in response to a rotation of the rotational sensor.
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公开(公告)号：US20170199035A1
公开(公告)日：2017-07-13
申请号：US14963526
申请日：2015-12-09
申请人： InvenSense, Inc.
发明人： Joseph Seeger
IPC分类号： G01C19/5684 , G01C19/5726
摘要： A system and/or method for utilizing quadrature signals, for example in a MEMS gyroscope, to control drive signal characteristics (e.g., amplitude, etc.). As a non-limiting example, a quadrature signal in a MEMS gyroscope may be isolated and/or processed to generate a drive signal that is used to drive a proof mass. Such a quadrature signal may, for example, be obtained passively as part of general Coriolis signal processing. Also for example, such a quadrature signal may be actively created and/or obtained through the use of electrical and/or mechanical features.
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公开(公告)号：US09606191B2
公开(公告)日：2017-03-28
申请号：US14208222
申请日：2014-03-13
申请人： Invensense, Inc.
发明人： Joseph Seeger , Jin Qiu , Matthew Julian Thompson
IPC分类号： G01N27/72 , G01R33/02 , G01P15/08 , G01R33/028 , H01L21/00
CPC分类号： G01R33/02 , B81B2201/00 , G01P15/08 , G01R33/0286 , H01L21/00 , H01L2221/00
摘要： A MEMS device including a first proof mass, a first magnetized magnetic material disposed partially on a surface of the first proof mass, a first spring anchored to a substrate to support the first proof mass, and a first sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient acceleration. The MEMS device further includes a second sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient magnetic field.
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公开(公告)号：US09296606B2
公开(公告)日：2016-03-29
申请号：US14172894
申请日：2014-02-04
申请人： INVENSENSE, INC.
CPC分类号： B81B3/0051 , B81B2201/0221 , B81B2201/0235 , B81B2201/0271 , B81C1/00666 , G01K1/00 , G01N3/20 , G01P15/125 , G01P2015/0828
摘要： A method and system for a MEMS device is disclosed. The MEMS device includes a free layer, with a first portion and a second portion. The MEMS device also includes a underlying substrate, the free layer movably positioned relative to the underlying substrate. The first portion and second portion of the free layer are coupled through at least one stem. A sense material is disposed over portions of the second portion of the free layer. Stress in the sense material and second portion of the free layer does not cause substantial deflection of the first portion.
摘要翻译： 公开了一种用于MEMS器件的方法和系统。 MEMS器件包括具有第一部分和第二部分的自由层。 MEMS器件还包括下面的衬底，自由层相对于下面的衬底可移动地定位。 自由层的第一部分和第二部分通过至少一个杆连接。 感测材料设置在自由层的第二部分的部分上。 感应材料和自由层的第二部分的应力不会引起第一部分的实质的偏转。
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