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    METHOD FOR CORRECTING THE MEASUREMENT FROM A VIBRATING ANGULAR INERTIAL SENSOR
    1.
    发明公开
    METHOD FOR CORRECTING THE MEASUREMENT FROM A VIBRATING ANGULAR INERTIAL SENSOR 审中-公开

    公开(公告)号：US20240110790A1

    公开(公告)日：2024-04-04

    申请号：US18276892

    申请日：2022-02-15

    申请人： THALES

    发明人： Nicolas VERCIER ,  Jacques COATANTIEC

    IPC分类号： G01C19/5747 ,  G01C25/00 ,  G01C21/16

    CPC分类号： G01C19/5747 ,  G01C25/005 ,  G01C21/188

    摘要： A measurement of a vibrating inertial sensor disposed on a carrier and includes a resonator extending around two mutually perpendicular x and y axes defining an xy sensor frame of reference and comprising: at least one vibrating movable mass comprising at least two portions configured to vibrate in phase opposition in a direction x′ defining an x′y′ wave frame of reference, with the vibration wave forming an electrical angle θ relative to the x-axis; at least a pair of excitation transducers and a pair of detection transducers operating along the two axes x and y; the correction method being applied when the sensor is operating with a vibration wave vibrating along the x′-axis and comprising the following steps, when the carrier is substantially stationary: A commanding an electrical rotation of the vibration wave according to a commanded angular velocity Ωc, such that the electrical angle θ scans at least one angular range of kπ radians; then B retrieving the measured angular values Ωe measured by the inertial sensor over the angular range, and determining the mean Ωem of the angular values measured; then C subtracting the commanded angular velocity Ωc from the mean Ωem; with steps A to C being carried out for at least two different commanded angular velocities so as to determine at least two means of the measured angular values; then D determining: the mean electrical scale factor error FEem, and the actual angular value Ωv of the carrier plus a drift value Dm of the sensor, the determining being carried out on the basis of the commanded angular velocity Ωc and of the means Ωem of the measured angular values, according to the following formula:


    Ωem−Ωc=(Ωv+Dm)+FEem·Ωc

    Multiaxis gyroscope with supplementary masses
    3.
    发明授权
    Multiaxis gyroscope with supplementary masses 有权

    公开(公告)号：US11561097B2

    公开(公告)日：2023-01-24

    申请号：US17328754

    申请日：2021-05-24

    申请人： MURATA MANUFACTURING CO., LTD.

    发明人： Anssi Blomqvist ,  Ville-Pekka Rytkönen ,  Mikko Partanen

    IPC分类号： G01C19/5747

    摘要： A gyroscope with a first Coriolis mass quartet and a second Coriolis mass quartet arranged around two quartet center points, and two elongated mass elements or synchronization bars aligned with each other outside of each Coriolis mass. One end of each elongated mass element and synchronization bar is attached to the corresponding Coriolis mass. Each elongated mass element is suspended from a peripheral anchor point by a mass element suspension arrangement which allows said elongated mass element to undergo rotational motion both in the device plane and out of the device plane. Each elongated synchronization bar is suspended from a peripheral anchor point by a synchronization bar suspension arrangement which allows said elongated synchronization bar to undergo rotational motion both in the device plane and out of the device plane substantially around its midpoint.

    Microelectromechanical structure with enhanced rejection of acceleration noise
    8.
    发明授权
    Microelectromechanical structure with enhanced rejection of acceleration noise 有权

    公开(公告)号：US11079229B2

    公开(公告)日：2021-08-03

    申请号：US16263416

    申请日：2019-01-31

    申请人： STMicroelectronics S.r.l.

    发明人： Luca Coronato ,  Gabriele Cazzaniga

    IPC分类号： G01C19/5747 ,  G01C19/5712 ,  G01C19/02

    摘要： An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection.

    Vibration type angular velocity sensor
    9.
    发明授权
    Vibration type angular velocity sensor 有权

    公开(公告)号：US11054260B2

    公开(公告)日：2021-07-06

    申请号：US16708668

    申请日：2019-12-10

    申请人： DENSO CORPORATION

    发明人： Tomoya Jomori

    IPC分类号： G01C19/5747 ,  H01L41/08 ,  H01L41/187

    摘要： A vibration type angular velocity sensor includes a substrate having a surface; a plurality of fixation parts, a plurality of weights, two linear drive beams, a plurality of supporting members, a drive part and a detection part. The two linear drive beams are disposed on opposite sides of the weights in one direction so as to be connected to each other through the weights. The supporting members join the fixation parts to the drive beams. The drive part drives the drive beams to vibrate. The detection part generates an electric output according to displacement of the weights caused by an angular velocity applied thereto while the drive beams are being driven to vibrate. The fixation parts are disposed between the two linear drive beams.