公开(公告)号：US20170059322A1

公开(公告)日：2017-03-02

申请号：US15140349

申请日：2016-04-27

申请人： STMicroelectronics S.r.l.

发明人： Luca Coronato ,  Gabriele Cazzaniga

IPC分类号： G01C19/5747

CPC分类号： G01C19/5747 ,  G01C19/5712 ,  G01P9/02 ,  Y10T29/49002

摘要： An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection.

摘要翻译： 集成的MEMS结构包括锚定到基板并由驱动运动致动的驱动组件。 悬挂在基板上并且经由弹性元件联接到驱动组件的一对感测质量被固定在驱动运动中，并且响应于外部应力而沿着第一检测方向进行运动。 联接组件机械耦合该对感测块以耦合振动模式。 联接组件由刚性元件形成，该刚性元件连接感测质量并且具有在感测质量块之间的中间位置处的约束点，以及用于将刚性元件耦合到感测质量的弹性联接元件，以将第一刚度呈现为 沿着检测方向的相位相对运动和大于第一刚度的第二刚度相对于传感块的同相运动。

公开(公告)号：US11079229B2

公开(公告)日：2021-08-03

申请号：US16263416

申请日：2019-01-31

申请人： STMicroelectronics S.r.l.

发明人： Luca Coronato ,  Gabriele Cazzaniga

IPC分类号： G01C19/5747 ,  G01C19/5712 ,  G01C19/02

摘要： An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection.

公开(公告)号：US20150000400A1

公开(公告)日：2015-01-01

申请号：US13890984

申请日：2013-05-09

申请人： STMicroelectronics S.r.l.

发明人： Gabriele Cazzaniga ,  Luca Coronato

IPC分类号： G01C19/5747

CPC分类号： G01C19/5747 ,  G01P9/02 ,  Y10T29/49826

摘要： An integrated MEMS gyroscope, is provided with: at least a first driving mass driven with a first driving movement along a first axis upon biasing of an assembly of driving electrodes, the first driving movement generating at least one sensing movement, in the presence of rotations of the integrated MEMS gyroscope; and at least a second driving mass driven with a second driving movement along a second axis, transverse to the first axis, the second driving movement generating at least a respective sensing movement, in the presence of rotations of the integrated MEMS gyroscope. The integrated MEMS gyroscope is moreover provided with a first elastic coupling element, which elastically couples the first driving mass and the second driving mass in such a way as to couple the first driving movement to the second driving movement with a given ratio of movement.

摘要翻译： 集成的MEMS陀螺仪具有：至少第一驱动质量块，当驱动电极的组件偏压时，沿着第一轴线沿着第一驱动运动驱动，第一驱动运动在存在旋转的情况下产生至少一个感测运动 的集成MEMS陀螺仪; 以及在集成的MEMS陀螺仪的转动存在的情况下，沿着第二轴线横向于第一轴线的第二驱动运动驱动的至少第二驱动质量块，第二驱动运动至少产生相应的感测运动。 集成的MEMS陀螺仪还设置有第一弹性耦合元件，该第一弹性耦合元件使得第一驱动质量块和第二驱动质量块以使得第一驱动运动以给定的运动比率耦合到第二驱动运动的方式弹性耦合。

公开(公告)号：US08733172B2

公开(公告)日：2014-05-27

申请号：US13789476

申请日：2013-03-07

申请人： STMicroelectronics S.r.l.

发明人： Luca Coronato ,  Gabriele Cazzaniga ,  Sarah Zerbini

IPC分类号： G01C19/56

CPC分类号： G01C19/56 ,  G01C19/5712 ,  Y10T29/49002

摘要： An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.

摘要翻译： 集成的微机电结构设置有：具有衬底和框架的管芯，在其内部限定检测区域，并具有沿第一轴线延伸的第一侧面; 固定在基板上的驱动质量块，设置在检测区域中，并被设计成在垂直轴线的致动运动的平面内旋转; 以及第一对和第二对第一感测质量块，其通过弹性支撑元件悬挂在驱动质量块内，以便在致动运动中相对于其固定，以便执行从平面中的旋转检测移动 响应于第一角速度; 其中第一对的第一感测质量和第二对的第一感测质量体在相对于第一轴线具有相反符号的非零倾斜的相应方向上对齐。

公开(公告)号：US20140116135A1

公开(公告)日：2014-05-01

申请号：US14149653

申请日：2014-01-07

申请人： STMicroelectronics S.r.l.

发明人： Gabriele Cazzaniga ,  Luca Coronato

IPC分类号： G01C19/02

CPC分类号： G01C19/5747 ,  G01P9/02 ,  Y10T29/49826

摘要： An integrated MEMS gyroscope, is provided with: at least a first driving mass driven with a first driving movement along a first axis upon biasing of an assembly of driving electrodes, the first driving movement generating at least one sensing movement, in the presence of rotations of the integrated MEMS gyroscope; and at least a second driving mass driven with a second driving movement along a second axis, transverse to the first axis, the second driving movement generating at least a respective sensing movement, in the presence of rotations of the integrated MEMS gyroscope. The integrated MEMS gyroscope is moreover provided with a first elastic coupling element, which elastically couples the first driving mass and the second driving mass in such a way as to couple the first driving movement to the second driving movement with a given ratio of movement.

摘要翻译： 集成的MEMS陀螺仪具有：至少第一驱动质量块，当驱动电极的组件偏压时，沿着第一轴线沿着第一驱动运动驱动，第一驱动运动在存在旋转的情况下产生至少一个感测运动 的集成MEMS陀螺仪; 以及在集成的MEMS陀螺仪的转动存在的情况下，沿着第二轴线横向于第一轴线的第二驱动运动驱动的至少第二驱动质量块，第二驱动运动至少产生相应的感测运动。 集成的MEMS陀螺仪还设置有第一弹性耦合元件，该第一弹性耦合元件使得第一驱动质量块和第二驱动质量块以使得第一驱动运动以给定的运动比率耦合到第二驱动运动的方式弹性耦合。

公开(公告)号：US20130180334A1

公开(公告)日：2013-07-18

申请号：US13789476

申请日：2013-03-07

申请人： STMICROELECTRONICS S.R.L.

发明人： Luca Coronato ,  Gabriele Cazzaniga ,  Sarah Zerbini

IPC分类号： G01C19/56

CPC分类号： G01C19/56 ,  G01C19/5712 ,  Y10T29/49002

摘要： An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.

摘要翻译： 集成的微机电结构设置有：具有衬底和框架的管芯，在其内部限定检测区域，并具有沿第一轴线延伸的第一侧面; 固定在基板上的驱动质量块，设置在检测区域中，并被设计成在垂直轴线的致动运动的平面内旋转; 以及第一对和第二对第一感测质量块，其通过弹性支撑元件悬挂在驱动质量块内，以便在致动运动中相对于其固定，以便执行从平面中的旋转检测移动 响应于第一角速度; 其中第一对的第一感测质量和第二对的第一感测质量体在相对于第一轴线具有相反符号的非零倾斜的相应方向上对齐。

公开(公告)号：US09470526B2

公开(公告)日：2016-10-18

申请号：US14266676

申请日：2014-04-30

申请人： STMicroelectronics S.r.l.

发明人： Luca Coronato ,  Gabriele Cazzaniga ,  Sarah Zerbini

IPC分类号： G01C19/56 ,  G01C19/5712

CPC分类号： G01C19/56 ,  G01C19/5712 ,  Y10T29/49002

摘要： An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.

公开(公告)号：US20140230548A1

公开(公告)日：2014-08-21

申请号：US14266676

申请日：2014-04-30

申请人： STMicroelectronics S.r.l.

发明人： Luca Coronato ,  Gabriele Cazzaniga ,  Sarah Zerbini

IPC分类号： G01C19/56

CPC分类号： G01C19/56 ,  G01C19/5712 ,  Y10T29/49002

摘要： An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.

摘要翻译： 集成的微机电结构设置有：具有衬底和框架的管芯，在其内部限定检测区域，并具有沿第一轴线延伸的第一侧面; 固定在基板上的驱动质量块，设置在检测区域中，并被设计成在垂直轴线的致动运动的平面内旋转; 以及第一对和第二对第一感测质量块，其通过弹性支撑元件悬挂在驱动质量块内，以便在致动运动中相对于其固定，以便执行从平面中的旋转检测移动 响应于第一角速度; 其中第一对的第一感测质量和第二对的第一感测质量体在相对于第一轴线具有相反符号的非零倾斜的相应方向上对齐。

公开(公告)号：US20140021564A1

公开(公告)日：2014-01-23

申请号：US14037163

申请日：2013-09-25

申请人： STMicroelectronics S.r.l.

发明人： Gabriele Cazzaniga ,  Luca Coronato ,  Giacomo Calcaterra

IPC分类号： B81B3/00

CPC分类号： B81B3/0018 ,  G01C19/5712 ,  Y10T29/49826

摘要： An integrated microelectromechanical structure is provided with a driving mass, anchored to a substrate via elastic anchorage elements and designed to be actuated in a plane with a driving movement; and a first sensing mass and a second sensing mass, suspended within, and coupled to, the driving mass via respective elastic supporting elements so as to be fixed with respect thereto in said driving movement and to perform a respective detection movement in response to an angular velocity. In particular, the first and the second sensing masses are connected together via elastic coupling elements, configured to couple their modes of vibration.

摘要翻译： 集成的微机电结构设置有驱动质量块，通过弹性锚固元件锚固到基底，并被设计成在具有驱动运动的平面中被致动; 以及第一感测质量块和第二感测质量块，悬挂在驱动质量块内并通过相应的弹性支撑元件联接到驱动质量块，以便在所述驱动运动中相对于其固定，并响应于角度来执行相应的检测运动 速度。 特别地，第一感测质量和第二感测质量通过弹性耦合元件连接在一起，被配置为耦合其振动模式。

公开(公告)号：US10209071B2

公开(公告)日：2019-02-19

申请号：US15654584

申请日：2017-07-19

申请人： STMICROELECTRONICS S.R.L.

发明人： Luca Coronato ,  Gabriele Cazzaniga

IPC分类号： G01C19/5712 ,  G01C19/5747 ,  G01C19/02

摘要： An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection.