公开(公告)号：US20140260613A1

公开(公告)日：2014-09-18

申请号：US14050201

申请日：2013-10-09

Applicant: Invensense, Inc.

Inventor： Jin Qiu ,  Joseph Seeger

IPC: G01C19/56

CPC classification number: G01C19/5733 ,  G01P2015/0871 ,  G01P2015/0874

Abstract: A MEMS device includes at least one proof mass, the at least one proof mass is capable of moving to contact at least one target structure. The MEMS device further includes at least one elastic bump stop coupled to the proof mass and situated at a first distance from the target structure. The MEMS device additionally includes at least one secondary bump stop situated at a second distance from the target structure, wherein the second distance is greater than the first distance, and further wherein the at least one elastic bump stop moves to reduce the first distance when a shock is applied.

Abstract translation: MEMS装置包括至少一个检测质量块，所述至少一个检验质量块能够移动以接触至少一个目标结构。 所述MEMS装置还包括至少一个耦合到所述检验质量块并且位于距离所述目标结构第一距离处的弹性凸块止动件。 MEMS装置还包括至少一个位于离目标结构第二距离处的次级凸块止动件，其中第二距离大于第一距离，并且其中，至少一个弹性凸块止动件移动以减小第一距离，当a 应用冲击。

公开(公告)号：US09766264B2

公开(公告)日：2017-09-19

申请号：US14465304

申请日：2014-08-21

Applicant: INVENSENSE, INC.

Inventor： Jin Qiu ,  Joe Seeger ,  Alexander Castro ,  Igor Tchertkov ,  Richard Li

IPC: G01P15/125 ,  G01P21/00 ,  G01P15/02

CPC classification number: G01P15/125 ,  G01P15/02 ,  G01P21/00

Abstract: Described herein is an accelerometer that can be sensitive to acceleration, but not anchor motion due to sources other than acceleration. The accelerometer can employ a set of electrodes and/or transducers that can register motion of the proof mass and support structure and employ and output-cancelling mechanism so that the accelerometer can distinguish between acceleration and anchor motion due to sources other than acceleration. For example, the effects of anchor motion can be cancelled from an output signal of the accelerometer so that the accelerometer exhibits sensitivity to only acceleration.

公开(公告)号：US09606191B2

公开(公告)日：2017-03-28

申请号：US14208222

申请日：2014-03-13

Applicant: Invensense, Inc.

Inventor： Joseph Seeger ,  Jin Qiu ,  Matthew Julian Thompson

IPC: G01N27/72 ,  G01R33/02 ,  G01P15/08 ,  G01R33/028 ,  H01L21/00

CPC classification number: G01R33/02 ,  B81B2201/00 ,  G01P15/08 ,  G01R33/0286 ,  H01L21/00 ,  H01L2221/00

Abstract: A MEMS device including a first proof mass, a first magnetized magnetic material disposed partially on a surface of the first proof mass, a first spring anchored to a substrate to support the first proof mass, and a first sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient acceleration. The MEMS device further includes a second sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient magnetic field.

公开(公告)号：US20140266170A1

公开(公告)日：2014-09-18

申请号：US14208222

申请日：2014-03-13

Applicant: Invensense, Inc.

Inventor： Joseph Seeger ,  Jin Qiu ,  Matthew Julian Thompson

IPC: G01R33/02 ,  B81B7/02 ,  G01P15/02

CPC classification number: G01R33/02 ,  B81B2201/00 ,  G01P15/08 ,  G01R33/0286 ,  H01L21/00 ,  H01L2221/00

Abstract: A MEMS device including a first proof mass, a first magnetized magnetic material disposed partially on a surface of the first proof mass, a first spring anchored to a substrate to support the first proof mass, and a first sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient acceleration. The MEMS device further includes a second sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient magnetic field

Abstract translation: 一种MEMS器件，包括第一检测质量体，部分地设置在第一检验质量体的表面上的第一磁化磁性材料，锚固到基板以支撑第一检测质量块的第一弹簧，以及耦合到第一检测质量块的第一感测元件 并且可操作以感测由环境加速度引起的第一检测质量块的运动。 MEMS器件还包括耦合到第一检验质量块的第二感测元件，并且可操作以感测由环境磁场引起的第一检验质量块的运动

公开(公告)号：US10527420B2

公开(公告)日：2020-01-07

申请号：US16044463

申请日：2018-07-24

Applicant: Invensense, Inc.

Inventor： Jin Qiu ,  Joseph Seeger

IPC: G01C19/5733 ,  G01P15/125 ,  G01P15/08

Abstract: A MEMS device includes at least one proof mass, the at least one proof mass is capable of moving to contact at least one target structure. The MEMS device further includes at least one elastic bump stop coupled to the proof mass and situated at a first distance from the target structure. The MEMS device additionally includes at least one secondary bump stop situated at a second distance from the target structure, wherein the second distance is greater than the first distance, and further wherein the at least one elastic bump stop moves to reduce the first distance when a shock is applied.

公开(公告)号：US20140360268A1

公开(公告)日：2014-12-11

申请号：US14465304

申请日：2014-08-21

Applicant: INVENSENSE, INC.

Inventor： Jin Qiu ,  Joe Seeger ,  Alexander Castro ,  Igor Tchertkov ,  Richard Li

IPC: G01P15/125 ,  G01P15/02

CPC classification number: G01P15/125 ,  G01P15/02 ,  G01P21/00

Abstract: Described herein is an accelerometer that can be sensitive to acceleration, but not anchor motion due to sources other than acceleration. The accelerometer can employ a set of electrodes and/or transducers that can register motion of the proof mass and support structure and employ and output-cancelling mechanism so that the accelerometer can distinguish between acceleration and anchor motion due to sources other than acceleration. For example, the effects of anchor motion can be cancelled from an output signal of the accelerometer so that the accelerometer exhibits sensitivity to only acceleration.

Abstract translation: 这里描述的是加速度计，其可以对加速度敏感，但是不是由于加速度以外的源而是锚定运动。 加速度计可以使用一组电极和/或换能器，其可以记录检测质量块和支撑结构的运动并采用和输出消除机构，使得加速度计能够区分由加速度以外的源而导致的加速度和锚运动。 例如，可以从加速度计的输出信号中消除锚定运动的影响，使得加速度计仅对加速度表现出灵敏度。