SPIN-ON-GLASS ASSISTED POLISHING OF ROUGH SUBSTRATES
    7.
    发明申请
    SPIN-ON-GLASS ASSISTED POLISHING OF ROUGH SUBSTRATES 审中-公开
    旋转玻璃辅助抛光粗糙基板

    公开(公告)号:US20150197455A1

    公开(公告)日:2015-07-16

    申请号:US14363263

    申请日:2012-12-06

    Inventor: Henrik Pranov

    Abstract: A method produces a smooth surface on a rough substrate. The rough substrate is coated with a film or particles of spin-on-glass (SOG) dissolved in a solvent using spin coating, spray coating or dip coating. The SOG is made to reflow by using thermal melting and solvent thinning. The reflow is done in an atmosphere containing a partial pressure of the solvent. The reflow allows the SOG to partially melt and to decrease the surface roughnesss of the film. The SOG is cured by thermal curing or UV exposure radiation curing into a hard durable and chemical inert silicon dioxide film. The SOG can be hydrogen silsesquioxane or methyl silsesquioxane dissolved in either methyl isobutyl ketone or volatile methyl siloxanes. The method can include embossing, chemical mechanical polishing, etching and functionalizing the surface. The substrate can be a cast, mould or form for producing a polymer or a glass replica.

    Abstract translation: 一种方法在粗糙的基底上产生光滑的表面。 粗糙基材用旋涂,喷涂或浸涂法溶解在溶剂中的旋涂玻璃(SOG)的薄膜或颗粒涂覆。 SOG通过使用热熔融和溶剂稀释来回流。 回流在含有溶剂分压的气氛中进行。 回流焊使SOG部分熔融并降低膜的表面粗糙度。 SOG通过热固化或UV曝光固化成硬的耐久和化学惰性二氧化硅膜来固化。 SOG可以是溶解在甲基异丁基酮或挥发性甲基硅氧烷中的氢倍半硅氧烷或甲基倍半硅氧烷。 该方法可以包括压花,化学机械抛光,蚀刻和使表面官能化。 基底可以是用于生产聚合物或玻璃复制品的铸造,模具或形式。

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