-
公开(公告)号：US11749497B2
公开(公告)日：2023-09-05
申请号：US17394925
申请日：2021-08-05
发明人： Shunsuke Mizutani , Shahedul Hoque , Uki Ikeda , Makoto Suzuki
IPC分类号： H01J37/28 , H01J37/147 , H01J37/244
CPC分类号： H01J37/28 , H01J37/1474 , H01J37/244 , H01J2237/2443 , H01J2237/24475
摘要： A charged particle beam apparatus covering a wide range of detection angles of charged particles emitted from a sample includes an objective lens for converging charged particle beams emitted from a charged particle source and a detector for detecting charged particles emitted from a sample. The objective lens includes inner and outer magnetic paths which are formed so as to enclose a coil. A first inner magnetic path is disposed at a position opposite to an optical axis of the charged particle beams. A second inner magnetic path, formed at a slant with respect to the optical axis of the charged particle beams, includes a leading end. A detection surface of the detector is disposed at the outer side from a virtual straight line that passes through the leading end and that is parallel to the optical axis of the charged particle beams.
-
公开(公告)号：US11139144B2
公开(公告)日：2021-10-05
申请号：US16482765
申请日：2017-03-24
发明人： Shunsuke Mizutani , Shahedul Hoque , Uki Ikeda , Makoto Suzuki
IPC分类号： H01J37/244 , H01J37/28 , H01J37/147
摘要： The present invention provides a charged particle beam apparatus that covers a wide range of detection angles of charged particles emitted from a sample. Accordingly, the present invention proposes a charged particle beam apparatus that is provided with an objective lens for converging charged particle beams emitted from a charged particle source, and a detector for detecting charged particles emitted from a sample, wherein: the objective lens includes an inner magnetic path and an outer magnetic path which are formed so as to enclose a coil; the inner magnetic path comprises a first inner magnetic path disposed at a position opposite to an optical axis of the charged particle beams and a second inner magnetic path which is formed at a slant with respect to the optical axis of the charged particle beams and which includes a leading end of the magnetic path; and a detection surface of the detector is disposed at the outer side from a virtual straight line that passes through the leading end of the magnetic path and that is parallel to the optical axis of the charged particle beams.
-
公开(公告)号：US10903041B2
公开(公告)日：2021-01-26
申请号：US16424803
申请日：2019-05-29
发明人： Uki Ikeda , Shunsuke Mizutani , Makoto Suzuki
摘要： The present disclosure relates to a pattern measuring method to appropriately measure a height and a depth of a pattern having a high aspect ratio. The method includes measuring a width between a first pattern and another pattern formed on a wafer; calculating a value regarding an azimuth angle of a signal emitted from the wafer; and calculating height information from a portion between the first pattern and the other pattern to an upper portion of a pattern based on the measured width between the first pattern and the other pattern, the value regarding the azimuth angle, the value regarding an elevation angle, and relationship information thereof.
-
公开(公告)号：US11694873B2
公开(公告)日：2023-07-04
申请号：US17962915
申请日：2022-10-10
IPC分类号： H01J37/244 , G01N23/2251 , G02B6/42
CPC分类号： H01J37/244 , G01N23/2251 , G02B6/4214 , G01N2223/07 , G01N2223/418 , G01N2223/505 , G01N2223/507
摘要： A charged particle beam apparatus using a light guide that improves light utilization efficiency includes a detector including a scintillator for emitting light when a charged particle is incident, a light receiving element, and a light guide for guiding the light from the scintillator to the light receiving element. The light guide includes: an incident surface that faces a light emitting surface of the scintillator and to which the light emitted by the scintillator is incident; an emitting surface that is configured to emit light; and a reflecting surface that is inclined with respect to the incident surface so that the light from the incident surface is reflected toward the emitting surface. The emitting surface is smaller than the incident surface. A slope surface is provided between the incident surface and the emitting surface, faces the reflecting surface, and is inclined with respect to the incident surface.
-
公开(公告)号：US11515120B2
公开(公告)日：2022-11-29
申请号：US17269424
申请日：2018-09-21
IPC分类号： H01J37/244 , G01N23/2251 , G02B6/42
摘要： A charged particle beam apparatus using a light guide that improves light utilization efficiency includes a detector including a scintillator for emitting light when a charged particle is incident, a light receiving element, and a light guide for guiding the light from the scintillator to the light receiving element. The light guide includes: an incident surface that faces a light emitting surface of the scintillator and to which the light emitted by the scintillator is incident; an emitting surface that is configured to emit light; and a reflecting surface that is inclined with respect to the incident surface so that the light from the incident surface is reflected toward the emitting surface. The emitting surface is smaller than the incident surface. A slope surface is provided between the incident surface and the emitting surface, faces the reflecting surface, and is inclined with respect to the incident surface.
-
-
-
-
搜索结果
5 条记录 (耗时 0.014 秒)
