公开(公告)号：US20200152419A1

公开(公告)日：2020-05-14

申请号：US16745424

申请日：2020-01-17

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Shuhei YABU

IPC: H01J37/26 ,  H01J37/28 ,  H01J37/147 ,  H01J37/141 ,  H01J37/12 ,  H01J37/21

Abstract: A charged particle beam device includes a charged particle source which emits a charged particle beam radiated on a sample; a condenser lens system which has at least one condenser lens focusing the charged particle beam at a predetermined demagnification; a deflector which is positioned between a condenser lens of a most downstream side and a charged particle source in the condenser lens system, and moves a virtual position of the charged particle source; and a control unit which controls the deflector and the condenser lens system. The control unit controls the deflector to move the virtual position of the charged particle source to a position of suppressing a deviation, which is caused by a change of the demagnification of the condenser lens system, of a center trajectory of the charged particle beam downstream of the condenser lens system.

公开(公告)号：US20170169988A1

公开(公告)日：2017-06-15

申请号：US15318455

申请日：2016-03-04

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Shuhei YABU ,  Naoto KOGA ,  Mitsuo AKATSU ,  Isao TAKAHIRA ,  Shinichi TOMITA ,  Hiroyuki NODA ,  Ai MASUDA

IPC: H01J37/16 ,  H01J37/248

CPC classification number: H01J37/16 ,  H01J37/248 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/2813

Abstract: Provided is a charged particle beam device that is small, high performance, and easy to transport. A charged particle beam device (100) is provided with a detachable body unit (15) and an auxiliary unit (14), the body unit (15) housing a functional unit related to charged particle beams, and the auxiliary unit (14) housing a power source unit (9).

公开(公告)号：US20180374673A1

公开(公告)日：2018-12-27

申请号：US15780678

申请日：2016-01-29

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Shuhei YABU

IPC: H01J37/26 ,  H01J37/12 ,  H01J37/28 ,  H01J37/147 ,  H01J37/21 ,  H01J37/141

CPC classification number: H01J37/263 ,  H01J37/12 ,  H01J37/141 ,  H01J37/1471 ,  H01J37/1475 ,  H01J37/1477 ,  H01J37/21 ,  H01J37/28 ,  H01J2237/1501 ,  H01J2237/152

Abstract: A charged particle beam device includes a charged particle source which emits a charged particle beam radiated on a sample; a condenser lens system which has at least one condenser lens focusing the charged particle beam at a predetermined demagnification; a deflector which is positioned between a condenser lens of a most downstream side and a charged particle source in the condenser lens system, and moves a virtual position of the charged particle source; and a control unit which controls the deflector and the condenser lens system. The control unit controls the deflector to move the virtual position of the charged particle source to a position of suppressing a deviation, which is caused by a change of the demagnification of the condenser lens system, of a center trajectory of the charged particle beam in the downstream of the condenser lens system.