公开(公告)号：US20170169988A1

公开(公告)日：2017-06-15

申请号：US15318455

申请日：2016-03-04

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Shuhei YABU ,  Naoto KOGA ,  Mitsuo AKATSU ,  Isao TAKAHIRA ,  Shinichi TOMITA ,  Hiroyuki NODA ,  Ai MASUDA

IPC: H01J37/16 ,  H01J37/248

CPC classification number: H01J37/16 ,  H01J37/248 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/2813

Abstract: Provided is a charged particle beam device that is small, high performance, and easy to transport. A charged particle beam device (100) is provided with a detachable body unit (15) and an auxiliary unit (14), the body unit (15) housing a functional unit related to charged particle beams, and the auxiliary unit (14) housing a power source unit (9).