公开(公告)号：US20170169988A1

公开(公告)日：2017-06-15

申请号：US15318455

申请日：2016-03-04

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Shuhei YABU ,  Naoto KOGA ,  Mitsuo AKATSU ,  Isao TAKAHIRA ,  Shinichi TOMITA ,  Hiroyuki NODA ,  Ai MASUDA

IPC: H01J37/16 ,  H01J37/248

CPC classification number: H01J37/16 ,  H01J37/248 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/2813

Abstract: Provided is a charged particle beam device that is small, high performance, and easy to transport. A charged particle beam device (100) is provided with a detachable body unit (15) and an auxiliary unit (14), the body unit (15) housing a functional unit related to charged particle beams, and the auxiliary unit (14) housing a power source unit (9).

公开(公告)号：US20180082819A1

公开(公告)日：2018-03-22

申请号：US15565214

申请日：2015-04-15

Applicant: Hitachi High-Technologies Corporation

Inventor： Yuuta EBINE ,  Mitsuo AKATSU

IPC: H01J37/18 ,  H01J37/16

CPC classification number: H01J37/18 ,  H01J37/16 ,  H01J37/28 ,  H01J2237/1825

Abstract: In this charged particle beam device, when a sample chamber is to be placed in a high-vacuum state, a charged particle gun chamber and the sample chamber are evacuated via a main intake of a turbo molecular pump, and when the sample chamber is to be placed in a low-vacuum state, the sample chamber is evacuated via an intermediate intake of the turbo molecular pump while the charged particle gun chamber is evacuated via the main intake. An oil rotation pump for performing back pressure exhausting of the turbo molecular pump does not directly evacuate the charged particle gun chamber or the sample chamber. It is thereby possible to minimize contamination of the device interior in both high-vacuum and low-vacuum states, which makes it possible to prevent contamination of the observed sample and reduce deterioration over time in the ultimate vacuum.