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公开(公告)号：US20230333131A1
公开(公告)日：2023-10-19
申请号：US18028773
申请日：2021-08-27
Applicant: Hitachi High-Tech Corporation
Inventor： Ryosuke HOSHI , Yasuaki AOYAMA , Akeshi TAKAHASHI , Satoru KANEKO , Takeshi TAMAKOSHI , Hiroyuki KOBAYASHI , Hiroshi WATANABE , Kuniaki ONIZAWA
CPC classification number: G01N35/04 , B65G54/02 , G01N2035/0475 , G01N2035/0477
Abstract: Provided is a conveyance device capable of reducing the weight of a conveyance device while preventing magnetic saturation. A conveyance device according to the present invention is characterized by comprising a conveyance path (65) in which a conveyed object is moved, an electromagnet provided on the surface of the conveyance path (65) opposite to the surface on which the conveyed object moves, and a drive circuit for supplying a current to the electromagnet, the electromagnet including teeth (22a, 22b) formed from a magnetic body, and windings (21a, 21b) wound onto the surface of the teeth (22a, 22b), a yoke (26) is provided that supports the teeth (22a, 22b), and the relationship between the minimum cross-sectional area Sy of the yoke (26) and the minimum cross-sectional area St of the part of the teeth (22a, 22b) where the windings (21a, 21b) are provided is Sy
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2.发明申请公开(公告)号：US20210398723A1
公开(公告)日：2021-12-23
申请号：US17287899
申请日：2019-11-07
Applicant: Hitachi High-Tech Corporation
Inventor： Yasuaki AOYAMA , Hiroyuki KOBAYASHI , Satoru KANEKO , Takeshi TAMAKOSHI , Ryosuke HOSHI , Katsuhiro KAMBARA , Hiroshi WATANABE , Kuniaki ONIZAWA
Abstract: The present invention comprises: an object to be conveyed that has at least one permanent magnet 10; a magnetic pole 25 that has a core 22 comprising a second magnetic body and a winding 21 wound around the outer periphery of the core 22; a drive circuit 50 for supplying a current to the winding 21 of the magnetic pole 25; a current detection unit 30 for detecting the value of the current flowing through the winding 21; and a computation unit 40 for estimating the position of the permanent magnet 10 on the basis of the current value detected by the current detection unit 30 and controlling the value of the current supplied from the drive circuit 50 to the winding 21 on the basis of information about the estimated position of the permanent magnet 10.
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公开(公告)号：US20210151298A1
公开(公告)日：2021-05-20
申请号：US17160801
申请日：2021-01-28
Applicant: Hitachi High-Tech Corporation
Inventor： Hiroyuki KOBAYASHI , Nobuya MIYOSHI , Kazunori SHINODA , Kenji MAEDA , Yutaka KOUZUMA , Satoshi SAKAl , Masaru IZAWA
Abstract: In a vacuum processing apparatus including: a vacuum container including a processing chamber therein; a plasma formation chamber; plate members being arranged between the processing chamber and the plasma formation chamber; and a lamp and a window member being arranged around the plate members, in order that a wafer and the plate members are heated by electromagnetic waves from the lamp, a bottom surface and a side surface of the window member is formed of a member transmitting the electromagnetic waves therethrough.
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公开(公告)号：US20240140735A1
公开(公告)日：2024-05-02
申请号：US17768745
申请日：2020-08-19
Applicant: Hitachi High-Tech Corporation
Inventor： Ryosuke HOSHI , Yasuaki AOYAMA , Satoru KANEKO , Hiroyuki KOBAYASHI , Takeshi TAMAKOSHI , Hiroshi WATANABE , Katsuhiro KAMBARA , Kuniaki ONIZAWA
CPC classification number: B65G54/02 , G01N35/04 , G01N2035/0477
Abstract: The weight of a body-to-be-conveyed constituting a conveying device is reduced, and the friction force between the sliding surface of the body-to-be-conveyed and the conveyance path is reduced. A body-to-be-conveyed that is a component of a conveying device that uses electromagnetic force as thrust and can move in a horizontal direction includes a mover in which a bottom surface is arranged so that a predetermined gap is formed in a vertical direction with respect to the sliding surface thereof, in which the mover includes a permanent magnet and a cover, a gap facing surface of the permanent magnet facing the gap includes one magnetic pole, the cover is installed on a side of the permanent magnet opposite from the gap facing surface in the vertical direction, the horizontal outermost diameter of the cover is larger than the horizontal outermost diameter of the permanent magnet, and the cover is formed of a flat plate.
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5.发明申请公开(公告)号：US20220252627A1
公开(公告)日：2022-08-11
申请号：US17434966
申请日：2020-01-14
Applicant: Hitachi High-Tech Corporation
Inventor： Yasuaki AOYAMA , Ryosuke HOSHI , Hiroyuki KOBAYASHI , Takeshi TAMAKOSHI , Satoru KANEKO , Hiroshi WATANABE , Katsuhiro KAMBARA , Kuniaki ONIZAWA
Abstract: The invention provides a conveyance device having a smaller loss of a winding than that of a related art while increasing thrust for conveying a body to be conveyed, and a specimen analysis system and a specimen pretreatment device including the same. A conveyance device 1 includes: a permanent magnet 10 provided on the side of a specimen rack 111; teeth 22 formed of a second magnetic body; and a winding 21 wound around the side of an outer periphery of the teeth 22, wherein a cross-sectional area of a cross section of a part of the teeth facing the permanent magnet 10 is larger than that of other parts thereof. Alternatively, the conveyance device 1 includes: the permanent magnet 10 provided on the side of the specimen rack 111; the teeth 22 formed of the second magnetic body; and the winding 21 wound around the side of the outer periphery of the teeth 22, wherein a gap Lc between the permanent magnet 10 and the winding 21 and a gap Lt between permanent magnet 10 and the teeth 22 satisfy a relationship of Lc>Lt.
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Patent Agency Ranking
公开(公告)号：US20220238267A1
公开(公告)日：2022-07-28
申请号：US17614577
申请日：2020-04-07
Applicant: HITACHI HIGH-TECH CORPORATION
Inventor： Ryosuke HOSHI , Yasuaki AOYAMA , Satoru KANEKO , Hiroyuki KOBAYASHI , Takeshi TAMAKOSHI , Katsuhiro KAMBARA , Hiroshi WATANABE , Kuniaki ONIZAWA
Abstract: A transport device and a transport method efficiently increase a thrust to suppress power consumption. The transport device has a first magnetic body on a side of a to-be-transported object, a magnetic circuit with a core consisting of a second magnetic body, and a winding wound around an outside of the core, and a drive circuit supplying a current to the winding of the magnetic circuit. The magnetic circuit has first and second magnetic circuits, and in a case where the first magnetic body is located on a side of the second magnetic circuit relative to a first predetermined position between the first magnetic circuit and the second magnetic circuit, the drive circuit supplies a current to a winding of the first magnetic circuit in such a manner to cause an electromagnetic repulsive force to be generated between the first magnetic body and the first magnetic circuit.
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公开(公告)号：US20230273229A1
公开(公告)日：2023-08-31
申请号：US18020220
申请日：2021-03-18
Applicant: Hitachi High-Tech Corporation
Inventor： Yasuaki AOYAMA , Satoru KANEKO , Hiroyuki KOBAYASHI , Takeshi TAMAKOSHI , Ryosuke HOSHI , Hiroshi WATANABE , Kuniaki ONIZAWA
IPC: G01N35/04
CPC classification number: G01N35/04 , G01N2035/0477 , G01N2035/0401
Abstract: Provided is a sample transport device, a sample analysis system, and a sample pretreatment device which have high positional accuracy when stopping a sample and can adjust a minute position when stopping the sample. A sample transport device (1a) according to the present invention includes: a sample provided with a permanent magnet (10); a transport path through which the sample is to be transported via the permanent magnet (10); a plurality of coils provided on a surface of the transport path opposite to a surface on which the sample is to be transported; and a drive circuit that causes a current to flow through the coils. The drive circuit adjusts a force applied to the permanent magnet in a vertical direction by a current flowing through a first coil (30B) immediately below a position at which the permanent magnet (10) is to be stopped, and adjusts a force applied to the permanent magnet (10) in a horizontal direction by a current flowing through a second coil (30C) adjacent to the first coil, and adjusts a stop position of the permanent magnet (10).
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公开(公告)号：US20230211964A1
公开(公告)日：2023-07-06
申请号：US17928346
申请日：2021-02-05
Applicant: Hitachi High-Tech Corporation
Inventor： Hiroyuki KOBAYASHI , Satoru KANEKO , Takeshi TAMAKOSHI , Yasuaki AOYAMA , Ryosuke HOSHI , Hiroshi WATANABE , Kuniaki ONIZAWA
CPC classification number: B65G54/02 , G01N35/04 , G01N2035/0477
Abstract: Provided are a transport device and an analysis system in which a stability of transport at a time of restart is further enhanced while achieving cost reduction by a position-sensorless configuration. A transport device includes: a plurality of coils 25a, 25b configured to generate a thrust to transport a transport container 20; a drive circuit 50 configured to apply a voltage to each of the plurality of coils 25a, 25b; and a calculation unit 40 configured to estimate a position of the transport container 20 based on current information when voltage pulses 80, 81 are applied to the coils 25a, 25b. When a power supply of the device is activated, the calculation unit 40 applies a voltage pulse 80 in a positive direction and a voltage pulse 81 in a negative direction to the target coils 25a, 25b so as to detect the position of the transport container 20 from the current information of current flowing through the coils 25a, 25b.
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公开(公告)号：US20230184798A1
公开(公告)日：2023-06-15
申请号：US17923616
申请日：2021-03-25
Applicant: Hitachi High-Tech Corporation
Inventor： Satoru KANEKO , Yasuaki AOYAMA , Ryosuke HOSHI , Takeshi TAMAKOSHI , Hiroyuki KOBAYASHI , Kuniaki ONIZAWA
IPC: G01N35/04
CPC classification number: G01N35/04 , G01N2035/0477
Abstract: A sample transport device includes: a sample container configured to accommodate a sample and provided with a magnetic body; a transport surface on which the sample container is to be transported; a plurality of coils disposed on a surface of the transport surface that is opposite to a surface facing the magnetic body; a coil drive unit configured to apply a voltage to the coils; and a position estimation unit configured to estimate a position of the sample container based on a current change generated when the coil drive unit applies the voltage to the coils. The position estimation unit estimates the position of the transport container by the coil drive unit applying voltage pulses having a phase difference to adjacent coils among the plurality of coils.
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公开(公告)号：US20250014907A1
公开(公告)日：2025-01-09
申请号：US18896372
申请日：2024-09-25
Applicant: Hitachi High-Tech Corporation
Inventor： Takashi HATTORI , Yu ZHAO , Hiroyuki KOBAYASHI , Hiroto OTAKE
IPC: H01L21/311 , H01L21/02 , H01L21/3065 , H01L21/67
Abstract: Provided is an etching method for etching a silicon oxide film with a high accuracy at a high selection ratio with respect to a silicon nitride film, the etching method of etching a film structure, in which an end portion of a film layer in which the silicon oxide film and the silicon nitride film formed in advance on a wafer disposed in a processing chamber are alternately stacked in a vertical direction forms a side wall of a groove or a hole, by supplying processing gas into the processing chamber includes a step of supplying hydrogen fluoride and alcohol vapor into the processing chamber, maintaining the wafer at a temperature of −20° C. or lower, preferably −20° C. to −60° C., and etching the silicon oxide film from the end portion in a lateral direction.
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