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公开(公告)号：US11875694B2
公开(公告)日：2024-01-16
申请号：US16549674
申请日：2019-08-23
申请人： Hitachi, Ltd.
CPC分类号： G09B19/003 , A41D19/0027 , G01D7/08 , G01D21/02
摘要： An operation motion is accurately determined in an operational information management system. The system includes a motion verification portion that combines and verifies plurality of pieces of sensor information and recognizes a specific body motion, a signal determination portion that determines whether an operation content of an operator is correctly performed based on the body motion recognized by the motion verification portion, and a report portion that reports a determine result of the signal determination portion.
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公开(公告)号：US10605824B2
公开(公告)日：2020-03-31
申请号：US15763240
申请日：2016-03-18
申请人： Hitachi, Ltd.
发明人： Shuntaro Machida , Nobuyuki Sugii , Keiji Watanabe , Daisuke Ryuzaki , Tetsufumi Kawamura , Kazuki Watanabe
IPC分类号： G01P15/08 , B81C99/00 , G01P15/125
摘要： For the purpose of shortening the MEMS manufacturing TAT, the MEMS manufacturing method according to the present invention includes a step of extracting the first MEMS with first characteristic in a range approximate to the required characteristic from the plurality of MEMS preliminarily prepared on the main surface of the substrate, and a step of forming a second MEMS having the required characteristic by directly processing the first MEMS.
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公开(公告)号：US11156650B2
公开(公告)日：2021-10-26
申请号：US16446907
申请日：2019-06-20
申请人： HITACHI, LTD.
摘要： One preferable aspect of the present invention is a state detecting system which detects a state of a machine device based on a detection signal from a detecting element provided to the machine device, and is the state detecting system which includes a non-normal time rate detecting unit which detects a rate or a value as a non-normal time rate, the rate being a rate of an integration value of a time during which an amplitude of the detection signal exceeds a predetermined normal amplitude within a predetermined time, and the value being physically equivalent to the rate.
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公开(公告)号：US10410826B2
公开(公告)日：2019-09-10
申请号：US16069796
申请日：2016-03-18
申请人： HITACHI, LTD.
发明人： Tetsufumi Kawamura , Misuzu Sagawa , Kazuki Watanabe , Keiji Watanabe , Shuntaro Machida , Nobuyuki Sugii , Daisuke Ryuzaki
IPC分类号： H01J37/28 , H01J37/302 , H01J37/305 , H01L21/3065 , H01L21/66 , B81C1/00
摘要： The invention is directed to a technique for reducing the time from the start of fabrication of a prototype structure to the completion of fabrication of a real structure. A device processing method includes steps of: fabricating a first structure using an ion beam under a first condition in a first region on a substrate; measuring a size of the first structure which is fabricated; comparing the measurement result with design data; determining a second condition from the comparison result; and fabricating a second structure using the ion beam under the second condition in a second region on the substrate.
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公开(公告)号：US11900777B2
公开(公告)日：2024-02-13
申请号：US17435894
申请日：2020-02-13
申请人： Hitachi, Ltd.
摘要： A work detection determination system performs detection determination on a work with high accuracy.
The work detection determination system includes a glove that is worn on a hand of a worker and includes a microphone detecting a work sound of a hand operation in which the hand works on a work target through a contact of the hand with the work target, a pressure sensor detecting a pressure of a work of the hand operation, a motion sensor detecting a motion of the hand operation, and a transmitting unit transmitting a sound signal of the microphone, a pressure signal of the pressure sensor, and a motion signal of the motion sensor; a receiving unit that receives the sound signal, the pressure signal, and the motion signal transmitted from the transmitting unit; a work determination unit that performs detection determination of a work content of the worker by using the sound signal, the pressure signal, and the motion signal; and a notification unit that notifies a determination result of the work determination unit.-
公开(公告)号：US11653882B2
公开(公告)日：2023-05-23
申请号：US16808892
申请日：2020-03-04
申请人： Hitachi, Ltd.
CPC分类号： A61B5/7214 , A61B5/11 , A61B5/6843 , A61B5/742 , A61B5/746 , G01L5/00 , G01P13/00 , A61B2562/0252
摘要： A sensor data correction system, includes: a standard motion mechanism unit for performing a standard motion of a wearable sensor; a determination unit calculating a relationship between first sensor data that is sensed by a first wearable sensor provided with the standard motion mechanism unit and second sensor data that is sensed by a second wearable sensor provided with the standard motion mechanism unit; and a correction unit correcting the first sensor data or the second sensor data, on the basis of the relationship that is calculated by the determination unit.
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公开(公告)号：US10336609B2
公开(公告)日：2019-07-02
申请号：US15610987
申请日：2017-06-01
申请人： HITACHI, LTD.
发明人： Keiji Watanabe , Shuntaro Machida , Katsuya Miura , Aki Takei , Tetsufumi Kawamura , Nobuyuki Sugii , Daisuke Ryuzaki
摘要： First, an ion beam is applied to a workpiece to form a tapered hole the side wall of which is inclined. Next, the application of the ion beam is stopped, and then a material gas is introduced from the gas source to the upper surface of the workpiece from an oblique direction to cause gas molecules to be adsorbed to the upper surface of the workpiece and to the upper portion of the side wall of the hole. Next, introduction of the material gas is stopped, and then the ion beam is applied again to the region of the workpiece where the hole is formed. As a result, at the upper portion of the side wall of the hole, film formation occurs using the gas molecules as the material adsorbed to the side wall of the hole, and, at the bottom portion of the hole, etching of the workpiece occurs.
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公开(公告)号：US11835412B2
公开(公告)日：2023-12-05
申请号：US17345354
申请日：2021-06-11
申请人： Hitachi, Ltd.
发明人： Hiroyuki Yoshimoto , Ryotaro Kawahara , Ryohei Matsui , Nobuyuki Sugii , Tsuneya Kurihara , Hirohiko Sagawa , Naoko Ushio , Motoki Tajima , Shingo Kirita
CPC分类号： G01L5/16 , G01B7/18 , G01L5/0095
摘要： Provided is a digitalization system capable of digitalizing the skills of delicate work. This digitalization system comprises a first sensor mounted on a work tool and which detects a deformation of the work tool when the work tool is pressed against a work target, a second sensor which detects a force applied to the work target or a force applied to the work tool when the work tool is pressed against the work target, and a computer which calculates an angle of a corner formed with the work tool and the work target based on sensor values acquired with the first sensor, and calculates a force applied to the work target when the work tool is pressed against the work target based on sensor values acquired with the second sensor.
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公开(公告)号：US11508018B2
公开(公告)日：2022-11-22
申请号：US16970717
申请日：2018-07-30
申请人： Hitachi, Ltd.
摘要： The present invention comprises: a wearable sensor that is worn by a worker, the wearable sensor having a sensor that receives sensor data from a sensing object, and a transmitter that transmits to a terminal the sensor data received by the sensor; and a computer that determines operation content for the worker on the basis of the sensor data received from the wearable sensor, and outputs the result of the determination to a display unit.
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公开(公告)号：US10203688B2
公开(公告)日：2019-02-12
申请号：US15593747
申请日：2017-05-12
申请人： HITACHI, LTD.
发明人： Masaharu Kinoshita , Nobuyuki Sugii , Tomonori Sekiguchi , Shuntaro Machida , Tetsufumi Kawamura
IPC分类号： G06F19/00 , G05B19/4099
摘要： A manufacturing device inputs design information including three-dimensional structure data, generates a manufacturing process flow, and displays the manufacturing process flow on a screen for a user to check, modify, and confirm the flow based on design information and setting information. A process method includes a first process method of a direct modeling method having an FIB method and a second process method of a semiconductor manufacturing process method which is a non-FIB method. The manufacturing device generates a plurality of manufacturing process flows by a combination of cases where each of the process methods is applied to each of the regions of the three-dimensional data. The manufacturing process flow includes a process device, the process method, a control parameter value, a process time, and a total process time for each of process steps. An output unit outputs a manufacturing process flow having, for example, the shortest total process time.
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