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公开(公告)号：US20180307030A1
公开(公告)日：2018-10-25
申请号：US16025288
申请日：2018-07-02
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomonori NAKAMURA , Ikuo ARATA , Yoshihiro ITO
Abstract: An optical device for microscopic observation 4 comprises: a cold stop 13 having openings 13d, 13e corresponding to a low-magnification microscope optical system 5 and being a stop member arranged in a vacuum vessel 12 to let the light from the sample S pass to the camera 3; a warm stop 10 having an opening 14 corresponding to a high-magnification microscope optical system 5 and being a stop member arranged outside the vacuum vessel 12 to let the light from the sample S pass toward the cold stop 13; and a support member 11 supporting the warm stop 10 so that the warm stop can be inserted to or removed from on the optical axis of the light from the sample S, wherein the warm stop 10 has a reflective surface 15 on the camera 3 side and wherein the opening 14 is smaller than the openings 13d, 13e.
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公开(公告)号：US20230087835A1
公开(公告)日：2023-03-23
申请号：US17795570
申请日：2020-11-24
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masataka IKESU , Ikuo ARATA , Yoshihiro ITO , Toshimichi ISHIZUKA
Abstract: The semiconductor failure analysis device includes: a light source configured to generate irradiation light with which the semiconductor device is irradiated; a solid immersion lens disposed on an optical path of the irradiation light; a light detection unit configured to receive reflected light and to output a detection signal according to the reflected light; an optical system 6 disposed between the light source and the solid immersion lens to emit the irradiation light to the semiconductor device via the solid immersion lens and disposed between the solid immersion lens and the light detection unit to emit the reflected light received via the solid immersion lens to the light detection unit. The light source emits the irradiation light having a center wavelength of 880 nm or more and 980 nm or less. The solid immersion lens is formed of GaAs.
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公开(公告)号：US20250093279A1
公开(公告)日：2025-03-20
申请号：US18937872
申请日：2024-11-05
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masataka IKESU , Ikuo ARATA , Yoshihiro ITO , Toshimichi ISHIZUKA
Abstract: The semiconductor failure analysis device 1 includes: a tester 2 configured to apply a stimulation signal to a semiconductor device 100; a light source 3 configured to generate irradiation light L1 with which the semiconductor device 100 is irradiated; a solid immersion lens 4 disposed on an optical path of the irradiation light L1; a light detection unit 5 configured to receive reflected light L2 and to output a detection signal according to the reflected light L2; an optical system 6 disposed between the light source 3 and the solid immersion lens 4 to emit the irradiation light L1 to the semiconductor device 100 via the solid immersion lens 4 and disposed between the solid immersion lens 4 and the light detection unit 5 to emit the reflected light L2 received via the solid immersion lens 4 to the light detection unit 5; and a computer 7 configured to obtain information on a failure portion of the semiconductor device 100 using the detection signal. The light source 3 emits the irradiation light L1 having a center wavelength of 880 nm or more and 980 nm or less. The solid immersion lens 4 is formed of GaAs.
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公开(公告)号：US20160313547A1
公开(公告)日：2016-10-27
申请号：US15198634
申请日：2016-06-30
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomonori NAKAMURA , Ikuo ARATA , Yoshihiro ITO
CPC classification number: G02B21/361 , G02B5/006 , G02B21/0004 , G02B21/0016 , G02B21/04 , G02B21/16 , G02B21/248 , G02B27/0018
Abstract: An optical device for microscopic observation 4 comprises: a cold stop 13 having openings 13d, 13e corresponding to a low-magnification microscope optical system 5 and being a stop member arranged in a vacuum vessel 12 to let the light from the sample S pass to the camera 3; a warm stop 10 having an opening 14 corresponding to a high-magnification microscope optical system 5 and being a stop member arranged outside the vacuum vessel 12 to let the light from the sample S pass toward the cold stop 13; and a support member 11 supporting the warm stop 10 so that the warm stop can be inserted to or removed from on the optical axis of the light from the sample S, wherein the warm stop 10 has a reflective surface 15 on the camera 3 side and wherein the opening 14 is smaller than the openings 13d, 13e.
Abstract translation: 用于显微镜观察的光学装置4包括：具有对应于低倍率显微镜光学系统5的开口13d，13e的冷止端13，并且是设置在真空容器12中以使来自样品S的光通过到 相机3; 具有对应于高倍率显微镜光学系统5的开口14的热止动件10，并且是设置在真空容器12外部以使来自样品S的光通向冷止器13的止动构件; 以及支撑暖挡件10的支撑构件11，使得暖挡件可以插入到来自样品S的光的光轴上或从其上移除，其中暖挡件10在相机3侧具有反射表面15， 其中开口14小于开口13d，13e。
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