公开(公告)号：US20230402511A1

公开(公告)日：2023-12-14

申请号：US18455643

申请日：2023-08-25

Applicant: FUJI ELECTRIC CO., LTD.

Inventor： Motoyoshi KUBOUCHI ,  Takashi YOSHIMURA ,  Yuki SAWA ,  Shogo YAMAGUCHI

IPC: H01L29/32 ,  H01L29/739 ,  H01L29/06 ,  H01L21/265 ,  H01L21/322 ,  H01L29/861 ,  H01L29/66

CPC classification number: H01L29/32 ,  H01L29/7395 ,  H01L29/0603 ,  H01L21/265 ,  H01L21/322 ,  H01L29/8613 ,  H01L29/66333

Abstract: Provided is a semiconductor device including a drift region, a buffer region which is provided in a back surface side of a semiconductor substrate relative to the drift region and has a first peak of a doping concentration, and a first lattice defect region which is provided in a front surface side of the semiconductor substrate relative to the first peak in a depth direction of the semiconductor substrate, in which the buffer region has a hydrogen peak which is provided in the front surface side of the semiconductor substrate relative to the first lattice defect region, and an integrated concentration obtained by integrating the doping concentration in a direction from an upper end of the drift region to the hydrogen peak in the depth direction of the semiconductor substrate is equal to or larger than a critical integrated concentration.