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公开(公告)号：US20220326102A1
公开(公告)日：2022-10-13
申请号：US17753510
申请日：2020-09-04
Applicant: FREC'N'SYS
Inventor： Sylvain Ballandras , Emilie Courjon , Florent Bernard , Thierry LaRoche , Julien Garcia
Abstract: An acoustic wave pressure sensor device configured to measure a pressure, comprising a substrate configured to bend when pressure is applied to the substrate such that an area of a first kind of strain and an area of a second kind of strain are formed in the substrate; an interdigitated transducer formed over the substrate; a first Bragg mirror formed over the substrate and arranged on one side of the interdigitated transducer; a second Bragg mirror formed over the substrate and arranged on another side of the interdigitated transducer; a first resonance cavity formed between the interdigitated transducer and the first Bragg mirror; a second resonance cavity formed between the interdigitated transducer and the second Bragg mirror; and wherein the first resonance cavity is formed over the area of the first kind of strain and the second resonance cavity is formed over the area of the second kind of strain.
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公开(公告)号：US20230361751A1
公开(公告)日：2023-11-09
申请号：US18042948
申请日：2021-03-03
Applicant: FREC'N'SYS
Inventor： Sylvain Ballandras , Thierry LaRoche , Julien Garcia , Emilie Courjon , Florent Bernard
CPC classification number: H03H9/02551 , H03H9/25 , H03H9/02574
Abstract: An acoustic wave sensor device comprises a quartz material layer comprising a planar surface, a first interdigitated transducer formed over the planar surface of the quartz material layer, a first reflection structure formed over the planar surface of the quartz material layer, a second reflection structure formed over the planar surface of the quartz material layer, a first resonance cavity formed between the first interdigitated transducer and the first reflection structure and a second resonance cavity formed between the first interdigitated transducer and the second reflection structure. The planar surface of the quartz material layer is defined by a crystal cut of a quartz material of the quartz material layer with angles φ in the range of −14° to −24°, θ in the range of −25° to −45° and ψ in the range of +8° to +28°.
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公开(公告)号：US20230308074A1
公开(公告)日：2023-09-28
申请号：US18247629
申请日：2021-09-29
Applicant: FREC'N'SYS
Inventor： Sylvain Ballandras , Emilie Courjon , Florent Bernard , Thierry LaRoche , Julien Garcia , Alexandre Clairet
IPC: H03H9/02
CPC classification number: H03H9/02574 , H03H9/02559 , H03H9/0259 , H03H9/14538
Abstract: A surface acoustic wave (SAW) device comprises an interdigitated transducer structure and at least one acoustic wave reflective structure provided on or in an acoustic wave propagating substrate. The interdigitated transducer structure comprises a first material and the at least one acoustic wave reflective structure comprises a second material different from the first material and/or the acoustic wave reflective structure and the interdigitated transducer structure have different geometrical parameters. A sensor comprises a SAW device as described herein, and a method is used for manufacturing a SAW device comprising at least one acoustic wave reflective structure.
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公开(公告)号：US20210028760A1
公开(公告)日：2021-01-28
申请号：US17042768
申请日：2019-03-20
Applicant: FREC'N'SYS
Inventor： Sylvain Ballandras , Florent Bernard , Emilie Courjon
Abstract: A surface acoustic wave device using a longitudinally polarized guided wave comprises a composite substrate comprising a piezoelectric layer formed over a base substrate, wherein the crystalline orientation of the piezoelectric layer with respect to the base substrate is such that, the phase velocity of the longitudinally polarized wave is below the critical phase velocity of the base substrate at which wave guiding within the piezoelectric layer vanishes. A method of fabrication of such surface acoustic wave device is also disclosed.
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公开(公告)号：US11828668B2
公开(公告)日：2023-11-28
申请号：US17753510
申请日：2020-09-04
Applicant: FREC'N'SYS
Inventor： Sylvain Ballandras , Emilie Courjon , Florent Bernard , Thierry LaRoche , Julien Garcia
CPC classification number: G01L9/0025 , G01L1/165 , G01L9/008
Abstract: An acoustic wave pressure sensor device configured to measure a pressure, comprising a substrate configured to bend when pressure is applied to the substrate such that an area of a first kind of strain and an area of a second kind of strain are formed in the substrate; an interdigitated transducer formed over the substrate; a first Bragg mirror formed over the substrate and arranged on one side of the interdigitated transducer; a second Bragg mirror formed over the substrate and arranged on another side of the interdigitated transducer; a first resonance cavity formed between the interdigitated transducer and the first Bragg mirror; a second resonance cavity formed between the interdigitated transducer and the second Bragg mirror; and wherein the first resonance cavity is formed over the area of the first kind of strain and the second resonance cavity is formed over the area of the second kind of strain.
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Patent Agency Ranking
公开(公告)号：US11606079B2
公开(公告)日：2023-03-14
申请号：US16980328
申请日：2019-03-14
Applicant: FREC'N'SYS
Inventor： Sylvain Ballandras , Florent Bernard , Emilie Courjon
Abstract: A transducer structure for a surface acoustic wave device, comprising a pair of inter-digitated comb electrodes, wherein the pair of inter-digitated comb electrodes comprises neighboring electrode means belonging to different comb electrodes and having a pitch p being defined as the edge-to-edge electrode means distance between two neighboring electrode means, the pitch p satisfying the Bragg condition; characterized in that the pair of inter-digitated comb electrodes comprises at least one region in which two or more neighboring electrode means belong to the same comb electrode while having an edge-to-edge distance to each other corresponding to the pitch p. The present disclosure relates also to a surface acoustic wave filter device.
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公开(公告)号：US20220407491A1
公开(公告)日：2022-12-22
申请号：US17753429
申请日：2020-09-18
Applicant: FREC'N'SYS
Inventor： Sylvain Ballandras , Emilie Courjon , Florent Bernard
Abstract: A transducer structure for a surface acoustic device comprises a composite substrate comprising a piezoelectric layer, a pair of inter-digitated comb electrodes, comprising a plurality of electrode means with a pitch p satisfying the Bragg condition, wherein the inter-digitated comb electrodes are embedded in the piezoelectric layer such that, in use, the excitation of a wave propagating mode in the volume of the electrode means is taking place and is the predominant propagating mode of the structure. The present disclosure relates also to an acoustic wave device comprising at least one transducer structure as described above and to a method for fabricating the transducer structure. The present disclosure relates also to the use of the frequency of the bulk wave propagating in the electrode means of the transducer structure in an acoustic wave device to generate contribution at high frequency, in particular, above 3 GHz.
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公开(公告)号：US20220341881A1
公开(公告)日：2022-10-27
申请号：US17753508
申请日：2020-09-04
Applicant: FREC'N'SYS
Inventor： Sylvain Ballandras , Emilie Courjon , Florent Bernard , Thierry LaRoche , Julien Garcia
Abstract: An acoustic wave sensor device, comprising an interdigitated transducer; a first reflection structure arranged on one side of the interdigitated transducer, and a second reflection structure arranged on another side of the interdigitated transducer; a first resonance cavity comprising a first upper surface and formed between the interdigitated transducer and the first reflection structure; a second resonance cavity comprising a second upper surface and formed between the interdigitated transducer and the second reflection structure; and wherein the second upper surface comprises a physical and/or chemical modification as compared to the first upper surface.
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公开(公告)号：US20220337220A1
公开(公告)日：2022-10-20
申请号：US17753428
申请日：2020-09-18
Applicant: FREC'N'SYS
Inventor： Sylvain Ballandras , Emilie Courjon , Florent Bernard
Abstract: A transducer structure for a surface acoustic device comprises a composite substrate comprising a piezoelectric layer, a pair of inter-digitated comb electrodes, comprising a plurality of electrode means with a pitch p satisfying the Bragg condition, wherein the inter-digitated comb electrodes are embedded in the piezoelectric layer such that, in use, the excitation of a wave propagating mode in the volume of the electrode means is taking place and is the predominant propagating mode of the structure. The present disclosure relates also to an acoustic wave device comprising at least one transducer structure as described above and to a method for fabricating the transducer structure. The present disclosure relates also to the use of the frequency of the bulk wave propagating in the electrode means of the transducer structure in an acoustic wave device to generate contribution at high frequency, in particular, above 3 GHz.
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公开(公告)号：US11437973B2
公开(公告)日：2022-09-06
申请号：US17042768
申请日：2019-03-20
Applicant: FREC'N'SYS
Inventor： Sylvain Ballandras , Florent Bernard , Emilie Courjon
Abstract: A surface acoustic wave device using a longitudinally polarized guided wave comprises a composite substrate comprising a piezoelectric layer formed over a base substrate, wherein the crystalline orientation of the piezoelectric layer with respect to the base substrate is such that, the phase velocity of the longitudinally polarized wave is below the critical phase velocity of the base substrate at which wave guiding within the piezoelectric layer vanishes. A method of fabrication of such surface acoustic wave device is also disclosed.
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