公开(公告)号：US10340113B2

公开(公告)日：2019-07-02

申请号：US15389151

申请日：2016-12-22

Applicant: FEI Company

Inventor： Erik René Kieft ,  Walter van Dijk

IPC: H01J37/04 ,  H01J37/147 ,  H01J37/244 ,  H01J37/28 ,  H01J37/20

Abstract: A method of using a Charged Particle Microscope, comprising: A specimen holder, for holding a specimen; A source, for producing an irradiating beam of charged particles; An illuminator, for directing said beam so as to irradiate the specimen; A detector, for detecting a flux of emergent radiation emanating from the specimen in response to said irradiation, additionally comprising the following steps: In said illuminator, providing an aperture plate comprising an array of apertures; Using a deflecting device to scan said beam across said array, thereby alternatingly interrupting and transmitting the beam so as to produce a train of beam pulses; Irradiating said specimen with said train of pulses, and using said detector to perform positionally resolved (temporally discriminated) detection of the attendant emergent radiation.

公开(公告)号：US20170243713A1

公开(公告)日：2017-08-24

申请号：US15389151

申请日：2016-12-22

Applicant: FEI Company

Inventor： Erik René Kieft ,  Walter van Dijk

IPC: H01J37/04 ,  H01J37/147 ,  H01J37/28 ,  H01J37/20 ,  H01J37/244

CPC classification number: H01J37/045 ,  H01J37/147 ,  H01J37/1474 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0432 ,  H01J2237/0435 ,  H01J2237/1504 ,  H01J2237/2446 ,  H01J2237/24495 ,  H01J2237/24585 ,  H01J2237/2802

Abstract: A method of using a Charged Particle Microscope, comprising: A specimen holder, for holding a specimen; A source, for producing an irradiating beam of charged particles; An illuminator, for directing said beam so as to irradiate the specimen; A detector, for detecting a flux of emergent radiation emanating from the specimen in response to said irradiation, additionally comprising the following steps: In said illuminator, providing an aperture plate comprising an array of apertures; Using a deflecting device to scan said beam across said array, thereby alternatingly interrupting and transmitting the beam so as to produce a train of beam pulses; Irradiating said specimen with said train of pulses, and using said detector to perform positionally resolved (temporally discriminated) detection of the attendant emergent radiation.