公开(公告)号：US11502247B2

公开(公告)日：2022-11-15

申请号：US17134683

申请日：2020-12-28

申请人： Everspin Technologies, Inc.

发明人： Sanjeev Aggarwal ,  Shimon ,  Kerry Joseph Nagel

IPC分类号： H01L43/14 ,  H01L27/22 ,  H01L43/04 ,  H01L43/06

摘要： A method of manufacturing a magnetoresistive device may comprise forming a first magnetic region, an intermediate region, and a second magnetic region of a magnetoresistive stack above a via; removing at least a portion of the second magnetic region using a first etch; removing at least a portion of the intermediate region and at least a portion of the first magnetic region using a second etch; removing at least a portion of material redeposited on the magnetoresistive stack using a third etch; and rendering at least a portion of the redeposited material remaining on the magnetoresistive stack electrically non-conductive.

公开(公告)号：US11917925B2

公开(公告)日：2024-02-27

申请号：US16750264

申请日：2020-01-23

申请人： Everspin Technologies, Inc.

发明人： Shimon

IPC分类号： H01L43/00 ,  H10N50/85 ,  H10N52/80 ,  H10N52/00 ,  G11C11/16 ,  H10N52/01

CPC分类号： H10N52/101 ,  G11C11/161 ,  H10N50/85 ,  H10N52/01 ,  H10N52/80

摘要： The magnetoresistive stack or structure of a magnetoresistive device includes one or more electrodes or electrically conductive lines, a magnetically fixed region, a magnetically free region disposed between the electrodes or electrically conductive lines, and a dielectric layer disposed between the free and fixed regions. The magnetoresistive device may further include a spin-Hall (SH) material proximate to at least a portion of the free region, and one or more insertion layers comprising antiferromagnetic material.

公开(公告)号：US11264564B2

公开(公告)日：2022-03-01

申请号：US16783740

申请日：2020-02-06

申请人： Everspin Technologies, Inc.

发明人： Sumio Ikegawa ,  Hamid Almasi ,  Shimon ,  Kerry Nagel ,  Han Kyu Lee

IPC分类号： H01L43/08 ,  H01L43/02 ,  H01L43/10

摘要： A magnetoresistive device may include one or more electrodes or electrically conductive lines and a fixed region and a free region disposed between the electrodes or electrically conductive lines. The fixed region may have a fixed magnetic state and the free region may be configured to have a first magnetic state and a second magnetic state. The free region may store a first value when in the first magnetic state and store a second value when in the second magnetic state. The magnetoresistive device may further include a dielectric layer between the free region and the fixed region and a spin-Hall (SH) material proximate to at least a portion of the free region. An insertion layer may be disposed between the SH material and the free region.

公开(公告)号：US11114608B2

公开(公告)日：2021-09-07

申请号：US16519741

申请日：2019-07-23

申请人： Everspin Technologies, Inc.

发明人： Jijun Sun ,  Shimon ,  Han-Jong Chia

IPC分类号： H01L43/04 ,  G11C11/16 ,  H01L27/22 ,  H01L43/06 ,  H01L43/14

摘要： Spin-Hall (SH) material is provided near free regions of magnetoresistive devices that include magnetic tunnel junctions. Current flowing through such SH material injects spin current into the free regions such that spin torque is applied to the free regions. The spin torque generated from SH material can be used to switch the free region or to act as an assist to spin-transfer torque generated by current flowing vertically through the magnetic tunnel junction, in order to improve the reliability, endurance, or both of the magnetoresistive device. Further, one or more additional regions or manufacturing steps may improve the switching efficiency and the thermal stability of magnetoresistive devices.