DISTRIBUTED FEEDBACK LASER DIODE AND MANUFACTURING METHOD THEREOF
    1.
    发明申请
    DISTRIBUTED FEEDBACK LASER DIODE AND MANUFACTURING METHOD THEREOF 审中-公开
    分布式反馈激光二极管及其制造方法

    公开(公告)号:US20140334512A1

    公开(公告)日:2014-11-13

    申请号:US14197910

    申请日:2014-03-05

    Abstract: Provided is a distributed feedback-laser diode (DFB-LD) and manufacturing method thereof. The DFB-LD includes a substrate; a lower clad layer having a grating on the substrate; an active waveguide extended in a first direction on the lower clad layer; an upper clad layer on the active waveguide; a signal pad on the upper clad layer; and at least one ground pad spaced apart from the active waveguide, the upper clad layer, and the signal pad in a second direction crossing the first direction, the at least one ground pad being coupled to the lower clad layer.

    Abstract translation: 提供了分布式反馈激光二极管(DFB-LD)及其制造方法。 DFB-LD包括基板; 在所述基板上具有光栅的下包层; 在下包层上沿第一方向延伸的有源波导; 有源波导上的上覆层; 上覆盖层上的信号焊盘; 以及与所述有源波导,所述上覆层和所述信号焊盘在与所述第一方向交叉的第二方向上间隔开的至少一个接地焊盘,所述至少一个接地焊盘联接到所述下包层。

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