HIGH ELECTRON MOBILITY TRANSISTOR AND MANUFACTURING METHOD THEREOF
    1.
    发明申请
    HIGH ELECTRON MOBILITY TRANSISTOR AND MANUFACTURING METHOD THEREOF 有权
    高电子移动晶体管及其制造方法

    公开(公告)号:US20150087142A1

    公开(公告)日:2015-03-26

    申请号:US14555182

    申请日:2014-11-26

    Abstract: Disclosed is a manufacturing method of a high electron mobility transistor. The method includes: forming a source electrode and a drain electrode on a substrate; forming a first insulating film having a first opening on an entire surface of the substrate, the first opening exposing a part of the substrate; forming a second insulating film having a second opening within the first opening, the second opening exposing a part of the substrate; forming a third insulating film having a third opening within the second opening, the third opening exposing a part of the substrate; etching a part of the first insulating film, the second insulating film and the third insulating film so as to expose the source electrode and the drain electrode; and forming a T-gate electrode on a support structure including the first insulating film, the second insulating film and the third insulating film.

    Abstract translation: 公开了一种高电子迁移率晶体管的制造方法。 该方法包括:在基板上形成源电极和漏电极; 在所述基板的整个表面上形成具有第一开口的第一绝缘膜,所述第一开口暴露所述基板的一部分; 在所述第一开口内形成具有第二开口的第二绝缘膜,所述第二开口暴露所述基板的一部分; 在所述第二开口内形成具有第三开口的第三绝缘膜,所述第三开口暴露所述基板的一部分; 蚀刻第一绝缘膜,第二绝缘膜和第三绝缘膜的一部分,以使源电极和漏电极露出; 以及在包括第一绝缘膜,第二绝缘膜和第三绝缘膜的支撑结构上形成T栅电极。

    POWER SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF
    3.
    发明申请
    POWER SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF 审中-公开
    功率半导体器件及其制造方法

    公开(公告)号:US20140363937A1

    公开(公告)日:2014-12-11

    申请号:US14308000

    申请日:2014-06-18

    Abstract: Disclosed are a power semiconductor device and a method of fabricating the same which can increase a breakdown voltage of the device through a field plate formed between a gate electrode and a drain electrode and achieve an easier manufacturing process at the same time. The power semiconductor device according to an exemplary embodiment of the present disclosure includes a source electrode and a drain electrode formed on a substrate; a dielectric layer formed between the source electrode and the drain electrode to have a lower height than heights of the two electrodes and including an etched part exposing the substrate; a gate electrode formed on the etched part; a field plate formed on the dielectric layer between the gate electrode and the drain electrode; and a metal configured to connect the field plate and the source electrode.

    Abstract translation: 公开了功率半导体器件及其制造方法,其可以通过形成在栅电极和漏电极之间的场板来增加器件的击穿电压,并且同时实现更容易的制造工艺。 根据本公开的示例性实施例的功率半导体器件包括形成在衬底上的源电极和漏电极; 形成在所述源电极和所述漏电极之间的电介质层具有比所述两个电极的高度低的高度,并且包括暴露所述衬底的蚀刻部分; 形成在蚀刻部分上的栅电极; 形成在栅电极和漏电极之间的电介质层上的场板; 以及配置成连接场板和源电极的金属。

    METHOD OF MANUFACTURING MICROARRAY TYPE NITRIDE LIGHT EMITTING DEVICE
    4.
    发明申请
    METHOD OF MANUFACTURING MICROARRAY TYPE NITRIDE LIGHT EMITTING DEVICE 审中-公开
    微波型氮化物发光器件的制造方法

    公开(公告)号:US20150236194A1

    公开(公告)日:2015-08-20

    申请号:US14704452

    申请日:2015-05-05

    Inventor: Sung Bum BAE

    Abstract: A method of manufacturing a microarray type nitride light emitting device includes forming a light emitting semiconductor layer by sequentially laminating a buffer layer, an n-type nitride contact layer, an active layer, and a p-type nitride contact layer on a substrate, forming a first transparent contact layer on the formed light emitting semiconductor layer, dividing a microarray type light emitting region through heat treatment of the first transparent contact layer through formation of a pattern, and connecting the divided light emitting regions by a second transparent contact layer.

    Abstract translation: 制造微阵列型氮化物发光器件的方法包括:通过在衬底上依次层叠缓冲层,n型氮化物接触层,有源层和p型氮化物接触层来形成发光半导体层,形成 在所形成的发光半导体层上的第一透明接触层,通过形成图案对第一透明接触层进行热处理,并通过第二透明接触层连接分割的发光区域来分割微阵列型发光区域。

    LIGHT EMITTING DIODE AND MANUFACTURING METHOD THEREOF
    5.
    发明申请
    LIGHT EMITTING DIODE AND MANUFACTURING METHOD THEREOF 审中-公开
    发光二极管及其制造方法

    公开(公告)号:US20150155434A1

    公开(公告)日:2015-06-04

    申请号:US14192299

    申请日:2014-02-27

    CPC classification number: H01L33/10 H01L33/005

    Abstract: Disclosed are a light emitting diode including: a buffer layer formed on a substrate; a Distributed Bragg Reflector (DBR) formed in a multilayer structure, in which mask patterns including opening regions and semiconductor layers formed on the mask patterns while being filled in the opening regions of the mask patterns are alternately formed, and formed on the buffer layer; and a light emitting structure formed on the DBR, and a manufacturing method thereof.

    Abstract translation: 公开了一种发光二极管,包括:形成在基板上的缓冲层; 形成在多层结构中的分布布拉格反射器(DBR),其中在掩模图案的开口区域中填充掩模图案的掩模图案包括开口区域和形成在掩模图案上的半导体层,并形成在缓冲层上; 以及形成在DBR上的发光结构及其制造方法。

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