Bipolar high voltage pulser
    1.
    发明授权

    公开(公告)号:US11824542B1

    公开(公告)日:2023-11-21

    申请号:US17853891

    申请日:2022-06-29

    IPC分类号: H03K3/57 H02M3/07

    CPC分类号: H03K3/57 H02M3/07

    摘要: A bipolar high voltage bipolar pulsing power supply is disclosed that can produce high voltage bipolar pulses with a positive high voltage pulse greater than about 2 kV followed by a negative high voltage pulse less than about −2 kV with a positive to negative dwell period between the positive high voltage pulse and the negative high voltage pulse. A high voltage bipolar pulsing power supply, for example, can reproduce high voltage pulses with a pulse repetition rate greater than about 10 kHz.

    HIGH FREQUENCY RF GENERATOR AND DC PULSING

    公开(公告)号:US20230073797A1

    公开(公告)日:2023-03-09

    申请号:US18055411

    申请日:2022-11-14

    IPC分类号: H01J37/32

    摘要: A nanosecond pulser system is disclosed. In some embodiments, the nanosecond pulser system may include a high voltage power supply; a nanosecond pulser electrically coupled with the high voltage power supply and switches voltage from the high voltage power supply at high frequencies; a transformer having a primary side and a secondary side, the nanosecond pulser electrically coupled with the primary side of the transformer; and an output electrically coupled with the transformer producing a waveform. In some embodiments, the waveform includes a plurality of high voltage pulses having a pulse amplitude greater than about 2 kV, a pulse width, and a pulse repetition frequency; and a sinusoidal waveform having a waveform frequency and a waveform amplitude greater than 100 V.

    ION CURRENT DROOP COMPENSATION
    5.
    发明申请

    公开(公告)号:US20220328287A1

    公开(公告)日:2022-10-13

    申请号:US17851022

    申请日:2022-06-27

    IPC分类号: H01J37/32

    摘要: In some embodiments, a high voltage power supply is disclosed that provides a plurality of high voltage pulses without any voltage droop between two subsequent pulses. In some embodiments, a high voltage power supply is disclosed that provides a waveform of voltage versus time having a plurality of high voltage pulses having a voltage greater than 1 kV and with a substantially flat portion between pulse. In some embodiments, a high voltage power supply is disclosed that includes a snubber with a snubber resistor having a resistance of about 7.5 mΩ1.25Ω; and a snubber capacitor having a capacitance of about 2 μF-35 μF.

    EFFICIENT ENERGY RECOVERY IN A NANOSECOND PULSER CIRCUIT

    公开(公告)号:US20220165542A1

    公开(公告)日:2022-05-26

    申请号:US17667531

    申请日:2022-02-08

    IPC分类号: H01J37/32 H01L21/683

    摘要: Some embodiments include a nanosecond pulser circuit. In some embodiments, a nanosecond pulser circuit may include: a high voltage power supply; a nanosecond pulser electrically coupled with the high voltage power supply and switches voltage from the high voltage power supply at high frequencies; a transformer having a primary side and a secondary side, the nanosecond pulser electrically coupled with the primary side of the transformer; and an energy recovery circuit electrically coupled with the secondary side of the transformer. In some embodiments, the energy recovery circuit comprises: an inductor electrically coupled with the high voltage power supply; a crowbar diode arranged in parallel with the secondary side of the transformer; and a second diode disposed in series with the inductor and arranged to conduct current from a load to the high voltage power supply.

    Nanosecond pulser bias compensation

    公开(公告)号:US11222767B2

    公开(公告)日:2022-01-11

    申请号:US16722115

    申请日:2019-12-20

    摘要: A high voltage power system is disclosed. In some embodiments, the high voltage power system includes a high voltage pulsing power supply; a transformer electrically coupled with the high voltage pulsing power supply; an output electrically coupled with the transformer and configured to output high voltage pulses with an amplitude greater than 1 kV and a frequency greater than 1 kHz; and a bias compensation circuit arranged in parallel with the output. In some embodiments, the bias compensation circuit can include a blocking diode; and a DC power supply arranged in series with the blocking diode.

    High voltage nanosecond pulser
    10.
    发明授权

    公开(公告)号:US10707864B2

    公开(公告)日:2020-07-07

    申请号:US15945722

    申请日:2018-04-04

    IPC分类号: H03K3/00 H03K17/56 H03K3/57

    摘要: A nanosecond pulser may include a plurality of switch modules, a transformer, and an output. Each of the plurality of switch modules may include one or more solid state switches. The transformer may include a core, at least one primary winding wound around at least a portion of the core, each of the plurality of switch modules may be coupled with the primary windings, and a plurality of secondary windings wound at least partially around a portion of the core. The output may output electrical pulses having a peak voltage greater than about 1 kilovolt and having a pulse width of less than about 1000 nanoseconds. The output may output electrical pulses having a peak voltage greater than about 5 kilovolts, a peak power greater than about 100 kilowatts, a pulse width between 10 nanoseconds and 1000 nanoseconds, a rise time less than about 50 nanoseconds, or some combination thereof.