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公开(公告)号：US11302518B2
公开(公告)日：2022-04-12
申请号：US16737615
申请日：2020-01-08
发明人： James Prager , Timothy Ziemba , Kenneth Miller , Ilia Slobodov , Morgan Quinley
IPC分类号： H01J37/32 , H01L21/683
摘要： Some embodiments include a nanosecond pulser circuit. In some embodiments, a nanosecond pulser circuit may include: a high voltage power supply; a nanosecond pulser electrically coupled with the high voltage power supply and switches voltage from the high voltage power supply at high frequencies; a transformer having a primary side and a secondary side, the nanosecond pulser electrically coupled with the primary side of the transformer; and an energy recovery circuit electrically coupled with the secondary side of the transformer. In some embodiments, the energy recovery circuit comprises: an inductor electrically coupled with the high voltage power supply; a crowbar diode arranged in parallel with the secondary side of the transformer; and a second diode disposed in series with the inductor and arranged to conduct current from a load to the high voltage power supply.
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公开(公告)号：US20210151295A1
公开(公告)日：2021-05-20
申请号：US17099729
申请日：2020-11-16
发明人： Timothy Ziemba , Morgan Quinley , Ilia Slobodov , Alex Henson , John Carscadden , James Prager , Kenneth Miller
IPC分类号： H01J37/32
摘要： Some embodiments include a high voltage pulsing circuit comprising: a high voltage pulsing power supply; a transformer electrically coupled with the high voltage pulsing power supply; an output electrically coupled with the transformer and configured to output high voltage pulses with an amplitude greater than 1 kV and a pulse repetition frequency greater than 1 kHz; a bias compensation circuit arranged in parallel with the output the bias compensation circuit comprising; first inductance comprising the inductive elements and any stray inductance between the bias compensation circuit and the high voltage pulsing power supply; and second inductance comprising the inductive elements and any stray inductance between the bias compensation circuit and the output.
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公开(公告)号：US10978955B2
公开(公告)日：2021-04-13
申请号：US16555948
申请日：2019-08-29
发明人： Timothy Ziemba , Ilia Slobodov , Alex Henson , Morgan Quinley , John Carscadden , James Prager , Kenneth Miller
摘要： A high voltage power system is disclosed. In some embodiments, the high voltage power system includes a high voltage pulsing power supply; a transformer electrically coupled with the high voltage pulsing power supply; an output electrically coupled with the transformer and configured to output high voltage pulses with an amplitude greater than 1 kV and a frequency greater than 1 kHz; and a bias compensation circuit arranged in parallel with the output. In some embodiments, the bias compensation circuit can include a blocking diode; and a DC power supply arranged in series with the blocking diode.
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公开(公告)号：US20240136152A1
公开(公告)日：2024-04-25
申请号：US18493515
申请日：2023-10-23
发明人： Kenneth Miller , John Carscadden , Ilia Slobodov , Timothy Ziemba , Huatsern Yeager , Eric Hanson , TaiSheng Yeager , Kevin Muggli , Morgan Quinley , James Prager , Connor Liston
IPC分类号： H01J37/32 , H01L21/683 , H01L21/687 , H02M3/335 , H03K3/57 , H03M1/12 , H05K7/20
CPC分类号： H01J37/32146 , H01J37/32082 , H01J37/32091 , H01J37/32128 , H01J37/32174 , H01J37/32541 , H01J37/32568 , H01J37/32715 , H01L21/6833 , H01L21/68757 , H02M3/33523 , H03K3/57 , H03M1/12 , H05K7/20154 , H05K7/20172 , H05K7/20254 , H05K7/20272 , H05K7/20281 , H05K7/20509
摘要： A nanosecond pulser system is disclosed. In some embodiments, the nanosecond pulser system may include a nanosecond pulser having a nanosecond pulser input; a plurality of switches coupled with the nanosecond pulser input; one or more transformers coupled with the plurality of switches; and an output coupled with the one or more transformers and providing a high voltage waveform with a amplitude greater than 2 kV and a frequency greater than 1 kHz based on the nanosecond pulser input. The nanosecond pulser system may also include a control module coupled with the nanosecond pulser input; and an control system coupled with the nanosecond pulser at a point between the transformer and the output, the control system providing waveform data regarding an high voltage waveform produced at the point between the transformer and the output.
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公开(公告)号：US11875971B2
公开(公告)日：2024-01-16
申请号：US17667531
申请日：2022-02-08
发明人： James Prager , Timothy Ziemba , Kenneth Miller , Ilia Slobodov , Morgan Quinley
IPC分类号： H01J37/32 , H01L21/683
CPC分类号： H01J37/32146 , H01J37/32091 , H01J37/32128 , H01J37/32174 , H01J37/32715 , H01L21/6833
摘要： Some embodiments include a nanosecond pulser circuit. In some embodiments, a nanosecond pulser circuit may include: a high voltage power supply; a nanosecond pulser electrically coupled with the high voltage power supply and switches voltage from the high voltage power supply at high frequencies; a transformer having a primary side and a secondary side, the nanosecond pulser electrically coupled with the primary side of the transformer; and an energy recovery circuit electrically coupled with the secondary side of the transformer. In some embodiments, the energy recovery circuit comprises: an inductor electrically coupled with the high voltage power supply; a crowbar diode arranged in parallel with the secondary side of the transformer; and a second diode disposed in series with the inductor and arranged to conduct current from a load to the high voltage power supply.
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公开(公告)号：US11810761B2
公开(公告)日：2023-11-07
申请号：US17411028
申请日：2021-08-24
发明人： Ilia Slobodov , John Carscadden , Kenneth Miller , Timothy Ziemba , Huatsern Yeager , Eric Hanson , TaiSheng Yeager , Kevin Muggli , Morgan Quinley , James Prager , Connor Liston
IPC分类号： H01J37/32 , H01L21/683 , H01L21/687 , H02M3/335 , H03K3/57 , H05K7/20 , H03M1/12
CPC分类号： H01J37/32146 , H01J37/32082 , H01J37/32091 , H01J37/32128 , H01J37/32174 , H01J37/32541 , H01J37/32568 , H01J37/32715 , H01L21/6833 , H01L21/68757 , H02M3/33523 , H03K3/57 , H03M1/12 , H05K7/20154 , H05K7/20172 , H05K7/20254 , H05K7/20272 , H05K7/20281 , H05K7/20509
摘要： A nanosecond pulser system is disclosed. In some embodiments, the nanosecond pulser system may include a nanosecond pulser having a nanosecond pulser input; a plurality of switches coupled with the nanosecond pulser input; one or more transformers coupled with the plurality of switches; and an output coupled with the one or more transformers and providing a high voltage waveform with a amplitude greater than 2 kV and a frequency greater than 1 kHz based on the nanosecond pulser input. The nanosecond pulser system may also include a control module coupled with the nanosecond pulser input; and an control system coupled with the nanosecond pulser at a point between the transformer and the output, the control system providing waveform data regarding an high voltage waveform produced at the point between the transformer and the output.
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公开(公告)号：US20210288582A1
公开(公告)日：2021-09-16
申请号：US17213230
申请日：2021-03-26
发明人： Timothy Ziemba , Ilia Slobodov , Alex Henson , Morgan Quinley , John Carscadden , James Prager , Kenneth Miller
IPC分类号： H02M3/335 , H02M7/5387 , H02M1/08 , H03H7/01 , H05G1/20
摘要： A high voltage power system is disclosed. In some embodiments, the high voltage power system includes a high voltage pulsing power supply; a transformer electrically coupled with the high voltage pulsing power supply; an output electrically coupled with the transformer and configured to output high voltage pulses with an amplitude greater than 1 kV and a frequency greater than 1 kHz; and a bias compensation circuit arranged in parallel with the output. In some embodiments, the bias compensation circuit can include a blocking diode; and a DC power supply arranged in series with the blocking diode.
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公开(公告)号：US20210125812A1
公开(公告)日：2021-04-29
申请号：US17142069
申请日：2021-01-05
IPC分类号： H01J37/32 , H01L21/683 , H01L21/687 , H02M3/335 , H03K3/57 , H05K7/20 , H03M1/12
摘要： Some embodiments include a high voltage pulsing power supply. A high voltage pulsing power supply may include: a high voltage pulser having an output that provides pulses with an amplitude greater than about 1 kV, a pulse width greater than about 1 μs, and a pulse repetition frequency greater than about 20 kHz; a plasma chamber; and an electrode disposed within the plasma chamber that is electrically coupled with the output of the high voltage pulser to produce a pulsing an electric field within the chamber.
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公开(公告)号：US10892141B2
公开(公告)日：2021-01-12
申请号：US16524950
申请日：2019-07-29
IPC分类号： H01J37/32 , H01L21/683 , H01L21/687 , H02M3/335 , H03K3/57 , H05K7/20 , H03M1/12
摘要： Some embodiments include a high voltage pulsing power supply. A high voltage pulsing power supply may include: a high voltage pulser having an output that provides pulses with an amplitude greater than about 1 kV, a pulse width greater than about 1 μs, and a pulse repetition frequency greater than about 20 kHz; a plasma chamber; and an electrode disposed within the plasma chamber that is electrically coupled with the output of the high voltage pulser to produce a pulsing an electric field within the chamber.
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公开(公告)号：US10892140B2
公开(公告)日：2021-01-12
申请号：US16523840
申请日：2019-07-26
IPC分类号： H01J37/32 , H01L21/683 , H01L21/687 , H02M3/335 , H03K3/57 , H05K7/20 , H03M1/12
摘要： A high voltage power system is disclosed. In some embodiments, the high voltage power system includes a high voltage pulsing power supply; a transformer electrically coupled with the high voltage pulsing power supply; an output electrically coupled with the transformer and configured to output high voltage pulses with an amplitude greater than 1 kV and a frequency greater than 1 kHz; and a bias compensation circuit arranged in parallel with the output. In some embodiments, the bias compensation circuit can include a blocking diode; and a DC power supply arranged in series with the blocking diode.
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