- 专利标题: EFFICIENT ENERGY RECOVERY IN A NANOSECOND PULSER CIRCUIT
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申请号: US17667531申请日: 2022-02-08
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公开(公告)号: US20220165542A1公开(公告)日: 2022-05-26
- 发明人: James Prager , Timothy Ziemba , Kenneth Miller , Ilia Slobodov , Morgan Quinley
- 申请人: Eagle Harbor Technologies, Inc.
- 申请人地址: US WA Seattle
- 专利权人: Eagle Harbor Technologies, Inc.
- 当前专利权人: Eagle Harbor Technologies, Inc.
- 当前专利权人地址: US WA Seattle
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; H01L21/683
摘要:
Some embodiments include a nanosecond pulser circuit. In some embodiments, a nanosecond pulser circuit may include: a high voltage power supply; a nanosecond pulser electrically coupled with the high voltage power supply and switches voltage from the high voltage power supply at high frequencies; a transformer having a primary side and a secondary side, the nanosecond pulser electrically coupled with the primary side of the transformer; and an energy recovery circuit electrically coupled with the secondary side of the transformer. In some embodiments, the energy recovery circuit comprises: an inductor electrically coupled with the high voltage power supply; a crowbar diode arranged in parallel with the secondary side of the transformer; and a second diode disposed in series with the inductor and arranged to conduct current from a load to the high voltage power supply.
公开/授权文献
- US11875971B2 Efficient energy recovery in a nanosecond pulser circuit 公开/授权日:2024-01-16
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