公开(公告)号：US11728138B2

公开(公告)日：2023-08-15

申请号：US17851022

申请日：2022-06-27

Applicant: EAGLE HARBOR TECHNOLOGIES, INC.

Inventor： Christopher Bowman ,  Connor Liston ,  Kenneth Miller ,  Timothy Ziemba

IPC: H01J37/32 ,  H01J49/24

CPC classification number: H01J37/32174 ,  H01J37/32128 ,  H01J37/32146

Abstract: In some embodiments, a high voltage power supply is disclosed that provides a plurality of high voltage pulses without any voltage droop between two subsequent pulses. In some embodiments, a high voltage power supply is disclosed that provides a waveform of voltage versus time having a plurality of high voltage pulses having a voltage greater than 1 kV and with a substantially flat portion between pulse. In some embodiments, a high voltage power supply is disclosed that includes a snubber with a snubber resistor having a resistance of about 7.5 mΩ1.25Ω; and a snubber capacitor having a capacitance of about 2 μF-35 μF.

公开(公告)号：US20210029815A1

公开(公告)日：2021-01-28

申请号：US16919085

申请日：2020-07-01

Applicant: Eagle Harbor Technologies, Inc.

Inventor： Christopher Bowman ,  Connor Liston ,  Nicolas A. Yang ,  Kenneth Miller ,  Ilia Slobodov ,  Timothy Ziemba

IPC: H05H1/46 ,  H01J37/32

Abstract: Some embodiments include a plasma system that includes a plasma chamber; an RF driver driving RF bursts into the plasma chamber with an RF frequency greater than 2 MHz; a nanosecond pulser driving pulses into the plasma chamber with a pulse repetition frequency a peak voltage, the pulse repetition frequency being less than the RF frequency and the peak voltage being greater than 2 kV; a first filter disposed between the RF driver and the plasma chamber; and a second filter disposed between the nanosecond pulser and the plasma chamber.

公开(公告)号：US20240234090A9

公开(公告)日：2024-07-11

申请号：US18493515

申请日：2023-10-24

Applicant: Eagle Harbor Technologies, Inc.

Inventor： Kenneth Miller ,  John Carscadden ,  Ilia Slobodov ,  Timothy Ziemba ,  Huatsern Yeager ,  Eric Hanson ,  TaiSheng Yeager ,  Kevin Muggli ,  Morgan Quinley ,  James Prager ,  Connor Liston

IPC: H01J37/32 ,  H01L21/683 ,  H01L21/687 ,  H02M3/335 ,  H03K3/57 ,  H03M1/12 ,  H05K7/20

CPC classification number: H01J37/32146 ,  H01J37/32082 ,  H01J37/32091 ,  H01J37/32128 ,  H01J37/32174 ,  H01J37/32541 ,  H01J37/32568 ,  H01J37/32715 ,  H01L21/6833 ,  H01L21/68757 ,  H02M3/33523 ,  H03K3/57 ,  H03M1/12 ,  H05K7/20154 ,  H05K7/20172 ,  H05K7/20254 ,  H05K7/20272 ,  H05K7/20281 ,  H05K7/20509

Abstract: A nanosecond pulser system is disclosed. In some embodiments, the nanosecond pulser system may include a nanosecond pulser having a nanosecond pulser input; a plurality of switches coupled with the nanosecond pulser input; one or more transformers coupled with the plurality of switches; and an output coupled with the one or more transformers and providing a high voltage waveform with a amplitude greater than 2 kV and a frequency greater than 1 kHz based on the nanosecond pulser input. The nanosecond pulser system may also include a control module coupled with the nanosecond pulser input; and an control system coupled with the nanosecond pulser at a point between the transformer and the output, the control system providing waveform data regarding an high voltage waveform produced at the point between the transformer and the output.

公开(公告)号：US11860126B2

公开(公告)日：2024-01-02

申请号：US17493814

申请日：2021-10-04

Applicant: Eagle Harbor Technologies, Inc.

Inventor： James R. Prager ,  Timothy M. Ziemba ,  Kenneth E. Miller ,  Ilia Slobodov ,  Paul Melnik ,  Connor Liston ,  Kevin Muggli ,  TaiSheng Yeager ,  John G. Carscadden

IPC: G01N27/90 ,  G01N27/9013

CPC classification number: G01N27/9006 ,  G01N27/906 ,  G01N27/9013

Abstract: Some embodiments of the invention may include an eddy current nondestructive evaluation device. The eddy current nondestructive evaluation device may include a rotating body; a motor coupled with the rotating body such that the motor rotates the rotating body; a permanent magnet coupled with the rotating body; a pickup coil coupled with the rotating body; and an integrator circuit electrically coupled with the pickup coil that integrates a voltage from the pickup coil to produce integrated voltage data.

公开(公告)号：US20220037122A1

公开(公告)日：2022-02-03

申请号：US17493835

申请日：2021-10-04

Applicant: EAGLE HARBOR TECHNOLOGIES, INC.

Inventor： Christopher Bowman ,  Connor Liston ,  Kenneth Miller ,  Timothy Ziemba

IPC: H01J37/32

Abstract: A pulse generator is disclosed. The pulse generator includes a DC source; a plurality of switches, a transformer; and a pulsing output. The pulse generator can be coupled with a plasma chamber. The pulsing output outputs high voltage pulses having a peak-to-peak voltage greater than 1 kV and a voltage portion between consecutive high voltage bipolar pulses that has a negative slope that substantially offsets the voltage reduction on a wafer within a plasma chamber due to an ion current. The resulting voltage at the wafer may be substantially flat between consecutive pulses.

公开(公告)号：US20240347318A1

公开(公告)日：2024-10-17

申请号：US18642777

申请日：2024-04-22

Applicant: EAGLE HARBOR TECHNOLOGIES, INC.

Inventor： Christopher Bowman ,  Connor Liston ,  Kenneth Miller ,  Timothy Ziemba

IPC: H01J37/32

CPC classification number: H01J37/32146 ,  H01J37/32174

Abstract: A pulse generator is disclosed. The pulse generator includes a DC source; a plurality of switches, a transformer; and a pulsing output. The pulse generator can be coupled with a plasma chamber. The pulsing output outputs high voltage pulses having a peak-to-peak voltage greater than 1 kV and a voltage portion between consecutive high voltage bipolar pulses that has a negative slope that substantially offsets the voltage reduction on a wafer within a plasma chamber due to an ion current. The resulting voltage at the wafer may be substantially flat between consecutive pulses.

公开(公告)号：US20210351009A1

公开(公告)日：2021-11-11

申请号：US17231923

申请日：2021-04-15

Applicant: Eagle Harbor Technologies, Inc.

Inventor： Timothy Ziemba ,  Ilia Slobodov ,  John Carscadden ,  Kenneth Miller ,  Connor Liston

IPC: H01J37/32 ,  H01L21/683 ,  H01L21/687 ,  H02M3/335 ,  H03K3/57 ,  H05K7/20 ,  H03M1/12

Abstract: Some embodiments include a thermal management system for a nanosecond pulser. In some embodiments, the thermal management system may include a switch cold plates coupled with switches, a core cold plate coupled with one or more transformers, resistor cold plates coupled with resistors, or tubing coupled with the switch cold plates, the core cold plates, and the resistor cold plates. The thermal management system may include a heat exchanger coupled with the resistor cold plates, the core cold plate, the switch cold plate, and the tubing. The heat exchanger may also be coupled with a facility fluid supply.

公开(公告)号：US10991553B2

公开(公告)日：2021-04-27

申请号：US16524926

申请日：2019-07-29

Applicant: Eagle Harbor Technologies, Inc.

Inventor： Timothy Ziemba ,  Ilia Slobodov ,  John Carscadden ,  Kenneth Miller ,  Connor Liston

IPC: H05K7/20 ,  H01J37/32 ,  H01L21/683 ,  H01L21/687 ,  H02M3/335 ,  H03K3/57 ,  H03M1/12

Abstract: Some embodiments include a thermal management system for a nanosecond pulser. In some embodiments, the thermal management system may include a switch cold plates coupled with switches, a core cold plate coupled with one or more transformers, resistor cold plates coupled with resistors, or tubing coupled with the switch cold plates, the core cold plates, and the resistor cold plates. The thermal management system may include a heat exchanger coupled with the resistor cold plates, the core cold plate, the switch cold plate, and the tubing. The heat exchanger may also be coupled with a facility fluid supply.

公开(公告)号：US20190277804A1

公开(公告)日：2019-09-12

申请号：US16297352

申请日：2019-03-08

Applicant: Eagle Harbor Technologies, Inc

Inventor： James R. Prager ,  Timothy M. Ziemba ,  Kenneth E. Miller ,  Iia Slobodov ,  Paul Melnik ,  Connor Liston ,  Kevin Muggli ,  TaiSheng Yeager ,  John G. Carscadden

IPC: G01N27/90

Abstract: Some embodiments of the invention may include an eddy current nondestructive evaluation device. The eddy current nondestructive evaluation device may include a rotating body; a motor coupled with the rotating body such that the motor rotates the rotating body; a permanent magnet coupled with the rotating body; a pickup coil coupled with the rotating body; and an integrator circuit electrically coupled with the pickup coil that integrates a voltage from the pickup coil to produce integrated voltage data.

公开(公告)号：US20230073797A1

公开(公告)日：2023-03-09

申请号：US18055411

申请日：2022-11-14

Applicant: EAGLE HARBOR TECHNOLOGIES, INC.

Inventor： Christopher Bowman ,  Connor Liston ,  Kenneth Miller ,  Timothy Ziemba

IPC: H01J37/32

Abstract: A nanosecond pulser system is disclosed. In some embodiments, the nanosecond pulser system may include a high voltage power supply; a nanosecond pulser electrically coupled with the high voltage power supply and switches voltage from the high voltage power supply at high frequencies; a transformer having a primary side and a secondary side, the nanosecond pulser electrically coupled with the primary side of the transformer; and an output electrically coupled with the transformer producing a waveform. In some embodiments, the waveform includes a plurality of high voltage pulses having a pulse amplitude greater than about 2 kV, a pulse width, and a pulse repetition frequency; and a sinusoidal waveform having a waveform frequency and a waveform amplitude greater than 100 V.