-
公开(公告)号：US09378921B2
公开(公告)日：2016-06-28
申请号：US14428163
申请日：2013-09-16
申请人： DELMIC B.V.
发明人： Jacob Pieter Hoogenboom , Aernout Christiaan Zonnevylle , Pieter Kruit , Angela Carolina Narváez-González
CPC分类号： H01J37/023 , H01J37/222 , H01J37/228 , H01J37/28 , H01J2237/221 , H01J2237/2482 , H01J2237/2801 , H01J2237/2808
摘要： The present invention relates to a method for mutually aligning a scanning electron microscope SEM and a light microscope LM by creating a change (61) in the detected light signal of the light microscope LM by illuminating a substrate with an electron beam, correlating the position of the electron beam in the coordinate system of the scanning electron microscope SEM to the position of the observed change in the detected light signal in the coordinate system of the light microscope LM, and relatively shifting the scanning electron microscope SEM and the light microscope LM with respect to one another to a desired relative position of the coordinate systems (60, 62).
摘要翻译： 本发明涉及通过用电子束照射基板来在光显微镜LM的检测光信号中产生变化（61）来相互对准扫描电子显微镜SEM和光学显微镜LM的方法， 扫描电子显微镜SEM的坐标系中的电子束到光显微镜LM的坐标系中检测到的光信号的观察位置的位置，并相对移动扫描电子显微镜SEM和光学显微镜LM，相对于 彼此相对于坐标系（60,62）的期望的相对位置。
-
公开(公告)号：US20150262784A1
公开(公告)日：2015-09-17
申请号：US14428163
申请日：2013-09-16
申请人： DELMIC B.V.
发明人： Jacob Pieter Hoogenboom , Aernout Christiaan Zonnevylle , Pieter Kruit , Angela Carolina Narváez-González
CPC分类号： H01J37/023 , H01J37/222 , H01J37/228 , H01J37/28 , H01J2237/221 , H01J2237/2482 , H01J2237/2801 , H01J2237/2808
摘要： The present invention relates to a method for mutually aligning a scanning electron microscope SEM and a light microscope LM by creating a change (61) in the detected light signal of the light microscope LM by illuminating a substrate with an electron beam, correlating the position of the electron beam in the coordinate system of the scanning electron microscope SEM to the position of the observed change in the detected light signal in the coordinate system of the light microscope LM, and relatively shifting the scanning electron microscope SEM and the light microscope LM with respect to one another to a desired relative position of the coordinate systems (60, 62).
摘要翻译： 本发明涉及通过用电子束照射基板来在光显微镜LM的检测光信号中产生变化（61）来相互对准扫描电子显微镜SEM和光学显微镜LM的方法， 扫描电子显微镜SEM的坐标系中的电子束到光显微镜LM的坐标系中检测到的光信号的观察位置的位置，并相对移动扫描电子显微镜SEM和光学显微镜LM，相对于 彼此相对于坐标系（60,62）的期望的相对位置。
-
搜索结果
2 条记录 (耗时 0.023 秒)
