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公开(公告)号：US09976969B1
公开(公告)日：2018-05-22
申请号：US15477311
申请日：2017-04-03
发明人： Paul Van Der Wilt
CPC分类号： G01N21/958 , G01N21/27 , G01N21/4788 , G01N21/956 , G01N2021/8427 , G01N2021/8477 , G02B6/0011 , H01S3/005 , H01S3/225 , H04N7/183
摘要： A method of evaluating a crystallized silicon layer on a substrate includes injecting light into the substrate in such a way that it is wave-guided by the substrate. Wave-guided injected light is diffracted out of the substrate by periodic features of the silicon layer. The diffracted light is detected and processed to evaluate the crystalline layer.
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公开(公告)号：US09335276B2
公开(公告)日：2016-05-10
申请号：US14195656
申请日：2014-03-03
发明人： Paul Van Der Wilt
IPC分类号： H01L21/268 , G01N21/95 , H01L21/66 , G01N21/84 , G01N21/88 , G02B21/00 , G01N21/47 , H01L21/02
CPC分类号： H01L21/67253 , C30B1/02 , C30B29/06 , G01N21/21 , G01N21/4788 , G01N21/8422 , G01N21/8851 , G01N21/9501 , G01N2021/8461 , G01N2021/8477 , G01N2201/06113 , G01N2201/068 , G01N2201/0683 , G01N2201/0697 , G01N2201/10 , G01N2201/105 , G02B21/002 , G02B21/0092 , H01L21/02532 , H01L21/02686 , H01L21/268 , H01L22/12
摘要： A method is disclosed evaluating a silicon layer crystallized by irradiation with pulses form an excimer-laser. The crystallization produces periodic features on the crystallized layer dependent on the number of and energy density ED in the pulses to which the layer has been exposed. An area of the layer is illuminated with light. A microscope image of the illuminated area is made from light diffracted from the illuminated are by the periodic features. The microscope image includes corresponding periodic features. The ED is determined from a measure of the contrast of the periodic features in the microscope image.
摘要翻译： 公开了评估通过用脉冲照射形成准分子激光而结晶的硅层的方法。 结晶层上产生周期性特征，取决于层暴露于的脉冲中的数量和能量密度ED。 该层的一个区域用光照亮。 照明区域的显微镜图像由从被照明的周期特征衍射的光制成。 显微镜图像包括相应的周期特征。 ED是从显微镜图像中的周期特征的对比度的量度确定的。
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公开(公告)号：US11183808B2
公开(公告)日：2021-11-23
申请号：US16796587
申请日：2020-02-20
发明人： Igor Bragin , Timur Misyuryaev , Paul Van Der Wilt
摘要： Fine-structure in the transverse mode of an excimer laser beam is minimized by having a plurality of resonator mirrors located at each end of a linear excimer laser. At one end, a highly-reflective end mirror and a partially-reflective end mirror are inclined at small angle with respect to each other. At the other end, two output-coupling mirrors are inclined at a small angle with respect to each other. This arrangement of resonator mirrors generates a composite laser beam that blurs any fine structure.
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公开(公告)号：US10121687B2
公开(公告)日：2018-11-06
申请号：US15093424
申请日：2016-04-07
发明人： Paul Van Der Wilt
IPC分类号： H01L21/67 , G01N21/95 , H01L21/66 , G01N21/84 , G01N21/88 , G02B21/00 , G01N21/47 , H01L21/268 , G01N21/21 , H01L21/02
摘要： A method is disclosed evaluating a silicon layer crystallized by irradiation with pulses form an excimer-laser. The crystallization produces periodic features on the crystallized layer dependent on the number of and energy density ED in the pulses to which the layer has been exposed. An area of the layer is illuminated with light. A microscope image of the illuminated area is made from light diffracted from the illuminated are by the periodic features. The microscope image includes corresponding periodic features. The ED is determined from a measure of the contrast of the periodic features in the microscope image.
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公开(公告)号：US10247952B2
公开(公告)日：2019-04-02
申请号：US15001544
申请日：2016-01-20
IPC分类号： B23K26/06 , G02B27/09 , G02B27/28 , H01L21/02 , H01L27/12 , B23K103/00 , B23K26/067 , B23K26/073
摘要： In a laser line projection apparatus, six spaced-apart unpolarized laser-beams are plane-polarized with low loss by a combination of a thin-film polarizer, a reflector, and two polarization rotators. Two beams are polarized in each of three polarization-orientations. Two of the polarization-orientations are orthogonally aligned with each other in P and S orientations. The other polarization-orientation is non-orthogonally aligned in an intermediate orientation. The beams are intensity-homogenized and projected into a line of radiation. Any point on the line of radiation is formed from rays with an angular distribution of polarization-orientation from S to P through the intermediate orientation and back to S through the intermediate orientation.
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