公开(公告)号：US11183808B2

公开(公告)日：2021-11-23

申请号：US16796587

申请日：2020-02-20

申请人： Coherent LaserSystems GMBH & Co. KG

发明人： Igor Bragin ,  Timur Misyuryaev ,  Paul Van Der Wilt

IPC分类号： H01S3/082 ,  H01S3/034 ,  H01S3/08 ,  H01S3/225

摘要： Fine-structure in the transverse mode of an excimer laser beam is minimized by having a plurality of resonator mirrors located at each end of a linear excimer laser. At one end, a highly-reflective end mirror and a partially-reflective end mirror are inclined at small angle with respect to each other. At the other end, two output-coupling mirrors are inclined at a small angle with respect to each other. This arrangement of resonator mirrors generates a composite laser beam that blurs any fine structure.

公开(公告)号：US10069273B1

公开(公告)日：2018-09-04

申请号：US15448023

申请日：2017-03-02

申请人： COHERENT LASERSYSTEMS GMBH & CO. KG

发明人： Igor Bragin ,  Oleg Melnikov ,  Timur Misyuryaev

IPC分类号： H01S3/225 ,  H01S3/032 ,  H01S3/097

摘要： A xenon chloride (XeCl) excimer laser includes a lasing-gas mixture including a buffer gas, a noble gas, a halogen-donating gas, and deuterium. The deuterium is present in a concentration greater than about 10 parts-per-million.