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公开(公告)号：US20240088323A1
公开(公告)日：2024-03-14
申请号：US18272930
申请日：2022-01-07
发明人： Jan BRUNE
IPC分类号： H01L33/00
CPC分类号： H01L33/0095 , H01L33/0093
摘要： A method for inter-substrate transfer of microelectronic devices includes applying a polymer coating to a top surface of a microelectronic device located on a first substrate, depositing an ultraviolet-transmissive adhesive on a second substrate, contacting the polymer-coated top surface of the microelectronic device to the adhesive to bond the microelectronic device to the second substrate, detaching the microelectronic device from the first substrate, and, while the bottom surface of the microelectronic device faces a third substrate, irradiating and ablating the polymer coating with ultraviolet laser light through the second substrate and the adhesive to transfer the microelectronic device from the second substrate to the third substrate via laser lift-off. The method allows for use of ultraviolet-transmissive adhesives, with the polymer coating protecting the microelectronic device from damage by ultraviolet light that, in the absence of the polymer coating, would be transmitted by the adhesive during laser lift off.
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公开(公告)号：US11619860B1
公开(公告)日：2023-04-04
申请号：US17486603
申请日：2021-09-27
摘要： A device for shifting a nonlinear crystal arranged to frequency convert a laser beam includes an anchor, a mount for holding the nonlinear crystal, and two parallel flexures each interconnecting the mount and the anchor to cantilever the mount from the anchor. Each flexure extends in a first horizontal direction from the mount to the anchor. The two flexures being offset from each other in a vertical direction. The device also includes a transducer connecting between the anchor and the mount. Bending of the transducer shifts the position of the mount in the vertical direction, and the two parallel flexures cooperate to prevent rotation of the mount during shifting of the mount position induced by the transducer. This device provides an inexpensive and compact crystal-shifter solution with crystal-orientation stability equaling that of far more costly and bulky conventional translation stages.
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公开(公告)号：US20230100424A1
公开(公告)日：2023-03-30
申请号：US17486603
申请日：2021-09-27
摘要： A device for shifting a nonlinear crystal arranged to frequency convert a laser beam includes an anchor, a mount for holding the nonlinear crystal, and two parallel flexures each interconnecting the mount and the anchor to cantilever the mount from the anchor. Each flexure extends in a first horizontal direction from the mount to the anchor. The two flexures being offset from each other in a vertical direction. The device also includes a transducer connecting between the anchor and the mount. Bending of the transducer shifts the position of the mount in the vertical direction, and the two parallel flexures cooperate to prevent rotation of the mount during shifting of the mount position induced by the transducer. This device provides an inexpensive and compact crystal-shifter solution with crystal-orientation stability equaling that of far more costly and bulky conventional translation stages.
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公开(公告)号：US11563305B2
公开(公告)日：2023-01-24
申请号：US17231932
申请日：2021-04-15
发明人： Rüdiger Von Elm
摘要： A system for resonantly enhanced frequency conversion includes a nonlinear crystal for frequency converting a pump laser beam, and mirrors forming a ring resonator for the pump laser beam such that a closed propagation path of the pump laser beam, inside the ring resonator, passes through the nonlinear crystal. The mirrors include an adaptive mirror, a curved-mirror pair positioned in a first segment of the propagation path spanning between the adaptive mirror and the nonlinear crystal, and an input coupler for coupling the pump laser beam into the ring resonator. The curved-mirror pair forms an imaging system having conjugate planes at the adaptive mirror and the nonlinear crystal. The input coupler is positioned in a second segment of the propagation path that spans between the adaptive mirror and the nonlinear crystal and does not include deflection by the curved-mirror pair.
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公开(公告)号：US11101614B1
公开(公告)日：2021-08-24
申请号：US16801857
申请日：2020-02-26
发明人： Wolf Seelert , Rüdiger Von Elm
摘要： An optic produces a beam of ultraviolet laser radiation from a beam of visible laser radiation and spatially separates the ultraviolet laser beam from the visible laser beam. The optic includes two crystals made of the same optically-nonlinear material that are contact bonded along a planar interface. One crystal has principle crystal axes that are oriented for type-I second-harmonic generation. The ultraviolet laser beam exits the optic through an uncoated surface of the other crystal. The principle crystal axes of the two crystals have different orientations and have reflection symmetry about the planar interface.
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公开(公告)号：US20180257170A1
公开(公告)日：2018-09-13
申请号：US15913457
申请日：2018-03-06
发明人： Ludger Müllers
IPC分类号： B23K26/00
CPC分类号： B23K26/53 , B23K26/359 , B23K2103/50 , B23K2103/54 , C03B33/0222 , C03B33/091 , C03B33/093
摘要： A method for cutting and separating an item from a workpiece made of a brittle material is disclosed. The method uses straight and circular release features that are arranged to cause controlled cracking in scrap material close to each inside curve in the outline of the item. A first pulsed laser-beam weakens material along the outline of the item and along the release features. A second laser-beam selectively heats the release features for sufficient time to cause melting and deformation, thereby initiating the controlled cracking.
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公开(公告)号：US09429777B2
公开(公告)日：2016-08-30
申请号：US14466147
申请日：2014-08-22
发明人： Rüdiger Von Elm , Wolf Seelert
CPC分类号： G02F1/0311 , G02F1/0018 , G02F1/0136
摘要： An electro-optic modulator for a laser beam includes an yttrium vanadate crystal cooperative with a double-pass electro-optic switch. A beam to be modulated passes through the yttrium vanadate crystal and makes a forward and a reverse pass through the electro-optic switch. The electro-optic switch returns the beam to the vanadate crystal selectively in one of two polarization orientations at 90 degrees to each other. Depending on the polarization orientation, the returned beam is transmitted by the crystal along a corresponding one of two about-parallel paths spaced apart from each other.
摘要翻译： 用于激光束的电光调制器包括与双通电光开关协作的钒酸钇晶体。 待调制的光束通过钒酸钇晶体，并使其前进和反向通过电光开关。 电光开关将光束以两个偏振方向之一以90度彼此选择性地返回到钒酸盐晶体。 取决于偏振方向，返回的光束由晶体沿着彼此间隔开的两个约平行路径中的对应的一个透射。
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8.发明申请公开(公告)号：US20160233116A1
公开(公告)日：2016-08-11
申请号：US15093424
申请日：2016-04-07
发明人： Paul VAN DER WILT
CPC分类号： H01L21/67253 , C30B1/02 , C30B29/06 , G01N21/21 , G01N21/4788 , G01N21/8422 , G01N21/8851 , G01N21/9501 , G01N2021/8461 , G01N2021/8477 , G01N2201/06113 , G01N2201/068 , G01N2201/0683 , G01N2201/0697 , G01N2201/10 , G01N2201/105 , G02B21/002 , G02B21/0092 , H01L21/02532 , H01L21/02686 , H01L21/268 , H01L22/12
摘要： A method is disclosed evaluating a silicon layer crystallized by irradiation with pulses form an excimer-laser. The crystallization produces periodic features on the crystallized layer dependent on the number of and energy density ED in the pulses to which the layer has been exposed. An area of the layer is illuminated with light. A microscope image of the illuminated area is made from light diffracted from the illuminated are by the periodic features. The microscope image includes corresponding periodic features. The ED is determined from a measure of the contrast of the periodic features in the microscope image.
摘要翻译： 公开了评估通过用脉冲照射形成准分子激光而结晶的硅层的方法。 结晶层上产生周期性特征，取决于层暴露于的脉冲中的数量和能量密度ED。 该层的一个区域用光照亮。 照明区域的显微镜图像由从被照明的周期特征衍射的光制成。 显微镜图像包括相应的周期特征。 ED是从显微镜图像中的周期特征的对比度的量度确定的。
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公开(公告)号：US20160155568A1
公开(公告)日：2016-06-02
申请号：US14887783
申请日：2015-10-20
发明人： Igor BRAGIN
摘要： An electrical capacitor includes a dielectric spacer. Metal electrodes are held in contact with opposite surfaces of the dielectric spacer by magnetic force.
摘要翻译： 电容器包括电介质间隔物。 金属电极通过磁力与介电隔离物的相对表面保持接触。
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10.发明授权公开(公告)号：US09335276B2
公开(公告)日：2016-05-10
申请号：US14195656
申请日：2014-03-03
发明人： Paul Van Der Wilt
IPC分类号： H01L21/268 , G01N21/95 , H01L21/66 , G01N21/84 , G01N21/88 , G02B21/00 , G01N21/47 , H01L21/02
CPC分类号： H01L21/67253 , C30B1/02 , C30B29/06 , G01N21/21 , G01N21/4788 , G01N21/8422 , G01N21/8851 , G01N21/9501 , G01N2021/8461 , G01N2021/8477 , G01N2201/06113 , G01N2201/068 , G01N2201/0683 , G01N2201/0697 , G01N2201/10 , G01N2201/105 , G02B21/002 , G02B21/0092 , H01L21/02532 , H01L21/02686 , H01L21/268 , H01L22/12
摘要： A method is disclosed evaluating a silicon layer crystallized by irradiation with pulses form an excimer-laser. The crystallization produces periodic features on the crystallized layer dependent on the number of and energy density ED in the pulses to which the layer has been exposed. An area of the layer is illuminated with light. A microscope image of the illuminated area is made from light diffracted from the illuminated are by the periodic features. The microscope image includes corresponding periodic features. The ED is determined from a measure of the contrast of the periodic features in the microscope image.
摘要翻译： 公开了评估通过用脉冲照射形成准分子激光而结晶的硅层的方法。 结晶层上产生周期性特征，取决于层暴露于的脉冲中的数量和能量密度ED。 该层的一个区域用光照亮。 照明区域的显微镜图像由从被照明的周期特征衍射的光制成。 显微镜图像包括相应的周期特征。 ED是从显微镜图像中的周期特征的对比度的量度确定的。
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