公开(公告)号：US20170329237A1

公开(公告)日：2017-11-16

申请号：US15589270

申请日：2017-05-08

Applicant: CANON KABUSHIKI KAISHA

Inventor： Kentaro Suzuki ,  Nobushige Korenaga ,  Satoshi Iwatani

IPC: G03F7/20

CPC classification number: G03F7/70775 ,  G03F7/0002 ,  G03F7/707 ,  G03F7/70716 ,  G03F7/70758

Abstract: An apparatus for moving movable part on surface parallel to first and second directions includes single guide to constrain position of the movable part in the second direction and drive mechanism to drive the movable part. The movable part includes first movable member movable in the first direction while being guided by the guide, second movable member having first and second ends, the first end being connected to the first movable member via rotation bearing and moving above the surface, and third movable member movable within range between the first and second ends while being guided by the second movable member. The drive mechanism includes first driver to drive the first end of the second movable member in the first direction, and second driver to drive the second end of the second movable member in the first direction.

公开(公告)号：US20150187540A1

公开(公告)日：2015-07-02

申请号：US14580060

申请日：2014-12-22

Applicant: CANON KABUSHIKI KAISHA

Inventor： Atsushi Ito ,  Nobushige Korenaga

IPC: H01J37/20 ,  H01J37/30 ,  H01J37/317

CPC classification number: H01J37/20 ,  H01J37/3002 ,  H01J37/3174 ,  H01J37/3177 ,  H01J2237/20221 ,  H01J2237/20292 ,  H01J2237/30438

Abstract: A drawing apparatus includes a plurality of optical systems, each of which irradiates with a beam a substrate, corresponding thereto, having a predetermined size, and a plurality of holders, each of which is movable and holds the substrate corresponding thereto. The drawing apparatus is configured to perform drawing on a plurality of the substrate respectively held by the plurality of holders with respective beams respectively by the plurality of optical systems with the plurality of holders being scanned relative to the plurality of optical systems in a scan direction, and in a direction orthogonal to the scan direction, an interval between two adjacent optical systems of the plurality of optical systems is smaller than a sum of a length of one of the plurality of holders and the size.

Abstract translation: 一种绘图装置包括多个光学系统，每个光学系统用光束照射具有预定尺寸的基板，以及多个保持器，每个保持器可移动并保持与其对应的基板。 所述绘制装置被配置为通过所述多个光学系统分别对由所述多个保持器分别保持的多个保持器进行拉伸，所述多个保持器在扫描方向上相对于所述多个光学系统被扫描， 并且在与扫描方向正交的方向上，所述多个光学系统的两个相邻光学系统之间的间隔小于所述多个保持器中的一个的长度与所述尺寸的和。

公开(公告)号：US20140036249A1

公开(公告)日：2014-02-06

申请号：US13947442

申请日：2013-07-22

Applicant: CANON KABUSHIKI KAISHA

Inventor： Hiroshi Kii ,  Nobushige Korenaga

IPC: G03F7/20

CPC classification number: G03F7/70716

Abstract: The preset invention provides a stage apparatus which holds a substrate, the apparatus including a driving unit which includes a first coil arranged on a fixed portion, and a first magnet which is arranged on a movable portion and opposed to the first coil, and is configured to move the movable portion by a magnetic field generated by supplying a current to the first coil, and an attracting unit which includes a first yoke arranged on the fixed portion, and a second coil wound around the first yoke, and is configured to attract the movable portion to a side of the fixed portion by a magnetic field generated by supplying a current to the second coil.

Abstract translation: 本发明提供了一种保持基板的平台装置，该装置包括驱动单元，该驱动单元包括布置在固定部分上的第一线圈和布置在可移动部分上并与第一线圈相对的第一磁体，并且被配置 通过向第一线圈供给电流而产生的磁场来移动可动部分，以及包括设置在固定部分上的第一磁轭的吸引单元和缠绕在第一磁轭上的第二线圈，并且被构造成吸引 通过向第二线圈提供电流而产生的磁场将可动部分移动到固定部分的一侧。

公开(公告)号：US09373532B2

公开(公告)日：2016-06-21

申请号：US13798900

申请日：2013-03-13

Applicant: CANON KABUSHIKI KAISHA

Inventor： Akira Morohashi ,  Nobushige Korenaga

IPC: G03B27/58 ,  H01L21/677 ,  F16M11/20 ,  G03F7/20

CPC classification number: H01L21/67742 ,  F16M11/2092 ,  G03F7/70716

Abstract: The present invention provides a guide apparatus including a guide member located on a base, and a moving member movable along the guide member. The guide apparatus comprising a plurality of plate members each including a portion facing the base and extending from the portion in a direction to separate from the base, wherein the plurality of plate members are located apart from each other in a direction to separate from the moving member.

Abstract translation: 本发明提供了一种引导装置，其包括位于基座上的引导构件和可沿引导构件移动的移动构件。 所述引导装置包括多个板构件，每个板构件包括面向所述基座的部分并且从所述部分沿着与所述基座分离的方向延伸，其中所述多个板构件在与所述移动的方向分离的方向上彼此分离 会员。

公开(公告)号：US09280066B2

公开(公告)日：2016-03-08

申请号：US14334039

申请日：2014-07-17

Applicant: CANON KABUSHIKI KAISHA

Inventor： Hiroshi Kii ,  Nobushige Korenaga

IPC: G03B27/58 ,  G03F7/20

CPC classification number: G03F7/70716 ,  G03F7/70 ,  G03F7/70866

Abstract: The present invention provides a stage apparatus which holds a substrate, including a first moving stage, a second moving stage supported by the first moving stage, a linear motor including a coil arranged on the first moving stage, and a magnet arranged on the second moving stage in correspondence with the coil, a first channel formed in the first moving stage to supply a first refrigerant for recovering heat from the coil not to contact the coil, a cover member arranged on the first moving stage to surround the coil and be spaced apart from the coil, and a second channel formed in the cover member to supply a second refrigerant for recovering heat from the cover member not to contact the coil.

Abstract translation: 本发明提供了一种平台装置，其保持基板，包括第一移动台，由第一移动台支撑的第二移动台，包括布置在第一移动台上的线圈的线性马达和布置在第二移动台上的磁铁 与线圈对应的阶段，形成在第一移动台中的第一通道，用于提供用于从线圈回收热量的第一制冷剂不接触线圈;布置在第一移动台上以围绕线圈并间隔开的盖构件 以及形成在所述盖构件中的第二通道，以供应用于从所述盖构件回收热量的第二制冷剂，所述第二制冷剂不接触所述线圈。

公开(公告)号：US20130271743A1

公开(公告)日：2013-10-17

申请号：US13803389

申请日：2013-03-14

Applicant: CANON KABUSHIKI KAISHA

Inventor： Akira MOROHASHI ,  Nobushige Korenaga

IPC: H02K7/14 ,  G03B27/58

CPC classification number: H02K7/14 ,  F16H25/2204 ,  F16H25/2418 ,  G03B7/20 ,  G03B27/581 ,  G03F7/70758

Abstract: The present invention provides a driving apparatus including an axis member supported on a base, and a movable member movable along the axis member, comprising a plurality of plate members each including a through-hole through which the axis member penetrates and surrounding the axis member, wherein the plurality of plate members are located apart from each other in a moving direction of the movable member.

Abstract translation: 本发明提供了一种驱动装置，包括：支撑在基座上的轴构件和可沿轴构件移动的可移动构件，包括多个板构件，每个板构件包括通孔，轴构件穿过该通孔并围绕轴构件， 其中所述多个板构件在所述可动构件的移动方向上彼此分离。

公开(公告)号：US20130171570A1

公开(公告)日：2013-07-04

申请号：US13721540

申请日：2012-12-20

Applicant: CANON KABUSHIKI KAISHA

Inventor： Koichi Sentoku ,  Hideki Ina ,  Wataru Yamaguchi ,  Nobushige Korenaga

IPC: G21K5/08 ,  G03F7/20

CPC classification number: G21K5/08 ,  G03F7/20 ,  H01J37/20 ,  H01J37/3045 ,  H01J2237/20292

Abstract: The present invention provides a drawing apparatus including a stage having a reference mark, and configured to hold a substrate and to be moved, a charged particle optical system, a first measuring device having an optical axis spaced apart from an axis of the charged particle optical system by a first distance and configured to measure a position of an alignment mark formed on the substrate, a second measuring device having an optical axis spaced apart from the axis of the charged particle optical system by a second distance and configured to measure a position of the reference mark, and a processor configured to obtain a baseline of the first measuring device based on positions of the reference mark respectively measured by the first measuring device and the second measuring device.

Abstract translation: 本发明提供了一种绘图装置，包括具有参考标记的台，并且被配置为保持基板并被移动，带电粒子光学系统，具有与带电粒子光轴的轴线间隔开的光轴的第一测量装置 系统，第一距离并且被配置为测量形成在基板上的对准标记的位置，第二测量装置，其具有与带电粒子光学系统的轴线间隔开第二距离的光轴，并且被配置为测量位置 参考标记，以及被配置为基于分别由第一测量装置和第二测量装置测量的参考标记的位置来获得第一测量装置的基线的处理器。

公开(公告)号：US20150277229A1

公开(公告)日：2015-10-01

申请号：US14671898

申请日：2015-03-27

Applicant: CANON KABUSHIKI KAISHA

Inventor： Tadashi Kimura ,  Nobushige Korenaga

IPC: G03F7/20

CPC classification number: G03F7/70716 ,  G03F7/704 ,  G03F7/70725 ,  G03F7/70758 ,  G03F7/70775 ,  G03F7/70816 ,  G03F7/70841

Abstract: This disclosure provides a lithography apparatus including: a lens barrel having an optical system configured to irradiate a substrate with a beam; and a stage apparatus configured to repeat a long distance movement in a primary scanning direction of the substrate and a short distance movement which is shorter than the long distance movement in terms of the amount of movement in a secondary scanning direction of the substrate, and being configured to form a pattern on the substrate with the beam, wherein the stage apparatus includes: a first moving body configured to move in the primary scanning direction; a floating unit configured to support the first moving body, so as to float by a magnetic force and be movable in the primary scanning direction; a second moving body configured to move in the secondary scanning direction; and a guide using a rolling body configured to support the second moving body in contact therewith so as to be movable in the secondary scanning direction.

Abstract translation: 本公开提供了一种光刻设备，包括：透镜镜筒，具有被配置为用光束照射衬底的光学系统; 以及台架装置，被配置为在基板的主扫描方向上重复长距离运动，并且基于在基板的副扫描方向上的移动量，比距离运动短的短距离运动，并且 被配置为在所述基板上形成具有所述光束的图案，其中所述平台装置包括：第一移动体，被配置为沿所述主扫描方向移动; 浮动单元，被配置为支撑所述第一移动体，以便通过磁力浮动并且可在主扫描方向上移动; 第二移动体，被构造成在副扫描方向上移动; 以及引导件，其使用滚动体，所述滚动体构造成支撑与其接触的第二移动体，以便能够沿副扫描方向移动。

公开(公告)号：US20150219998A1

公开(公告)日：2015-08-06

申请号：US14590199

申请日：2015-01-06

Applicant: CANON KABUSHIKI KAISHA

Inventor： Atsushi Ito ,  Nobushige Korenaga

IPC: G03F7/20

CPC classification number: G03F7/702

Abstract: The present invention provides a lithography apparatus including an optical system housing for an optical system which irradiates a substrate with a beam for forming a pattern, a reflecting member which is provided with the optical system housing and having a reflecting surface parallel to an optical axis of the optical system, and a measurement device configured to measure a rotation angle of the optical system housing by causing measurement light to be incident on each of at least three incident points which are not on the same straight line on the reflecting surface, wherein in the reflecting member a through-hole is formed in a region among the at least three incident points in a direction parallel to the optical axis, and is fixed to the optical system housing via a fixing member in the through-hole.

Abstract translation: 本发明提供了一种光刻设备，其包括用于光学系统的光学系统外壳，该光学系统用用于形成图案的光束照射基板;反射部件，其设置有光学系统壳体，并具有平行于光学系统的光轴的反射表面 光学系统和测量装置，其被配置为通过使测量光入射到反射表面上不在同一直线上的至少三个入射点中的每一个来测量光学系统壳体的旋转角度，其中在 所述反射构件的通孔形成在所述至少三个入射点中的与所述光轴平行的方向上的区域中，并且经由所述通孔中的固定构件固定到所述光学系统壳体。

公开(公告)号：US09977347B2

公开(公告)日：2018-05-22

申请号：US15589270

申请日：2017-05-08

Applicant: CANON KABUSHIKI KAISHA

Inventor： Kentaro Suzuki ,  Nobushige Korenaga ,  Satoshi Iwatani

IPC: G03B27/42 ,  G03B27/58 ,  G03F7/20

CPC classification number: G03F7/70775 ,  G03F7/0002 ,  G03F7/707 ,  G03F7/70716 ,  G03F7/70758

Abstract: An apparatus for moving movable part on surface parallel to first and second directions includes single guide to constrain position of the movable part in the second direction and drive mechanism to drive the movable part. The movable part includes first movable member movable in the first direction while being guided by the guide, second movable member having first and second ends, the first end being connected to the first movable member via rotation bearing and moving above the surface, and third movable member movable within range between the first and second ends while being guided by the second movable member. The drive mechanism includes first driver to drive the first end of the second movable member in the first direction, and second driver to drive the second end of the second movable member in the first direction.