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公开(公告)号：US10512936B2
公开(公告)日：2019-12-24
申请号：US16012999
申请日：2018-06-20
发明人： Susan A. Alie , Keith G. Fife , Joseph Lutsky , David Grosjean
摘要： An ultrasonic transducer includes a membrane, a bottom electrode, and a plurality of cavities disposed between the membrane and the bottom electrode, each of the plurality of cavities corresponding to an individual transducer cell. Portions of the bottom electrode corresponding to each individual transducer cell are electrically isolated from one another. Each portion of the bottom electrode corresponds to each individual transducer that cell further includes a first bottom electrode portion and a second bottom electrode portion, the first and second bottom electrode portions electrically isolated from one another.
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2.发明申请公开(公告)号：US20190160490A1
公开(公告)日：2019-05-30
申请号：US16245214
申请日：2019-01-10
发明人： Susan A. Alie , Keith G. Fife , Joseph Lutsky , David Grosjean
摘要： An ultrasonic transducer includes a membrane, a bottom electrode, and a plurality of cavities disposed between the membrane and the bottom electrode, each of the plurality of cavities corresponding to an individual transducer cell. Portions of the bottom electrode corresponding to each individual transducer cell are electrically isolated from one another. Each portion of the bottom electrode corresponds to each individual transducer that cell further includes a first bottom electrode portion and a second bottom electrode portion, the first and second bottom electrode portions electrically isolated from one another.
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3.发明申请公开(公告)号：US20180243792A1
公开(公告)日：2018-08-30
申请号：US15905289
申请日：2018-02-26
CPC分类号： B06B1/0292 , B81B3/0086 , B81C1/00698 , B81C2201/0173 , B81C2201/115 , B81C2203/038 , G01N29/2406
摘要： Processes for fabricating capacitive micromachined ultrasonic transducers (CMUTs) are described, as are CMUTs of various doping configurations. An insulating layer separating conductive layers of a CMUT may be formed by forming the layer on a lightly doped epitaxial semiconductor layer. Dopants may be diffused from a semiconductor substrate into the epitaxial semiconductor layer, without diffusing into the insulating layer. CMUTs with different configurations of N-type and P-type doping are also described.
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公开(公告)号：US20210291228A1
公开(公告)日：2021-09-23
申请号：US17192700
申请日：2021-03-04
发明人： Susan A. Alie , Keith G. Fife , Joseph Lutsky , David Grosjean
摘要： An ultrasonic transducer includes a membrane, a bottom electrode, and a plurality of cavities disposed between the membrane and the bottom electrode, each of the plurality of cavities corresponding to an individual transducer cell. Portions of the bottom electrode corresponding to each individual transducer cell are electrically isolated from one another. Each portion of the bottom electrode corresponds to each individual transducer that cell further includes a first bottom electrode portion and a second bottom electrode portion, the first and second bottom electrode portions electrically isolated from one another.
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公开(公告)号：US10967400B2
公开(公告)日：2021-04-06
申请号：US16679500
申请日：2019-11-11
发明人： Susan A. Alie , Keith G. Fife , Joseph Lutsky , David Grosjean
摘要： An ultrasonic transducer includes a membrane, a bottom electrode, and a plurality of cavities disposed between the membrane and the bottom electrode, each of the plurality of cavities corresponding to an individual transducer cell. Portions of the bottom electrode corresponding to each individual transducer cell are electrically isolated from one another. Each portion of the bottom electrode corresponds to each individual transducer that cell further includes a first bottom electrode portion and a second bottom electrode portion, the first and second bottom electrode portions electrically isolated from one another.
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6.发明授权公开(公告)号：US10850306B2
公开(公告)日：2020-12-01
申请号：US15905289
申请日：2018-02-26
摘要： Processes for fabricating capacitive micromachined ultrasonic transducers (CMUTs) are described, as are CMUTs of various doping configurations. An insulating layer separating conductive layers of a CMUT may be formed by forming the layer on a lightly doped epitaxial semiconductor layer. Dopants may be diffused from a semiconductor substrate into the epitaxial semiconductor layer, without diffusing into the insulating layer. CMUTs with different configurations of N-type and P-type doping are also described.
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公开(公告)号：US20210160621A1
公开(公告)日：2021-05-27
申请号：US17114411
申请日：2020-12-07
摘要： Aspects of the technology described herein relate to ultrasound circuits that employ a differential ultrasonic transducer element, such as a differential micromachined ultrasonic transducer (MUT) element. The differential ultrasonic transducer element may be coupled to an integrated circuit that is configured to operate the differential ultrasonic transducer element in one or more modes of operation, such as a differential receive mode, a differential transmit mode, a single-ended receive mode, and a single-ended transmit mode.
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公开(公告)号：US10525506B2
公开(公告)日：2020-01-07
申请号：US16245214
申请日：2019-01-10
发明人： Susan A. Alie , Keith G. Fife , Joseph Lutsky , David Grosjean
摘要： An ultrasonic transducer includes a membrane, a bottom electrode, and a plurality of cavities disposed between the membrane and the bottom electrode, each of the plurality of cavities corresponding to an individual transducer cell. Portions of the bottom electrode corresponding to each individual transducer cell are electrically isolated from one another. Each portion of the bottom electrode corresponds to each individual transducer that cell further includes a first bottom electrode portion and a second bottom electrode portion, the first and second bottom electrode portions electrically isolated from one another.
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公开(公告)号：US10972842B2
公开(公告)日：2021-04-06
申请号：US16016359
申请日：2018-06-22
摘要： Aspects of the technology described herein relate to ultrasound circuits that employ a differential ultrasonic transducer element, such as a differential micromachined ultrasonic transducer (MUT) element. The differential ultrasonic transducer element may be coupled to an integrated circuit that is configured to operate the differential ultrasonic transducer element in one or more modes of operation, such as a differential receive mode, a differential transmit mode, a single-ended receive mode, and a single-ended transmit mode.
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10.发明申请公开(公告)号：US20200070206A1
公开(公告)日：2020-03-05
申请号：US16679500
申请日：2019-11-11
发明人： Susan A. Alie , Keith G. Fife , Joseph Lutsky , David Grosjean
摘要： An ultrasonic transducer includes a membrane, a bottom electrode, and a plurality of cavities disposed between the membrane and the bottom electrode, each of the plurality of cavities corresponding to an individual transducer cell. Portions of the bottom electrode corresponding to each individual transducer cell are electrically isolated from one another. Each portion of the bottom electrode corresponds to each individual transducer that cell further includes a first bottom electrode portion and a second bottom electrode portion, the first and second bottom electrode portions electrically isolated from one another.
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