公开(公告)号：US20240412985A1

公开(公告)日：2024-12-12

申请号：US18731436

申请日：2024-06-03

Applicant: Applied Materials, Inc.

Inventor： Clinton SAKATA ,  Ricardo MARTINEZ ,  Robert DUES ,  Shih-Yu LIU ,  Tarun Kumar ABICHANDANI ,  Brian K. KIRKPATRICK ,  Jagan RANGARAJAN ,  Adrian S. BLANK ,  Edward GOLUBOVSKY ,  Justin H. WONG

IPC: H01L21/67 ,  B65G47/90 ,  H01L21/687

Abstract: A substrate cleaning system to remove particulates from multiple substrates includes a cleaning tank for applying a cleaning liquid to substrates, a rinse tank for applying a rinsing liquid to substrates, and a robot system. The cleaning tank includes a stationary lid, an input lid, and an output lid. The input and output lids allow a substrate carrier designed to carry an individual substrate to access an inner volume of the cleaning tank for processing. A transport system moves the substrate in the substrate carrier through the inner volume of the cleaning tank by creating a series of gaps between substrates to allow proper processing. The robot system transports substrates through the input and output lids of the cleaning tank, and transports substrates into the rinse tank.

公开(公告)号：US20250079192A1

公开(公告)日：2025-03-06

申请号：US18241722

申请日：2023-09-01

Applicant: Applied Materials, Inc.

Inventor： Ricardo MARTINEZ ,  Jagan RANGARAJAN ,  Sami MUSTAFA ,  Tarun Kumar ABICHANDANI ,  Lukas SYKORA ,  Shih-Yu LIU ,  Hung X. HOANG

IPC: H01L21/67 ,  F16K27/02

Abstract: A fluid assembly includes a base and at least one first device. The base includes a single-piece body including a base outlet, a base inlet, and a first interface including a first interface inlet and a first interface outlet. The base also includes a first flow path segment formed within the single-piece body that extends from the base inlet to the first interface outlet. The base also includes a second flow path segment formed within the single-piece body that extends from first interface inlet. The base also includes a ground path disposed within the single-piece body. The first device is attachable to the first interface to fluidly connect a first device inlet to the first interface outlet and a second device outlet to the second interface inlet.