公开(公告)号：US20250079192A1

公开(公告)日：2025-03-06

申请号：US18241722

申请日：2023-09-01

Applicant: Applied Materials, Inc.

Inventor： Ricardo MARTINEZ ,  Jagan RANGARAJAN ,  Sami MUSTAFA ,  Tarun Kumar ABICHANDANI ,  Lukas SYKORA ,  Shih-Yu LIU ,  Hung X. HOANG

IPC: H01L21/67 ,  F16K27/02

Abstract: A fluid assembly includes a base and at least one first device. The base includes a single-piece body including a base outlet, a base inlet, and a first interface including a first interface inlet and a first interface outlet. The base also includes a first flow path segment formed within the single-piece body that extends from the base inlet to the first interface outlet. The base also includes a second flow path segment formed within the single-piece body that extends from first interface inlet. The base also includes a ground path disposed within the single-piece body. The first device is attachable to the first interface to fluidly connect a first device inlet to the first interface outlet and a second device outlet to the second interface inlet.