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公开(公告)号：US20200053836A1
公开(公告)日：2020-02-13
申请号：US16390862
申请日：2019-04-22
IPC分类号： H05B3/00
摘要： Implementations of the present disclosure provide an adapter for use in a processing chamber. In one implementation, the adapter comprises a hollow body having a first end and a second end opposing the first end, a first block and a second block symmetrically disposed within the hollow body about a longitudinal axis of the body, wherein the first block and the second block define a central opening therebetween, and a retention device disposed in contact with the first and second blocks to confine the movement of the first and second blocks with respect to the hollow body. The central opening is sized so that the first block and the second block provide direct contact with a press seal of the lamp.
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公开(公告)号：US20180005856A1
公开(公告)日：2018-01-04
申请号：US15707810
申请日：2017-09-18
发明人： Anzhong CHANG , Paul BRILLHART , Surajit KUMAR , Satheesh KUPPURAO , Mehmet Tugrul SAMIR , David K. CARLSON , Steve ABOAGYE , Anh N. NGUYEN , Kailash Kiran PATALAY , Joseph M. RANISH , Oleg V. SEREBRYANOV , Dongming IU , Shu-Kwan LAU , Zuoming ZHU , Herman DINIZ
IPC分类号： H01L21/67 , C23C16/455
CPC分类号： H01L21/67115 , C23C16/45504
摘要： Embodiments of the invention relate to a dome assembly. The dome assembly includes an upper dome comprising a central window, and an upper peripheral flange engaging the central window at a circumference of the central window, wherein a tangent line on an inside surface of the central window that passes through an intersection of the central window and the upper peripheral flange is at an angle of about 8° to about 16° with respect to a planar upper surface of the peripheral flange, a lower dome comprising a lower peripheral flange and a bottom connecting the lower peripheral flange with a central opening, wherein a tangent line on an outside surface of the bottom that passes through an intersection of the bottom and the lower peripheral flange is at an angle of about 8° to about 16° with respect to a planar bottom surface of the lower peripheral flange.
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公开(公告)号：US20160196992A1
公开(公告)日：2016-07-07
申请号：US14987378
申请日：2016-01-04
CPC分类号： H01L21/67115 , F27B17/0025
摘要： Embodiments of the present disclosure relate to a lamp driver for lamps used as a source of heat radiation in a thermal processing chamber. The lamp driver includes a power source, at least two DC/DC converters, each DC/DC converter connected with the power source in series, a direct connection between the at least two DC/DC converters, and a line that is attached to the direct connection and attachable to a reference voltage. A plurality of the lamp drivers may be utilized to power a plurality of lamps positioned in a grounded lamphead assembly. The electrical potential between the lamps and the grounded lamphead assembly is reduced, which reduces the risk of arcing between the lamps and the lamphead assembly.
摘要翻译： 本公开的实施例涉及用作在热处理室中的热辐射源的灯的灯驱动器。 灯驱动器包括电源，至少两个DC / DC转换器，与电源串联的每个DC / DC转换器，至少两个DC / DC转换器之间的直接连接，以及连接到 直接连接并可连接到参考电压。 可以使用多个灯驱动器为位于接地的灯头组件中的多个灯提供动力。 灯和接地灯头组件之间的电位降低，这降低了灯和灯头组件之间的电弧的风险。
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公开(公告)号：US20150179425A1
公开(公告)日：2015-06-25
申请号：US14546103
申请日：2014-11-18
CPC分类号： H01K1/46 , H01K1/36 , H01K1/44 , H01K1/66 , H05B3/0038
摘要： Embodiments of the present disclosure generally relate to an improved adapter for simplified lamps for use as a source of heat radiation in a rapid thermal processing (RTP) chamber. In one embodiment, a lamp assembly is provided. The lamp element includes a capsule having a filament disposed therein, a press seal extending from the capsule, and an adapter having a receptacle contoured to receive at least a portion of the press seal, wherein the press seal is removably engaged with the adapter.
摘要翻译： 本公开的实施例一般涉及用于在快速热处理（RTP）室中用作热辐射源的简化灯的改进的适配器。 在一个实施例中，提供灯组件。 所述灯元件包括具有设置在其中的细丝的胶囊，从所述胶囊延伸的压力密封件，以及适配器，所述适配器具有成形为容纳所述压力密封件的至少一部分的容器，其中所述压力密封件可拆卸地与所述适配器接合。
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公开(公告)号：US20170105249A1
公开(公告)日：2017-04-13
申请号：US15281715
申请日：2016-09-30
CPC分类号： H05B3/0047
摘要： Implementations of the present disclosure provide an adapter for use in a processing chamber. In one implementation, the adapter comprises a hollow body having a first end and a second end opposing the first end, a first block and a second block symmetrically disposed within the hollow body about a longitudinal axis of the body, wherein the first block and the second block define a central opening therebetween, and a retention device disposed in contact with the first and second blocks to confine the movement of the first and second blocks with respect to the hollow body. The central opening is sized so that the first block and the second block provide direct contact with a press seal of the lamp.
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公开(公告)号：US20150348809A1
公开(公告)日：2015-12-03
申请号：US14288000
申请日：2014-05-27
CPC分类号： H01L21/67115 , H01R33/09 , H05B3/0047 , H05B3/06
摘要： Embodiments of the present disclosure generally relate to an improved retention and insulation features for lamps used as a source of heat radiation in a thermal processing chamber. In one embodiment, a process chamber is provided. The process chamber includes a lamp assembly for thermal processing of semiconductor substrates, the lamp assembly has a lamp electrical connector and a first laterally operative element, a lamp assembly housing having a passage for receiving the lamp assembly, a power distribution assembly having a receptacle for receiving the lamp electrical connector and delivering power to the lamp electrical connector, and a spacer plate disposed between the lamp assembly housing and the power distribution assembly, wherein the spacer plate has a passage contoured to allow passage of the lamp electrical connector therethrough, and the spacer plate has a retention feature configured to engage or disengage the first laterally operative element.
摘要翻译： 本公开的实施例总体上涉及用于在热处理室中作为热辐射源的灯的改进的保持和绝缘特征。 在一个实施例中，提供处理室。 处理室包括用于半导体衬底的热处理的灯组件，灯组件具有灯电连接器和第一侧向操作元件，灯组件壳体具有用于接收灯组件的通道，配电组件，具有用于 接收灯电连接器并向灯电连接器供电，以及间隔板，其设置在灯组件壳体和配电组件之间，其中间隔板具有允许灯电连接器通过的通路， 间隔板具有构造成使第一横向操作元件接合或分离的保持特征。
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