Invention Application
- Patent Title: QUARTZ UPPER AND LOWER DOMES
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Application No.: US15707810Application Date: 2017-09-18
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Publication No.: US20180005856A1Publication Date: 2018-01-04
- Inventor: Anzhong CHANG , Paul BRILLHART , Surajit KUMAR , Satheesh KUPPURAO , Mehmet Tugrul SAMIR , David K. CARLSON , Steve ABOAGYE , Anh N. NGUYEN , Kailash Kiran PATALAY , Joseph M. RANISH , Oleg V. SEREBRYANOV , Dongming IU , Shu-Kwan LAU , Zuoming ZHU , Herman DINIZ
- Applicant: Applied Materials, Inc.
- Main IPC: H01L21/67
- IPC: H01L21/67 ; C23C16/455

Abstract:
Embodiments of the invention relate to a dome assembly. The dome assembly includes an upper dome comprising a central window, and an upper peripheral flange engaging the central window at a circumference of the central window, wherein a tangent line on an inside surface of the central window that passes through an intersection of the central window and the upper peripheral flange is at an angle of about 8° to about 16° with respect to a planar upper surface of the peripheral flange, a lower dome comprising a lower peripheral flange and a bottom connecting the lower peripheral flange with a central opening, wherein a tangent line on an outside surface of the bottom that passes through an intersection of the bottom and the lower peripheral flange is at an angle of about 8° to about 16° with respect to a planar bottom surface of the lower peripheral flange.
Information query
IPC分类: