公开(公告)号：US20210189593A1

公开(公告)日：2021-06-24

申请号：US16833352

申请日：2020-03-27

Applicant: APPLIED MATERIALS, INC.

Inventor： Brian BURROWS ,  Shu-Kwan Danny LAU ,  Zhiyuan YE

IPC: C30B25/10 ,  G02B7/182 ,  C23C16/44 ,  C23C16/52 ,  C30B25/16 ,  C30B25/08

Abstract: Methods and apparatus for an upper reflector assembly for use in a process chamber are provided herein. In some embodiments, an upper reflector assembly for use in a process chamber includes a reflector mounting ring; and upper reflector plate coupled to the reflector mounting ring and having an upper surface and lower surface, wherein the lower surface includes a plurality of linear channels extending substantially parallel to each other across the lower surface, and wherein the upper reflector plate includes air cooling slots extending from the upper surface to the lower surface.

公开(公告)号：US20240318351A1

公开(公告)日：2024-09-26

申请号：US18733504

申请日：2024-06-04

Applicant: Applied Materials, Inc.

Inventor： Zhiyuan YE ,  Shu-Kwan LAU ,  Brian BURROWS ,  Lori D. WASHINGTON ,  Herman DINIZ ,  Martin A. HILKENE ,  Richard O. COLLINS ,  Nyi Oo MYO ,  Manish HEMKAR ,  Schubert S. CHU

IPC: C30B25/14 ,  C23C16/44 ,  C23C16/455 ,  C30B25/08 ,  C30B25/10 ,  H01L21/67

CPC classification number: C30B25/14 ,  C23C16/4412 ,  C23C16/455 ,  C30B25/105 ,  H01L21/6719 ,  C30B25/08

Abstract: A method and apparatus for a process chamber for thermal processing is described herein. The process chamber is a dual process chamber and shares a chamber body. The chamber body includes a first and a second set of gas inject passages. The chamber body may also include a first and a second set of exhaust ports. The process chamber may have a shared gas panel and/or a shared exhaust conduit.

公开(公告)号：US20200290835A1

公开(公告)日：2020-09-17

申请号：US16306176

申请日：2017-06-02

Applicant: APPLIED MATERIALS, INC.

Inventor： Andreas SCHMID ,  Brian BURROWS ,  David ISHIKAWA ,  Joseph YUDOVSKY

IPC: B65H23/198 ,  C04B35/80 ,  C04B35/628 ,  B65H23/195

Abstract: Apparatus for qualification and repair of multi-filament tow are provided herein. In some embodiments, an apparatus in for inspecting and repairing a multi-filament tow includes a first spool having a multi-filament tow wound on the first spool; a first tow tensioner following the first spool to impart a predetermined tension on the multi-filament tow; a de-sizing chamber comprising a heater to heat the multi-filament tow to a first temperature suitable for removing a coating on the multi-filament tow; an inspection chamber configured to inspect the multi-filament tow for defects; a repair chamber configured to repair the defects in the multi-filament tow; a second tow tensioner following the repair chamber to impart a predetermined tension on the multi-filament tow; and a second spool following the second tow tensioner to collect the multi-filament tow.