公开(公告)号：US20210062326A1

公开(公告)日：2021-03-04

申请号：US16995661

申请日：2020-08-17

Applicant: Applied Materials, Inc.

Inventor： David Masayuki ISHIKAWA ,  Jonathan FRANKEL ,  Joseph YUDOVSKY ,  David Alexander BRITZ

IPC: C23C14/54 ,  G01B11/06 ,  G01J5/00 ,  C23C14/30 ,  C23C14/52 ,  H01J37/305 ,  H01J37/22 ,  G02B21/00 ,  G02B21/06

Abstract: Embodiments described herein provide apparatus, software applications, and methods of a coating process, such as an Electron Beam Physical Vapor Deposition (EBPVD) of thermal barrier coatings (TBCs) on objects. The objects may include aerospace components, e.g., turbine vanes and blades, fabricated from nickel and cobalt-based super alloys. The apparatus, software applications, and methods described herein provide at least one of the ability to detect an endpoint of the coating process, i.e., determine when a thickness of a coating satisfies a target value, and the ability for closed-loop control of process parameters.

公开(公告)号：US20190259648A1

公开(公告)日：2019-08-22

申请号：US16260675

申请日：2019-01-29

Applicant: Applied Materials, Inc.

Inventor： Joseph YUDOVSKY ,  Visweswaren SIVARAMAKRISHNAN ,  Ludovic GODET ,  Rutger Meyer TIMMERMAN THIJSSEN

IPC: H01L21/687 ,  G03F7/20

Abstract: Embodiments described herein relate to a substrate chucking apparatus having a plurality of cavities formed therein. The cavities are formed in a body of the chucking apparatus. In one embodiment, a first plurality of ports are formed in a chucking surface of the body and extend to a bottom surface of the body. In another embodiment, a second plurality of ports are formed in a bottom surface of the plurality of cavities and extend through the body to a bottom surface of the body.

公开(公告)号：US20200373188A1

公开(公告)日：2020-11-26

申请号：US16993069

申请日：2020-08-13

Applicant: Applied Materials, Inc.

Inventor： Joseph YUDOVSKY ,  Visweswaren SIVARAMAKRISHNAN ,  Ludovic GODET ,  Rutger MEYER TIMMERMAN THIJSSEN

IPC: H01L21/683 ,  H01L21/687

Abstract: Embodiments described herein relate to a substrate chucking apparatus having a plurality of cavities formed therein. The cavities are formed in a body of the chucking apparatus. In one embodiment, a first plurality of ports are formed in a chucking surface of the body and extend to a bottom surface of the body. In another embodiment, a second plurality of ports are formed in a bottom surface of the plurality of cavities and extend through the body to a bottom surface of the body.

公开(公告)号：US20200290835A1

公开(公告)日：2020-09-17

申请号：US16306176

申请日：2017-06-02

Applicant: APPLIED MATERIALS, INC.

Inventor： Andreas SCHMID ,  Brian BURROWS ,  David ISHIKAWA ,  Joseph YUDOVSKY

IPC: B65H23/198 ,  C04B35/80 ,  C04B35/628 ,  B65H23/195

Abstract: Apparatus for qualification and repair of multi-filament tow are provided herein. In some embodiments, an apparatus in for inspecting and repairing a multi-filament tow includes a first spool having a multi-filament tow wound on the first spool; a first tow tensioner following the first spool to impart a predetermined tension on the multi-filament tow; a de-sizing chamber comprising a heater to heat the multi-filament tow to a first temperature suitable for removing a coating on the multi-filament tow; an inspection chamber configured to inspect the multi-filament tow for defects; a repair chamber configured to repair the defects in the multi-filament tow; a second tow tensioner following the repair chamber to impart a predetermined tension on the multi-filament tow; and a second spool following the second tow tensioner to collect the multi-filament tow.

公开(公告)号：US20210062324A1

公开(公告)日：2021-03-04

申请号：US16995662

申请日：2020-08-17

Applicant: Applied Materials, Inc.

Inventor： David Masayuki ISHIKAWA ,  Jonathan FRANKEL ,  Joseph YUDOVSKY ,  David Alexander BRITZ

IPC: C23C14/30 ,  C23C14/54 ,  C23C14/52 ,  H01J37/305

Abstract: Embodiments described herein provide apparatus, software applications, and methods of a coating process, such as an Electron Beam Physical Vapor Deposition (EBPVD) of thermal barrier coatings (TBCs) on objects. The objects may include aerospace components, e.g., turbine vanes and blades, fabricated from nickel and cobalt-based super alloys. The apparatus, software applications, and methods described herein provide at least one of the ability to detect an endpoint of the coating process, i.e., determine when a thickness of a coating satisfies a target value, and the ability for closed-loop control of process parameters.

公开(公告)号：US20200292084A1

公开(公告)日：2020-09-17

申请号：US16306189

申请日：2017-06-02

Applicant: APPLIED MATERIALS, INC.

Inventor： Joseph YUDOVSKY ,  David ISHIKAWA ,  Travis TESCH

IPC: F16K3/02 ,  B08B5/02 ,  F16K51/02 ,  H01L21/67 ,  G05D16/20

Abstract: Embodiments of gate valves and methods for using same are provided herein. In some embodiments, a gate valve for processing a continuous substrate includes: a body; a plurality of seals disposed within the body and configured to move between a closed position and an open position; a plurality of volumes disposed between adjacent ones of the plurality of seals and defined by the plurality of seals and the body; a gas inlet disposed through a first side of the body and fluidly coupled to an innermost one of the plurality of volumes; and a gas outlet disposed through a second side of the body opposite the first side and fluidly coupled to other ones of the plurality of volumes disposed on either side of the innermost one of the plurality of volumes.