公开(公告)号：US11036145B2

公开(公告)日：2021-06-15

申请号：US16230667

申请日：2018-12-21

Applicant: Applied Materials, Inc.

Inventor： Arvinder Chadha ,  Kevin Laughton Cunningham

IPC: G03F7/20

Abstract: Embodiments described herein provide a method of large area lithography to decrease widths of portions written into photoresists. One embodiment of the method includes projecting an initial light beam of a plurality of light beams at a minimum wavelength to a mask in a propagation direction of the plurality of light beams. The mask has a plurality of dispersive elements. A wavelength of each light beam of the plurality of light beams is increased until a final light beam of the plurality of light beams is projected at a maximum wavelength. The plurality of dispersive elements of the mask diffract the plurality of light beams into order mode beams to produce an intensity pattern in a medium between the mask and a substrate having a photoresist layer disposed thereon. The intensity pattern having a plurality of intensity peaks writes a plurality of portions in the photoresist layer.

公开(公告)号：US11934056B2

公开(公告)日：2024-03-19

申请号：US16902392

申请日：2020-06-16

Applicant: Applied Materials, Inc.

Inventor： Manivannan Thothadri ,  Harvey You ,  Helinda Nominanda ,  Neil Morrison ,  Daniel Paul Forster ,  Arvinder Chadha

IPC: G02F1/1333 ,  G02B1/11 ,  G02B1/14

CPC classification number: G02F1/133331 ,  G02B1/11 ,  G02B1/14 ,  G02F1/133305 ,  G02F2201/50 ,  G02F2202/28

Abstract: Embodiments described and discussed herein generally relate to flexible or foldable display devices, and more specifically to flexible cover lens assemblies. In one or more embodiments, a flexible cover lens assembly contains a glass layer, an adhesion promotion layer disposed on the glass layer, a dry hardcoat layer having a nano-indentation hardness in a range from about 1 GPa to about 5 GPa and disposed on the adhesion promotion layer and an anti-fingerprint coating layer disposed on the dry hardcoat layer.

公开(公告)号：US11829073B2

公开(公告)日：2023-11-28

申请号：US17306527

申请日：2021-05-03

Applicant: Applied Materials, Inc.

Inventor： Arvinder Chadha ,  Kevin Laughton Cunningham

IPC: G03F7/20 ,  G03F7/00

CPC classification number: G03F7/70408 ,  G03F7/2006 ,  G03F7/7005 ,  G03F7/70191

Abstract: Embodiments described herein provide a method of large area lithography to decrease widths of portions written into photoresists. One embodiment of the method includes projecting an initial light beam of a plurality of light beams at a minimum wavelength to a mask in a propagation direction of the plurality of light beams. The mask has a plurality of dispersive elements. A wavelength of each light beam of the plurality of light beams is increased until a final light beam of the plurality of light beams is projected at a maximum wavelength. The plurality of dispersive elements of the mask diffract the plurality of light beams into order mode beams to produce an intensity pattern in a medium between the mask and a substrate having a photoresist layer disposed thereon. The intensity pattern having a plurality of intensity peaks writes a plurality of portions in the photoresist layer.

公开(公告)号：US11940683B2

公开(公告)日：2024-03-26

申请号：US16902394

申请日：2020-06-16

Applicant: Applied Materials, Inc.

Inventor： Manivannan Thothadri ,  Harvey You ,  Helinda Nominanda ,  Neil Morrison ,  Daniel Paul Forster ,  Arvinder Chadha

IPC: G02F1/1333 ,  G02B1/11 ,  G02B1/14

CPC classification number: G02F1/133331 ,  G02B1/11 ,  G02B1/14 ,  G02F1/133305 ,  G02F2201/50 ,  G02F2202/28

Abstract: Embodiments described and discussed herein generally relate to flexible or foldable display devices, and more specifically to flexible cover lens assemblies. In one or more embodiments, a flexible cover lens assembly contains a substrate, an anti-fingerprint coating layer, and an adhesion promotion layer disposed between the substrate and the anti-fingerprint coating layer.

公开(公告)号：US20230312422A1

公开(公告)日：2023-10-05

申请号：US18112988

申请日：2023-02-22

Applicant: Applied Materials, Inc.

Inventor： Arvinder Chadha ,  Christopher BEAUDRY

IPC: C04B35/581 ,  H02N13/00 ,  C04B35/10

CPC classification number: C04B35/581 ,  H02N13/00 ,  C04B35/10 ,  C04B2235/3865 ,  C04B2235/3217 ,  C04B2235/3225 ,  C04B2235/75

Abstract: Embodiments disclosed herein include a puck for an electrostatic chuck. In an embodiment, the puck comprises a substrate with a top surface and a bottom surface. In an embodiment, a first material composition is at the top surface of the substrate, and a second material composition is at the bottom surface of the substrate. In an embodiment, a composition gradient is provided through the substrate between the top surface and the bottom surface.

公开(公告)号：US11776989B2

公开(公告)日：2023-10-03

申请号：US17479985

申请日：2021-09-20

Applicant: Applied Materials, Inc.

Inventor： Manivannan Thothadri ,  Arvinder Chadha

IPC: H01L21/67 ,  H01L27/15 ,  H01L25/075 ,  H01L33/00 ,  H01L33/60 ,  H05K3/00 ,  H05K3/30 ,  H05K13/00 ,  H05K13/04 ,  H01L21/683 ,  H01L33/20 ,  H01L33/48

CPC classification number: H01L27/156 ,  H01L21/67144 ,  H01L21/6835 ,  H01L25/0753 ,  H01L33/0095 ,  H01L33/60 ,  H05K3/0026 ,  H05K3/305 ,  H05K13/0015 ,  H05K13/0069 ,  H05K13/0469 ,  H01L33/20 ,  H01L33/48 ,  H01L2221/68322 ,  H01L2221/68368 ,  H01L2221/68381 ,  H01L2933/0033

Abstract: A method of transferring micro-devices includes selectively treating a first adhesive layer to form a treated portion and an untreated portion while micro-devices are attached the first adhesive layer. A second adhesive layer on a second surface is placed to abut the micro-devices. The first adhesive layer is exposed to illumination in a region that overlaps at least some of the treated portion and at least some of the untreated portion. Exposing the first adhesive layer to illumination neutralizes the at least some of the untreated portion to create a neutralized portion that is less adhesive than an exposed area of the treated portion. The first surface is separated from the second surface such that micro-devices in the treated portion remain attached to the first surface and micro-devices in the neutralized portion are attached to the second surface and separate from the first surface.

公开(公告)号：US12292635B2

公开(公告)日：2025-05-06

申请号：US18438084

申请日：2024-02-09

Applicant: Applied Materials, Inc.

Inventor： Manivannan Thothadri ,  Harvey You ,  Helinda Nominanda ,  Neil Morrison ,  Daniel Paul Forster ,  Arvinder Chadha

IPC: G02F1/1333 ,  G02B1/11 ,  G02B1/14

Abstract: Embodiments described and discussed herein generally relate to flexible or foldable display devices, and more specifically to flexible cover lens assemblies. In one or more embodiments, a flexible cover lens assembly contains a glass layer, an adhesion promotion layer on the glass layer, an anti-reflectance layer disposed on the adhesion promotion layer, a dry hardcoat layer having a nano-indentation hardness in a range from about 1 GPa to about 5 GPa and disposed on the anti-reflectance layer, and an anti-fingerprint coating layer disposed on the dry hardcoat layer.

公开(公告)号：US11794296B2

公开(公告)日：2023-10-24

申请号：US17592400

申请日：2022-02-03

Applicant: Applied Materials, Inc.

Inventor： Arvinder Chadha ,  Tomoaki Kohzu

IPC: H01T23/00 ,  B23Q3/15 ,  H01L21/683 ,  B23B31/28

CPC classification number: B23Q3/15 ,  B23B31/28 ,  H01L21/6833

Abstract: Electrostatic chucks and method for forming the same are described herein. The electrostatic chucks include a backside gas passage having a ceramic porous plug secured therein by a ceramic body of the chuck with a ceramic-to-ceramic body. In one example, ceramic porous plug is sintered with the ceramic body.

公开(公告)号：US11756982B2

公开(公告)日：2023-09-12

申请号：US17479996

申请日：2021-09-20

Applicant: Applied Materials, Inc.

Inventor： Manivannan Thothadri ,  Arvinder Chadha

IPC: H01L27/15 ,  H01L25/075 ,  H01L33/00 ,  H01L33/60 ,  H05K3/00 ,  H05K3/30 ,  H05K13/00 ,  H05K13/04 ,  H01L21/67 ,  H01L21/683 ,  H01L33/20 ,  H01L33/48

CPC classification number: H01L27/156 ,  H01L21/67144 ,  H01L21/6835 ,  H01L25/0753 ,  H01L33/0095 ,  H01L33/60 ,  H05K3/0026 ,  H05K3/305 ,  H05K13/0015 ,  H05K13/0069 ,  H05K13/0469 ,  H01L33/20 ,  H01L33/48 ,  H01L2221/68322 ,  H01L2221/68368 ,  H01L2221/68381 ,  H01L2933/0033

Abstract: A method of transferring micro-devices includes attaching micro-devices to one surface of a first body with a first adhesive layer, and selectively forming a masking layer on an opposite surface of the first body. A second adhesive layer on a second body is placed to contact the plurality of micro-devices. The first adhesive layer is exposed to illumination through the first body to create a neutralized portion while the masking layer blocks the illumination from reaching some of first adhesive layer to provide a less exposed portion that is more adhesive than the neutralized portion. The first surface is separated from the second surface such micro-devices on the less exposed portion of the first adhesive layer remain attached to the first surface and micro-devices corresponding to the neutralized portion attach to the second body and separate from the first surface.

公开(公告)号：US20220005863A1

公开(公告)日：2022-01-06

申请号：US17479985

申请日：2021-09-20

Applicant: Applied Materials, Inc.

Inventor： Manivannan Thothadri ,  Arvinder Chadha

IPC: H01L27/15 ,  H01L25/075 ,  H01L33/00 ,  H01L33/60 ,  H05K3/00 ,  H05K3/30 ,  H05K13/00 ,  H05K13/04 ,  H01L21/67 ,  H01L21/683

Abstract: A method of transferring micro-devices includes selectively treating a first adhesive layer to form a treated portion and an untreated portion while micro-devices are attached the first adhesive layer. A second adhesive layer on a second surface is placed to abut the micro-devices. The first adhesive layer is exposed to illumination in a region that overlaps at least some of the treated portion and at least some of the untreated portion. Exposing the first adhesive layer to illumination neutralizes the at least some of the untreated portion to create a neutralized portion that is less adhesive than an exposed area of the treated portion. The first surface is separated from the second surface such that micro-devices in the treated portion remain attached to the first surface and micro-devices in the neutralized portion are attached to the second surface and separate from the first surface.