公开(公告)号：US10332763B2

公开(公告)日：2019-06-25

申请号：US14987378

申请日：2016-01-04

Applicant: Applied Materials, Inc.

Inventor： Oleg V. Serebryanov ,  Alexander Goldin ,  Joseph M. Ranish

IPC: H05B3/02 ,  H01L21/67 ,  F27B17/00 ,  F26B3/30

Abstract: Embodiments of the present disclosure relate to a lamp driver for lamps used as a source of heat radiation in a thermal processing chamber. The lamp driver includes a power source, at least two DC/DC converters, each DC/DC converter connected with the power source in series, a direct connection between the at least two DC/DC converters, and a line that is attached to the direct connection and attachable to a reference voltage. A plurality of the lamp drivers may be utilized to power a plurality of lamps positioned in a grounded lamphead assembly. The electrical potential between the lamps and the grounded lamphead assembly is reduced, which reduces the risk of arcing between the lamps and the lamphead assembly.

公开(公告)号：US20170162408A1

公开(公告)日：2017-06-08

申请号：US15440336

申请日：2017-02-23

Applicant: Applied Materials, Inc.

Inventor： Alexander Goldin ,  Oleg V. Serebryanov

IPC: H01L21/67 ,  H05B1/02 ,  H01L21/324 ,  H05B3/00

CPC classification number: F24C15/00 ,  H01L21/324 ,  H01L21/67115 ,  H01L21/67248 ,  H05B1/0233 ,  H05B3/0047

Abstract: A thermal process chamber having a lamp driver circuit that includes two transistors and two diodes is described. The thermal process chamber includes a plurality of halogen lamps, the lamp driver, a temperature sensor that measures wafer temperature, a temperature controller connected to the temperature sensor and to the lamp driver, the temperature controller providing control signals to the lamp driver that are functions of the wafer temperature and a desired temperature. The lamp driver includes two transistors that are controlled by the control signals so that the power factor of the power supplied to the plurality of halogen lamps is in the range of 0.9 to 1.

公开(公告)号：US11156494B2

公开(公告)日：2021-10-26

申请号：US15370089

申请日：2016-12-06

Applicant: Applied Materials, Inc.

Inventor： Oleg V. Serebryanov ,  Alexander Goldin ,  Kenric Choi

IPC: G01F23/74

Abstract: Apparatus and methods for determining the liquid level of a canister are described. A magnetic field generated by a floating magnet within the canister is measured by a plurality of magnetic sensors outside of the canister. Methods of calibrating the magnetic sensors and measuring the location of the floating magnet are also described.

公开(公告)号：US09737959B2

公开(公告)日：2017-08-22

申请号：US14478118

申请日：2014-09-05

Applicant: Applied Materials, Inc.

Inventor： Dean C. Jennings ,  Mark Yam ,  Abhilash J. Mayur ,  Vernon Behrens ,  Paul A. O'Brien ,  Leonid M. Teritski ,  Alexander Goldin

IPC: B23K26/00 ,  G02B13/08 ,  B23K26/06 ,  B23K26/03 ,  B23K26/04 ,  B23K26/073 ,  B23K26/08 ,  B23K26/12 ,  B23K26/34 ,  C23C8/00 ,  C23C8/10 ,  C23C8/22 ,  C23C16/04 ,  C23C16/48 ,  G02B27/09 ,  H01L21/00 ,  H01L21/20 ,  H01L21/67 ,  B23K26/064 ,  B23K26/142 ,  B23K26/082 ,  B23K26/70 ,  B23K26/32 ,  B23K101/40 ,  B23K101/34 ,  B23K103/00 ,  B23K103/08

CPC classification number: H01L21/02683 ,  B23K26/032 ,  B23K26/034 ,  B23K26/04 ,  B23K26/0608 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/0652 ,  B23K26/0665 ,  B23K26/0738 ,  B23K26/082 ,  B23K26/083 ,  B23K26/0838 ,  B23K26/0869 ,  B23K26/123 ,  B23K26/125 ,  B23K26/142 ,  B23K26/32 ,  B23K26/34 ,  B23K26/705 ,  B23K2101/34 ,  B23K2101/40 ,  B23K2103/08 ,  B23K2103/50 ,  C23C8/00 ,  C23C8/10 ,  C23C8/22 ,  C23C16/047 ,  C23C16/481 ,  G02B27/0955 ,  H01L21/00 ,  H01L21/2026 ,  H01L21/67115

Abstract: The thermal processing device includes a stage, a continuous wave electromagnetic radiation source, a series of lenses, a translation mechanism, a detection module, a three-dimensional auto-focus, and a computer system. The stage is configured to receive a substrate thereon. The continuous wave electromagnetic radiation source is disposed adjacent the stage, and is configured to emit continuous wave electromagnetic radiation along a path towards the substrate. The series of lenses is disposed between the continuous wave electromagnetic radiation source and the stage, and are configured to condense the continuous wave electromagnetic radiation into a line of continuous wave electromagnetic radiation on a surface of the substrate. The translation mechanism is configured to translate the stage and the line of continuous wave electromagnetic radiation relative to one another. The detection module is positioned within the path, and is configured to detect continuous wave electromagnetic radiation.

公开(公告)号：US09345118B2

公开(公告)日：2016-05-17

申请号：US14532895

申请日：2014-11-04

Applicant: APPLIED MATERIALS, INC.

Inventor： Oleg Serebryanov ,  Alexander Goldin

IPC: H05B37/03

CPC classification number: H05B37/036 ,  H05B37/038

Abstract: Apparatus and methods for detecting lamp failure in a rapid thermal processing (RTP) tool are provided. Lamp failure detection systems are provided that can accommodate DC and/or AC voltages. The systems sample voltage signals along a circuit path formed by at least two serially connected lamps, calculate a voltage drop across the first lamp of the at least two serially connected lamps based on the sampled voltage signals, and determine whether a lamp failure has occurred based on a relationship between the voltage drop across the first lamp and a total voltage applied to the circuit path.

Abstract translation: 提供了一种用于在快速热处理（RTP）工具中检测灯泡故障的装置和方法。 提供可以适应直流和/或交流电压的灯故障检测系统。 所述系统沿着由至少两个串联连接的灯形成的电路路径采样电压信号，基于所采样的电压信号计算出至少两个串联灯的第一灯两端的电压降，并确定是否已经发生灯故障 关于第一灯上的电压降与施加到电路路径的总电压之间的关系。

公开(公告)号：US20150053659A1

公开(公告)日：2015-02-26

申请号：US14478118

申请日：2014-09-05

Applicant: Applied Materials, Inc.

Inventor： Dean C. Jennings ,  Mark Yam ,  Abhilash J. Mayur ,  Vernon Behrens ,  Paul A. O'Brien ,  Leonid M. Teritski ,  Alexander Goldin

IPC: B23K26/06 ,  H01L21/67

CPC classification number: H01L21/02683 ,  B23K26/032 ,  B23K26/034 ,  B23K26/04 ,  B23K26/0608 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/0652 ,  B23K26/0665 ,  B23K26/0738 ,  B23K26/082 ,  B23K26/083 ,  B23K26/0838 ,  B23K26/0869 ,  B23K26/123 ,  B23K26/125 ,  B23K26/142 ,  B23K26/32 ,  B23K26/34 ,  B23K26/705 ,  B23K2101/34 ,  B23K2101/40 ,  B23K2103/08 ,  B23K2103/50 ,  C23C8/00 ,  C23C8/10 ,  C23C8/22 ,  C23C16/047 ,  C23C16/481 ,  G02B27/0955 ,  H01L21/00 ,  H01L21/2026 ,  H01L21/67115

Abstract: The thermal processing device includes a stage, a continuous wave electromagnetic radiation source, a series of lenses, a translation mechanism, a detection module, a three-dimensional auto-focus, and a computer system. The stage is configured to receive a substrate thereon. The continuous wave electromagnetic radiation source is disposed adjacent the stage, and is configured to emit continuous wave electromagnetic radiation along a path towards the substrate. The series of lenses is disposed between the continuous wave electromagnetic radiation source and the stage, and are configured to condense the continuous wave electromagnetic radiation into a line of continuous wave electromagnetic radiation on a surface of the substrate. The translation mechanism is configured to translate the stage and the line of continuous wave electromagnetic radiation relative to one another. The detection module is positioned within the path, and is configured to detect continuous wave electromagnetic radiation.

Abstract translation: 热处理装置包括平台，连续波电磁辐射源，一系列透镜，平移机构，检测模块，三维自动对焦以及计算机系统。 该台被配置为在其上接收基板。 连续波电磁辐射源被设置在与该台相邻的位置，并且被配置成沿着朝向衬底的路径发射连续波电磁辐射。 该系列透镜设置在连续波电磁辐射源和台之间，并被配置为将连续波电磁辐射冷凝成基片表面上的连续波电磁辐射线。 翻译机构被配置为相对于彼此平移连续波电磁辐射的阶段和线。 检测模块位于路径内，被配置为检测连续波电磁辐射。

公开(公告)号：US12160243B2

公开(公告)日：2024-12-03

申请号：US17862278

申请日：2022-07-11

Applicant: Applied Materials, Inc.

Inventor： Mikhail Taraboukhine ,  Oleg Serebryanov ,  Alexander Goldin ,  Vilen Nestorov

IPC: H03M1/10

Abstract: Embodiments disclosed herein include a method of calibrating a tool for converting photonic signals to electrical signals. In an embodiment, the method comprises connecting a calibration module to a calibrated current source, finding a transfer function for a plurality of modes with the calibration module, and storing the transfer functions in a lookup table.

公开(公告)号：US10734257B2

公开(公告)日：2020-08-04

申请号：US13866505

申请日：2013-04-19

Applicant: APPLIED MATERIALS, INC.

Inventor： Oleg Serebryanov ,  Joseph M. Ranish ,  Alexander Goldin

IPC: H01L21/67

Abstract: Methods and apparatus for heating a substrate in a process chamber are provided herein. In some embodiments, an apparatus for heating a substrate in a process chamber includes a lamp group comprising one or more sets of lamps to provide radiant energy to heat a substrate when disposed in the process chamber, wherein each set of lamps comprises a plurality of lamps wired in series, and wherein each set of lamps is wired in parallel with respect to other sets of the one or more sets of lamps; an alternating current (AC) power source to produce an AC input waveform; and a lamp driver to power the lamp group, the lamp driver including a rectifier coupled to the AC power source to convert the AC input waveform to DC voltage; and a direct current to direct current (DC/DC) converter to reduce voltage of the DC power.

公开(公告)号：US20170160123A1

公开(公告)日：2017-06-08

申请号：US15370089

申请日：2016-12-06

Applicant: Applied Materials, Inc.

Inventor： Oleg V. Serebryanov ,  Alexander Goldin ,  Kenric Choi

IPC: G01F23/74

CPC classification number: G01F23/74 ,  B65D1/00 ,  G01F25/0061

Abstract: Apparatus and methods for determining the liquid level of a canister are described. A magnetic field generated by a floating magnet within the canister is measured by a plurality of magnetic sensors outside of the canister. Methods of calibrating the magnetic sensors and measuring the location of the floating magnet are also described.

公开(公告)号：US20240014825A1

公开(公告)日：2024-01-11

申请号：US17862278

申请日：2022-07-11

Applicant: Applied Materials, Inc.

Inventor： Mikhail Taraboukhine ,  Oleg Serebryanov ,  Alexander Goldin ,  Vilen Nestorov

IPC: H03M1/10

CPC classification number: H03M1/1014

Abstract: Embodiments disclosed herein include a method of calibrating a tool for converting photonic signals to electrical signals. In an embodiment, the method comprises connecting a calibration module to a calibrated current source, finding a transfer function for a plurality of modes with the calibration module, and storing the transfer functions in a lookup table.