公开(公告)号：US20230137186A1

公开(公告)日：2023-05-04

申请号：US17918100

申请日：2021-04-01

Applicant: ASML Netherlands B.V.

Inventor： Weiming REN ,  Zhong-wei CHEN ,  Yongxin WANG

IPC: G01N23/2251 ,  H01J37/244 ,  H01L31/118 ,  H01L31/18

Abstract: Some disclosed embodiments include an electron detector comprising: a first semiconductor layer having a first portion and a second portion; a second semiconductor layer; a third semiconductor layer; a PIN region formed by the first, second, and third semiconductor layers; a power supply configured to apply a reverse bias between the first and the third semiconductor layers; and a depletion region formed within the PIN region by the reverse bias and configured to generate a detector signal based on a first subset of the plurality of signal electrons captured within the depletion region, wherein the second portion of the first semiconductor layer is not depleted and is configured to provide an energy barrier to block a second subset of the plurality of signal electrons and to allow the first subset of the plurality of signal electrons to pass through to reach the depletion region.

公开(公告)号：US20220246391A1

公开(公告)日：2022-08-04

申请号：US17572557

申请日：2022-01-10

Applicant: ASML Netherlands B.V.

Inventor： Joe WANG ,  Yongxin WANG ,  Zhongwei CHEN ,  Xuerang HU

IPC: H01J37/244 ,  H01J37/28

Abstract: A multi-cell detector may include a first layer having a region of a first conductivity type and a second layer including a plurality of regions of a second conductivity type. The second layer may also include one or more regions of the first conductivity type. The plurality of regions of the second conductivity type may be partitioned from one another, preferably by the one or more regions of the first conductivity type of the second layer. The plurality of regions of the second conductivity type may be spaced apart from one or more regions of the first conductivity type in the second layer. The detector may further include an intrinsic layer between the first and second layers.

公开(公告)号：US20200273664A1

公开(公告)日：2020-08-27

申请号：US16800946

申请日：2020-02-25

Applicant: ASML Netherlands B.V.

Inventor： Yongxin WANG ,  Rui-Ling LAI

IPC: H01J37/244 ,  H01L31/115 ,  H01L31/18 ,  H01L27/144

Abstract: A detector may be provided with a sensing element or an array of sensing elements, each of the sensing elements may have a corresponding gain element. A substrate may be provided having a sensing element and a gain element integrated together. The gain element may include a section in which, along a direction perpendicular to an incidence direction of an electron beam, a region of first conductivity is provided adjacent to a region of second conductivity, and a region of third conductivity may be provided adjacent to the region of second conductivity. The sensing element may include a section in which, along the incidence direction, a region of fourth conductivity is provided adjacent to an intrinsic region of the substrate, and the region of second conductivity may be provided adjacent to the intrinsic region.

公开(公告)号：US20200219696A1

公开(公告)日：2020-07-09

申请号：US16648288

申请日：2018-09-14

Applicant: ASML Netherlands B.V.

Inventor： Yongxin WANG ,  Zhonghua DONG ,  Rui-Ling LAI

IPC: H01J37/244 ,  H01L27/146

Abstract: Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element. The detector comprises a switching element configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.

公开(公告)号：US20200027694A1

公开(公告)日：2020-01-23

申请号：US16484106

申请日：2018-02-01

Applicant: ASML Netherlands B.V.

Inventor： Yongxin WANG ,  Weiming REN ,  Zhonghua DONG ,  Zhongwei CHEN

IPC: H01J37/244 ,  H01J37/28

Abstract: Systems and methods are provided for charged particle detection. The detection system can comprise a signal processing circuit configured to generate a set of intensity gradients based on electron intensity data received from a plurality of electron sensing elements. The detection system can further comprise a beam spot processing module configured to determine, based on the set of intensity gradients, at least one boundary of a beam spot; and determine, based on the at least one boundary, that a first set of electron sensing elements of the plurality of electron sensing elements is within the beam spot. The beam spot processing module can further be configured to determine an intensity value of the beam spot based on the electron intensity data received from the first set of electron sensing elements and also generate an image of a wafer based on the intensity value.

公开(公告)号：US20240186106A1

公开(公告)日：2024-06-06

申请号：US18284839

申请日：2022-03-03

Applicant: ASML Netherlands B.V.

Inventor： Yongxin WANG ,  Bruno LA FONTAINE

IPC: H01J37/24 ,  H01J37/244

CPC classification number: H01J37/24 ,  H01J37/244

Abstract: An improved method of performing a self-diagnosis of a charged particle inspection system is disclosed. An improved method comprises triggering a self-diagnosis based on output data of the charged particle inspection system; in response to the triggering of the self-diagnosis, receiving diagnostic data of a sub-system of the charged particle inspection system; identifying an issue associated with the output data based on the diagnostic data of the sub-system; and generating a control signal to adjust an operation parameter of the sub-system according to the identified issue.

公开(公告)号：US20220059311A1

公开(公告)日：2022-02-24

申请号：US17408267

申请日：2021-08-20

Applicant: ASML Netherlands B.V.

Inventor： Yongxin WANG ,  Rui-Ling LAI ,  Nickolay STEPANENKO ,  Jan BEX ,  Ronny HENDRIX ,  Lidewij Elisa CORNELISSEN ,  Robert Anton BROOKHUIS

IPC: H01J37/16 ,  H05K1/02 ,  H05K1/03

Abstract: Detector modules, systems and methods for detecting signal beams are disclosed using a detector module and a support comprising a feedthrough.
Furthermore, apparatuses, systems, and methods for sealing a vacuum system configured to provide an atmospheric environment and a vacuum chamber environment are disclosed. In some embodiments, a printed circuit board (PCB) comprising a first side for exposing to the atmospheric environment and a second side for exposing to the vacuum chamber environment and for covering an aperture in the vacuum chamber environment, wherein the second side is opposite to the first side. The apparatuses, systems, and methods may include a rigid body on the first side of the PCB and a device connected to the second side of the PCB and positioned on a portion of the PCB that covers the aperture. The PCB may be configured to provide an interface between the device and the rigid body.

公开(公告)号：US20210134557A1

公开(公告)日：2021-05-06

申请号：US17044840

申请日：2019-03-14

Applicant: ASML Netherlands B.V.

Inventor： Yongxin WANG ,  Zhonghua DONG ,  Rui-Ling LAI

IPC: H01J37/244 ,  H01L27/146

Abstract: Detectors and detection systems are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first plurality of the sensing elements and a second plurality of the sensing elements, and a plurality of sections configured to connect the first plurality to an output, and connect the second plurality to an output. Switching regions may be provided between the sensing elements that are configured to connect two or more sensing elements. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy and/or beam intensity.

公开(公告)号：US20210043416A1

公开(公告)日：2021-02-11

申请号：US17049329

申请日：2019-03-21

Applicant: ASML Netherlands B.V.

Inventor： Yongxin WANG ,  Zhonghua DONG

IPC: H01J37/244 ,  H01L27/146

Abstract: Detectors and detection systems are disclosed. According to certain embodiments, a detector comprises a substrate comprising a plurality of sensing elements including a first sensing element and a second sensing element, wherein at least the first sensing element is formed in a triangular shape. The detector may include a switching region configured to connect the first sensing 5 element and the second sensing element. There may also be provided a plurality of sections including a first section connecting a first plurality of sensing elements to a first output and a second section connecting a second plurality of sensing elements to a second output. The section may be provided in a hexagonal shape.

公开(公告)号：US20200227229A1

公开(公告)日：2020-07-16

申请号：US16648385

申请日：2018-09-14

Applicant: ASML Netherlands B.V.

Inventor： Yongxin WANG ,  Zhonghua DONG ,  Rui-Ling LAI

IPC: H01J37/244 ,  H01L27/146

Abstract: Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element. The detector comprises a switching element configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.