公开(公告)号：US20240242930A1

公开(公告)日：2024-07-18

申请号：US18563841

申请日：2022-05-18

Applicant: ASML Netherlands B.V.

Inventor： Jan BEX ,  Nickolay STEPANENKO ,  Matthias OBERST ,  Harald Gert Helmut NEUBAUER ,  Thomas SCHWEIGER ,  Florian Alfons STIEGLITZ ,  Bernd Michael VOLLMER

IPC: H01J37/244 ,  G01T1/24 ,  G01T1/29

CPC classification number: H01J37/244 ,  G01T1/24 ,  G01T1/2928 ,  H01J2237/2441

Abstract: A charged particle detector may include a plurality of sensing elements formed in a substrate, wherein a sensing element of the plurality of sensing elements is formed of a first region on a first side of the substrate, and a second region on a second side of the substrate, the second side being opposite to the first side. The detector may also include a plurality of third regions formed on the second side of the substrate, the third regions including one or more circuit components. The detector may also include an array of fourth regions formed on the second side of the substrate, the array of fourth regions being between adjacent third regions.

公开(公告)号：US20220059311A1

公开(公告)日：2022-02-24

申请号：US17408267

申请日：2021-08-20

Applicant: ASML Netherlands B.V.

Inventor： Yongxin WANG ,  Rui-Ling LAI ,  Nickolay STEPANENKO ,  Jan BEX ,  Ronny HENDRIX ,  Lidewij Elisa CORNELISSEN ,  Robert Anton BROOKHUIS

IPC: H01J37/16 ,  H05K1/02 ,  H05K1/03

Abstract: Detector modules, systems and methods for detecting signal beams are disclosed using a detector module and a support comprising a feedthrough.
Furthermore, apparatuses, systems, and methods for sealing a vacuum system configured to provide an atmospheric environment and a vacuum chamber environment are disclosed. In some embodiments, a printed circuit board (PCB) comprising a first side for exposing to the atmospheric environment and a second side for exposing to the vacuum chamber environment and for covering an aperture in the vacuum chamber environment, wherein the second side is opposite to the first side. The apparatuses, systems, and methods may include a rigid body on the first side of the PCB and a device connected to the second side of the PCB and positioned on a portion of the PCB that covers the aperture. The PCB may be configured to provide an interface between the device and the rigid body.