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公开(公告)号：US20180081285A1
公开(公告)日：2018-03-22
申请号：US15824686
申请日：2017-11-28
发明人： Marcel BECKERS , Sjoerd Nicolaas Lambertus DONDERS , Christiaan Alexander HOOGENDAM , Johannes Henricus Wilhelmus JACOBS , Nicolaas TEN KATE , Nicolaas Rudolf KEMPER , Ferdy MIGCHELBRINK , Elmar EVERS
IPC分类号： G03F7/20
CPC分类号： G03F7/70716 , G03F7/70341 , G03F7/70808
摘要： A liquid supply system for an immersion lithographic apparatus provides a laminar flow of immersion liquid between a final element of the projection system and a substrate. A control system minimizes the chances of overflowing and an extractor includes an array of outlets configured to minimize vibrations.
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公开(公告)号：US20170285489A1
公开(公告)日：2017-10-05
申请号：US15627054
申请日：2017-06-19
发明人： Marcus Adrianus VAN DE KERKHOF , Siebe LANDHEER , Marcel BECKERS , Jeroen Peter Johannes BRUIJSTENS , Ivo Adam Johannes THOMAS , Franciscus Johannes Joseph JANSSEN
CPC分类号： G03F7/70341 , G03B27/52
摘要： A lithographic apparatus includes a projection system configured to project a patterned radiation beam onto a target portion of a substrate. The projection system has a final element. The apparatus also includes a barrier member surrounding a space between the projection system and, in use, the substrate, to define in part with the final element a reservoir for liquid. The barrier member is spaced from the final element to define a gap therebetween. The apparatus further includes a deformable seal between a radially outer surface of the final element and a radially outer surface of the barrier member. The deformable seal is configured to substantially prevent a gas from flowing past the seal towards or away from the reservoir of liquid.
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公开(公告)号：US20170038695A1
公开(公告)日：2017-02-09
申请号：US15299240
申请日：2016-10-20
发明人： Nicolaas Rudolf KEMPER , Marcel BECKERS , Stefan Philip Christiaan BELFROID , Ferdy MIGCHELBRINK , Sergei SHULEPOV
IPC分类号： G03F7/20
摘要： A plurality of extraction conduits is provided to remove immersion liquid into a chamber. The extraction conduits are arranged at different distances from a target portion of the substrate. From the chamber, a passage is provided to which a suction force is applied. When all the conduits are filled with immersion liquid, the extraction capacity will be greater than when one or more of the conduits comprise gas.
摘要翻译： 提供多个提取管道以将浸入液体移入室中。 提取管道布置在与基板的目标部分不同的距离处。 提供了一个通道，吸入力被施加到该通道上。 当所有导管充满浸没液体时，提取能力将大于当一个或多个导管包含气体时的提取能力。
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公开(公告)号：US20160054647A1
公开(公告)日：2016-02-25
申请号：US14933956
申请日：2015-11-05
发明人： Marcus Adrianus VAN DE KERKHOF , Siebe LANDHEER , Marcel BECKERS , Jeroen Peter Johannes BRUIJSTENS , Ivo Adam Johannes THOMAS , Franciscus Johannes Joseph JANSSEN
IPC分类号： G03B27/52
CPC分类号： G03F7/70341 , G03B27/52
摘要： A lithographic apparatus includes a projection system configured to project a patterned radiation beam onto a target portion of a substrate. The projection system has a final element. The apparatus also includes a barrier member surrounding a space between the projection system and, in use, the substrate, to define in part with the final element a reservoir for liquid. The barrier member is spaced from the final element to define a gap therebetween. The apparatus further includes a deformable seal between a radially outer surface of the final element and a radially outer surface of the barrier member. The deformable seal is configured to substantially prevent a gas from flowing past the seal towards or away from the reservoir of liquid.
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公开(公告)号：US20190179232A1
公开(公告)日：2019-06-13
申请号：US16276861
申请日：2019-02-15
发明人： Marcel BECKERS , Sjoerd Nicolaas Lambertus DONDERS , Christiaan Alexander HOOGENDAM , Johannes Henricus Wilhelmus JACOBS , Nicolaas TEN KATE , Nicolaas Rudolf KEMPER , Ferdy MIGCHELBRINK , Elmar EVERS
IPC分类号： G03F7/20
摘要： A liquid supply system for an immersion lithographic apparatus provides a laminar flow of immersion liquid between a final element of the projection system and a substrate. A control system minimizes the chances of overflowing and an extractor includes an array of outlets configured to minimize vibrations.
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6.发明申请公开(公告)号：US20180292762A1
公开(公告)日：2018-10-11
申请号：US16008355
申请日：2018-06-14
发明人： Nicolaas Rudolf KEMPER , Nicolaas TEN KATE , Joost Jeroen OTTENS , Marcel BECKERS , Marco POLIZZI , Michel RIEPEN , Anthonie KUIJPER , Koen STEFFENS , Adrianes Johannes BAETEN , Anca Mihaela ANTONEVICI
摘要： An immersion lithographic apparatus is described in which a two-phase flow is separated into liquid-rich and gas-rich flows by causing the liquid-rich flow to preferentially flow along a surface.
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公开(公告)号：US20160370713A1
公开(公告)日：2016-12-22
申请号：US15250658
申请日：2016-08-29
发明人： Marcel BECKERS , Sjoerd Nicolaas Lambertus Donders , Christiaan Alexander Hoogendam , Johannes Henricus Wilhelmus Jacobs , Nicolaas Ten Kate , Nicolaas Rudolf Kemper , Ferdy Migchelbrink , Elmar Evers
IPC分类号： G03F7/20
CPC分类号： G03F7/70716 , G03F7/70341 , G03F7/70808
摘要： A liquid supply system for an immersion lithographic apparatus provides a laminar flow of immersion liquid between a final element of the projection system and a substrate. A control system minimizes the chances of overflowing and an extractor includes an array of outlets configured to minimize vibrations.
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公开(公告)号：US20150309420A1
公开(公告)日：2015-10-29
申请号：US14664360
申请日：2015-03-20
发明人： Marcel BECKERS , Sjoerd Nicolaas Lambertus Donders , Christiaan Alexander Hoogendam , Johannes Henricus Wilhelmus Jacobs , Nicolaas Ten Kate , Nicolaas Rudolf Kemper , Ferdy Migchelbrink , Elmar Evers
IPC分类号： G03F7/20
CPC分类号： G03F7/70716 , G03F7/70341 , G03F7/70808
摘要： A liquid supply system for an immersion lithographic apparatus provides a laminar flow of immersion liquid between a final element of the projection system and a substrate. A control system minimizes the chances of overflowing and an extractor includes an array of outlets configured to minimize vibrations.
摘要翻译： 用于浸没式光刻设备的液体供应系统在投影系统的最终元件和基底之间提供浸液的层流。 控制系统使溢出的机会最小化，并且提取器包括被配置为使振动最小化的出口阵列。
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公开(公告)号：US20170115578A1
公开(公告)日：2017-04-27
申请号：US15311548
申请日：2015-04-24
发明人： Christianus Wilhelmus Johannes BERENDSEN , Marcel BECKERS , Henricus Jozef CASTELIJNS , Hubertus Antonius GERAETS , Adrianus Hendrik KOEVOETS , Leon Martin LEVASIER , Peter SCHAAP , Bob STREEFKERK , Siegfried Alexander TROMP
IPC分类号： G03F7/20
CPC分类号： G03F7/70883 , G03F7/70033 , G03F7/70625 , G03F7/70783 , G03F7/70875 , G03F7/70891 , G03F7/70941
摘要： A method for compensating for an exposure error in an exposure process of a lithographic apparatus that comprises a substrate table, the method comprising: obtaining a dose measurement indicative of a dose of IR radiation that reaches substrate level, wherein the dose measurement can be used to calculate an amount of IR radiation absorbed by an object in the lithographic apparatus during an exposure process; and using the dose measurement to control the exposure process so as to compensate for an exposure error associated with the IR radiation absorbed by the object during the exposure process.
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公开(公告)号：US20150234294A1
公开(公告)日：2015-08-20
申请号：US14704384
申请日：2015-05-05
发明人： Clemens Johannes Gerardus VAN DEN DUNGEN , Nicolaas Franciscus KOPPELAARS , Martinus Hendrikus Antonius LEENDERS , Paulus Martinus Maria LIEBREGTS , Johannes Catharinus Hubertus MULKENS , Erik Henricus Egidius Catharina EUMMELEN , Marcel BECKERS , Richard MOERMAN , Cédric Désiré GROUWSTRA , Danny Maria Hubertus PHILIPS , Remko Jan Peter VERHEES , Pieter MULDER , Evert VAN VLIET
IPC分类号： G03F7/20
CPC分类号： G03F7/70866 , G03F7/70341
摘要： An immersion lithographic apparatus is disclosed that includes a fluid supply system configured to supply a fluid, the fluid supply system having a chamber with a plurality of inlet holes in a first side wall and a plurality of outlet holes in a second side wall, the first side wall facing the second side wall, wherein the inlet holes direct fluid entering the chamber in a direction towards areas of the second side wall between the plurality of outlet holes.
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