公开(公告)号：US10478784B2

公开(公告)日：2019-11-19

申请号：US15682715

申请日：2017-08-22

Applicant: AGC Inc.

Inventor： Shuji Yamazaki ,  Shuichiro Kimura ,  Kenji Kitaoka ,  Yu Hanawa

IPC: B01D71/04 ,  C03C11/00 ,  G01N1/10 ,  G02B21/34 ,  B01D69/02 ,  C03C3/089 ,  G01N1/40 ,  G02B21/00

Abstract: There is provided a glass substrate for observing minute substance, made of porous glass and capable of separating and capturing a minute substance with a 10 to 500 nm average particle diameter contained in a solution or a suspension, comprising a porous glass substrate having a plurality of pores, wherein the plurality of pores has an average pore diameter ranging from 30 to 110% of the average particle diameter of the minute substance, each of the plurality of pores has a surface pore diameter on an uppermost surface of the glass substrate, a standard deviation of the surface pore diameter is 60% or less of the average particle diameter of the minute substance, and a pore with a pore diameter ranging from 60 to 140% of a pore diameter at peak top in a pore diameter distribution of the plurality of pores occupies 90% or more of total pore volume.

公开(公告)号：US11753330B2

公开(公告)日：2023-09-12

申请号：US17480440

申请日：2021-09-21

Applicant: AGC INC.

Inventor： Yu Hanawa ,  Kazutaka Ono ,  Shigeki Sawamura

IPC: C03C3/087 ,  B32B17/06 ,  B32B7/06 ,  H01L21/683 ,  H01L21/78 ,  C03C3/091

CPC classification number: C03C3/087 ,  B32B7/06 ,  B32B17/06 ,  H01L21/6835 ,  H01L21/7813 ,  B32B2250/02 ,  B32B2250/03 ,  B32B2457/14 ,  C03C3/091 ,  H01L2221/68318

Abstract: A glass substrate contains, as a glass matrix composition as represented by mole percentage based on oxides, SiO2: 58-75%, Al2O3: 4.5-16%, B2O3: 0-6%, MgO: 0-6%, CaO: 0-6%, SrO: 5-20%, BaO: 5-20%, and MgO+CaO+SrO+BaO:15-40%. The glass substrate has an alkali metal oxide content of 0-0.1% as represented by mole percentage based on oxides. The glass substrate has an average coefficient of thermal expansion α of 56-90 (×10−7/° C.) at 50° C.-350° C.

公开(公告)号：US20210366760A1

公开(公告)日：2021-11-25

申请号：US17398107

申请日：2021-08-10

Applicant: AGC Inc.

Inventor： Yu Hanawa ,  Shuhei Nomura ,  Kazutaka Ono ,  Nobuhiko Takeshita ,  Keisuke Hanashima

IPC: H01L21/687 ,  C03B33/02 ,  B65D85/48 ,  H01L21/67 ,  G05B1/00 ,  H01L23/544 ,  C03C27/10 ,  B32B17/10 ,  C03B33/023 ,  H01L21/56

Abstract: A glass substrate is laminated with a substrate containing silicon to thereby form a laminated substrate. The glass substrate has a concave surface and a convex surface and has one or more marks that distinguish between the concave surface and the convex surface.

公开(公告)号：US11715673B2

公开(公告)日：2023-08-01

申请号：US17367762

申请日：2021-07-06

Applicant: AGC Inc.

Inventor： Yu Hanawa ,  Shigeki Sawamura ,  Shuhei Nomura ,  Kazutaka Ono ,  Nobuhiko Takeshita ,  Keisuke Hanashima

IPC: B32B17/06 ,  H01L23/15 ,  C03C27/04 ,  C03C3/085 ,  C03C3/087 ,  C03C3/091 ,  C03C3/093 ,  B32B1/00 ,  B32B9/00 ,  C03C17/22 ,  H01L23/13

CPC classification number: H01L23/15 ,  B32B1/00 ,  B32B9/005 ,  B32B17/06 ,  C03C3/085 ,  C03C3/087 ,  C03C3/091 ,  C03C3/093 ,  C03C17/22 ,  C03C27/04 ,  H01L23/13 ,  B32B2307/30 ,  B32B2457/14

Abstract: The present invention provides a glass substrate in which in a step of sticking a glass substrate and a silicon-containing substrate to each other, bubbles hardly intrude therebetween. The present invention relates to a glass substrate for forming a laminated substrate by lamination with a silicon-containing substrate, having a warpage of 2 μm to 300 μm, and an inclination angle due to the warpage of 0.0004° to 0.12°.

公开(公告)号：US10562805B2

公开(公告)日：2020-02-18

申请号：US15852124

申请日：2017-12-22

Applicant: AGC Inc.

Inventor： Yu Hanawa ,  Masamichi Tanida

IPC: B23B7/02 ,  C03C3/089 ,  C03B19/06 ,  B33Y80/00 ,  B33Y70/00 ,  C04B35/64 ,  C04B35/622 ,  C04B35/14 ,  C03C8/16 ,  B33Y10/00 ,  B29C64/112 ,  B28B1/00 ,  C03B19/01 ,  C03C3/06 ,  C03C3/064 ,  C03C3/066 ,  C03C3/091 ,  C03C3/093 ,  B29K105/16 ,  B29K509/08 ,  B29L31/34

Abstract: A sintered formed body containing a glass in which undesired coloring in a blackish color, incomplete sintering, a lack of strength, and formation of bubbles are suppressed, and an article provided with the same are provided. Provided are a sintered formed body and an article provided with the same, the sintered formed body consisting of a sintered body containing a glass, and having a thick part with a thickness of 60 μm or more, in which a carbon content from a position of a surface of the thick part to a position at a depth of at least 30 μm from the surface of the thick part is 0.7 to 15 mass ppm.

公开(公告)号：US11114356B2

公开(公告)日：2021-09-07

申请号：US16555702

申请日：2019-08-29

Applicant: AGC Inc.

Inventor： Yu Hanawa ,  Shigeki Sawamura ,  Shuhei Nomura ,  Kazutaka Ono ,  Nobuhiko Takeshita ,  Keisuke Hanashima

IPC: B32B15/04 ,  H01L23/15 ,  C03C27/04 ,  C03C3/085 ,  C03C3/087 ,  C03C3/091 ,  C03C3/093 ,  C03C17/22 ,  H01L23/13

Abstract: The present invention provides a glass substrate in which in a step of sticking a glass substrate and a silicon-containing substrate to each other, bubbles hardly intrude therebetween. The present invention relates to a glass substrate for forming a laminated substrate by lamination with a silicon-containing substrate, having a warpage of 2 μm to 300 μm, and an inclination angle due to the warpage of 0.0004° to 0.12°.

公开(公告)号：US10515864B2

公开(公告)日：2019-12-24

申请号：US15822859

申请日：2017-11-27

Applicant: AGC Inc.

Inventor： Yu Hanawa ,  Shigeki Sawamura ,  Shuhei Nomura ,  Kazutaka Ono ,  Nobuhiko Takeshita ,  Keisuke Hanashima

IPC: B32B15/04 ,  B32B17/06 ,  H01L23/15 ,  C03C17/22 ,  H01L23/13

Abstract: The present invention provides a glass substrate in which in a step of sticking a glass substrate and a silicon-containing substrate to each other, bubbles hardly intrude therebetween. The present invention relates to a glass substrate for forming a laminated substrate by lamination with a silicon-containing substrate, having a warpage of 2 μm to 300 μm, and an inclination angle due to the warpage of 0.0004° to 0.12°.

公开(公告)号：US20190385920A1

公开(公告)日：2019-12-19

申请号：US16555702

申请日：2019-08-29

Applicant: AGC, Inc.

Inventor： Yu Hanawa ,  Shigeki Sawamura ,  Shuhei Nomura ,  Kazutaka Ono ,  Nobuhiko Takeshita ,  Keisuke Hanashima

IPC: H01L23/15 ,  C03C17/22 ,  H01L23/13

Abstract: The present invention provides a glass substrate in which in a step of sticking a glass substrate and a silicon-containing substrate to each other, bubbles hardly intrude therebetween. The present invention relates to a glass substrate for forming a laminated substrate by lamination with a silicon-containing substrate, having a warpage of 2 μm to 300 μm, and an inclination angle due to the warpage of 0.0004° to 0.12°.

公开(公告)号：US11180407B2

公开(公告)日：2021-11-23

申请号：US15939631

申请日：2018-03-29

Applicant: AGC Inc.

Inventor： Yu Hanawa ,  Kazutaka Ono ,  Shigeki Sawamura

IPC: C03C3/087 ,  B32B17/06 ,  B32B7/06 ,  H01L21/683 ,  H01L21/78 ,  C03C3/091

Abstract: A glass substrate contains, as a glass matrix composition as represented by mole percentage based on oxides, SiO2: 58-75%, Al2O3: 4.5-16%, B2O3: 0-6%, MgO: 0-6%, CaO: 0-6%, SrO: 5-20%, BaO: 5-20%, and MgO+CaO+SrO+BaO: 15-40%. The glass substrate has an alkali metal oxide content of 0-0.1% as represented by mole percentage based on oxides. The glass substrate has an average coefficient of thermal expansion α of 56-90 (×10−7/° C.) at 50° C.-350° C.

公开(公告)号：US11133215B2

公开(公告)日：2021-09-28

申请号：US15877509

申请日：2018-01-23

Applicant: AGC Inc.

Inventor： Yu Hanawa ,  Shuhei Nomura ,  Kazutaka Ono ,  Nobuhiko Takeshita ,  Keisuke Hanashima

IPC: H01L21/56 ,  H01L21/687 ,  C03B33/023 ,  H01L23/15 ,  H01L23/00 ,  B32B17/00 ,  B65D85/48 ,  C03B33/02 ,  H01L21/67 ,  G05B1/00 ,  H01L23/544 ,  C03C27/10 ,  B32B17/10

Abstract: A glass substrate is laminated with a substrate containing silicon to thereby form a laminated substrate. The glass substrate has a concave surface and a convex surface and has one or more marks that distinguish between the concave surface and the convex surface.