公开(公告)号：US08374206B2

公开(公告)日：2013-02-12

申请号：US12934928

申请日：2009-03-27

申请人： Xiaoyuan Peng ,  William J. Jordens

发明人： Xiaoyuan Peng ,  William J. Jordens

IPC分类号： H01S3/10

CPC分类号： H01S3/2383 ,  H01S3/005 ,  H01S3/0085 ,  H01S3/0092 ,  H01S3/0941 ,  H01S3/10046 ,  H01S3/10061 ,  H01S3/115 ,  H01S3/117 ,  H01S5/0085 ,  H01S5/0092 ,  H01S5/4012 ,  H01S5/4025

摘要： Two pulsed lasers (14) or sets of lasers propagate beams of pulses (20) having orthogonally related polarization states. A beam combiner (24) combines the orthogonal beams to form a combined beam propagating along a common beam path (16) to intersect an optical modulator (30) that selectively changes the polarization state of selected pulses of either beam to provide a composite beam (18) including similarly polarized pulses from the orthogonal beams. The composite polarized beam has a composite average power and a composite repetition rate that are greater than those provided by either laser. The optical modulator can also selectively control the polarization states of pulses from either laser to pass through or be blocked by a downstream polarizer (32). Additional modulators may facilitate pulse shaping of the pulses. The system is scalable by addition of sets of single lasers or pairs of lasers with beam combiners and modulators.

摘要翻译： 两个脉冲激光器（14）或一组激光器传播具有正交相关极化状态的脉冲（20）。 光束组合器（24）组合正交光束以形成沿着公共光束路径（16）传播的组合光束以与选择性地改变任一光束的选定脉冲的偏振态的光调制器（30）相交，以提供复合光束 18）包括来自正交光束的类似偏振脉冲。 复合极化光束具有大于由任一激光器提供的复合平均功率和复合重复率。 光学调制器还可以选择性地控制来自任一激光器的脉冲的偏振态通过或被下游偏振器（32）阻挡。 附加的调制器可以促进脉冲的脉冲整形。 该系统通过添加单个激光器组或激光器组合与光束组合器和调制器可扩展。

公开(公告)号：US07796671B2

公开(公告)日：2010-09-14

申请号：US12059955

申请日：2008-03-31

申请人： Xiaoyuan Peng ,  Wensheng Ren

发明人： Xiaoyuan Peng ,  Wensheng Ren

IPC分类号： H01S3/09

CPC分类号： H01S3/2333 ,  H01S3/005 ,  H01S3/0064 ,  H01S3/061 ,  H01S3/1603 ,  H01S3/1623 ,  H01S3/163 ,  H01S3/1673 ,  H01S3/2316 ,  H01S3/2341

摘要： Anisotropic crystals such as Nd:YVO4, Nd:YLF, and Nd:GdVO4 have become preferred gain materials for many laser applications. The anisotropic gain medium without ancillary compensation ensures there is no degradation of laser modes when passing through the gain medium. An optical power amplifier that incorporates an anisotropic gain medium achieves power scaling with multiple passes while also maintaining good mode matching between the laser and the pump during each pass. Preferred embodiments implement for multiple passes of a seed laser beam through an anisotropic gain medium with substantially zero angular beam displacement during each pass. The multi-pass system provides an economical, reliable method of achieving high TEM00 power to meet the demands of micromachining, via drilling, and harmonic conversion applications.

摘要翻译： 诸如Nd：YVO4，Nd：YLF和Nd：GdVO4的各向异性晶体已成为许多激光应用的优选增益材料。 无辅助补偿的各向异性增益介质确保通过增益介质时激光模式不会降低。 结合各向异性增益介质的光功率放大器实现多次通过的功率缩放，同时在每次通过期间也保持激光器和泵之间的良好模式匹配。 优选实施例实现种子激光束的多遍通过各向异性增益介质，每次通过期间具有基本为零的角度束位移。 多通道系统提供了一种经济可靠的方法，可实现高TEM00功率，以满足微加工，钻孔和谐波转换应用的需求。

公开(公告)号：US07720121B2

公开(公告)日：2010-05-18

申请号：US12058564

申请日：2008-03-28

申请人： Xiaoyuan Peng ,  Wensheng Ren

发明人： Xiaoyuan Peng ,  Wensheng Ren

IPC分类号： H01S5/00

CPC分类号： H01S3/094 ,  H01S3/0606 ,  H01S3/10092 ,  H01S3/1603 ,  H01S3/1671

摘要： High-power, diode-pumped solid state (DPSS) pulsed lasers are preferred for applications such as micromachining, via drilling of integrated circuits, and ultraviolet (UV) conversion. Nd:YVO4 (vanadate) lasers are good candidates for high power applications because they feature a high energy absorption coefficient over a wide bandwidth of pumping wavelengths. However, vanadate has poor thermo-mechanical properties, in that the material is stiff and fractures easily when thermally stressed. By optimizing laser parameters and selecting pumping wavelengths and doping a concentration of the gain medium to control the absorption coefficient less than 2 cm−1 such as the pumping wavelength between about 910 nm and about 920 nm, a doped vanadate laser may be enhanced to produce as much as 100 W of output power without fracturing the crystal material, while delivering a 40% reduction in thermal lensing.

摘要翻译： 大功率，二极管泵浦固态（DPSS）脉冲激光器适用于微加工，通过钻孔集成电路和紫外线（UV）转换等应用。 Nd：YVO4（钒酸盐）激光器是高功率应用的理想选择，因为它们在宽带宽的泵浦波长下具有高能量吸收系数。 然而，钒酸盐具有差的热机械性能，因为当热应力时材料是刚性的并且容易断裂。 通过优化激光参数并选择泵浦波长并掺杂增益介质的浓度以控制小于2cm -1的吸收系数，例如在约910nm和约920nm之间的泵浦波长，可以增强掺杂的钒酸盐激光器以产生 多达100W的输出功率而不会破裂晶体材料，同时减少40％的热透镜。

公开(公告)号：US20090245317A1

公开(公告)日：2009-10-01

申请号：US12058564

申请日：2008-03-28

申请人： Xiaoyuan Peng ,  Wensheng Ren

发明人： Xiaoyuan Peng ,  Wensheng Ren

IPC分类号： H01S3/091

CPC分类号： H01S3/094 ,  H01S3/0606 ,  H01S3/10092 ,  H01S3/1603 ,  H01S3/1671

摘要： High-power, diode-pumped solid state (DPSS) pulsed lasers are preferred for applications such as micromachining, via drilling of integrated circuits, and ultraviolet (UV) conversion. Nd:YVO4 (vanadate) lasers are good candidates for high power applications because they feature a high energy absorption coefficient over a wide bandwidth of pumping wavelengths. However, vanadate has poor thermo-mechanical properties, in that the material is stiff and fractures easily when thermally stressed. By optimizing laser parameters and selecting pumping wavelengths and doping a concentration of the gain medium to control the absorption coefficient less than 2 cm−1 such as the pumping wavelength between about 910 nm and about 920 nm, a doped vanadate laser may be enhanced to produce as much as 100 W of output power without fracturing the crystal material, while delivering a 40% reduction in thermal lensing.

摘要翻译： 大功率，二极管泵浦固态（DPSS）脉冲激光器适用于微加工，通过钻孔集成电路和紫外线（UV）转换等应用。 Nd：YVO4（钒酸盐）激光器是高功率应用的理想选择，因为它们在宽带宽的泵浦波长下具有高能量吸收系数。 然而，钒酸盐具有差的热机械性能，因为当热应力时材料是刚性的并且容易断裂。 通过优化激光参数并选择泵浦波长并掺杂增益介质的浓度以控制小于2cm -1的吸收系数，例如在约910nm和约920nm之间的泵浦波长，可以增强掺杂的钒酸盐激光器以产生 多达100W的输出功率而不会破裂晶体材料，同时减少40％的热透镜。

公开(公告)号：US20090245301A1

公开(公告)日：2009-10-01

申请号：US12057264

申请日：2008-03-27

申请人： Xiaoyuan Peng ,  Brian W. Baird ,  William J. Jordens ,  David Martin Hemenway

发明人： Xiaoyuan Peng ,  Brian W. Baird ,  William J. Jordens ,  David Martin Hemenway

IPC分类号： H01S3/10 ,  H01S3/00

CPC分类号： H01S3/0057 ,  B23K26/0622 ,  G02F1/0327

摘要： Laser pulse shaping techniques produce tailored laser pulse spectral output. The laser pulses can be programmed to have desired pulse widths and pulse shapes (such as sub-nanosecond to 10 ns-20 ns pulse widths with 1 ns to several nanoseconds leading edge rise times). Preferred embodiments are implemented with one or more electro-optical modulators receiving drive signals that selectively change the amount of incident pulsed laser emission to form a tailored pulse output. Triggering the drive signal from the pulsed laser emission suppresses jitter associated with other stages of the link processing system and substantially removes jitter associated with pulsed laser emission build-up time.

摘要翻译： 激光脉冲整形技术产生定制的激光脉冲光谱输出。 激光脉冲可以被编程为具有期望的脉冲宽度和脉冲形状（例如，亚纳秒到10ns-20ns脉冲宽度，1ns至几纳秒前沿上升时间）。 优选实施例是用一个或多个电光调制器来实现的，该电光调制器接收有选择地改变入射脉冲激光发射量的驱动信号以形成定制的脉冲输出。 从脉冲激光发射器触发驱动信号抑制与链路处理系统的其他级相关联的抖动，并且基本上消除与脉冲激光发射建立时间相关联的抖动。

公开(公告)号：US08248688B2

公开(公告)日：2012-08-21

申请号：US12374989

申请日：2007-07-25

申请人： Brian W. Baird ,  David M. Hemenway ,  Xiaoyuan Peng ,  Wensheng Ren

发明人： Brian W. Baird ,  David M. Hemenway ,  Xiaoyuan Peng ,  Wensheng Ren

IPC分类号： H01S4/00 ,  H04B10/17

CPC分类号： H01S3/2316 ,  B23K26/0622 ,  H01S3/0064 ,  H01S3/0085 ,  H01S3/06758 ,  H01S3/09408 ,  H01S3/0941 ,  H01S3/09415 ,  H01S3/10038 ,  H01S3/2333

摘要： Embodiments of laser systems advantageously use pulsed optical fiber-based laser source (12) output, the temporal pulse profile of which may be programmed to assume a range of pulse shapes. Pulsed fiber lasers are subject to peak power limits to prevent an onset of undesirable nonlinear effects; therefore, the laser output power of these devices is subsequently amplified in a diode-pumped solid state photonic power amplifier (DPSS-PA) (16). The DPSS PA provides for amplification of the desirable low peak power output of a pulsed fiber master oscillator power amplifier (14) to much higher peak power levels and thereby also effectively increases the available energy per pulse at a specified pulse repetition frequency. The combination of the pulsed fiber master oscillator power amplifier and the diode-pumped solid state power amplifier is referred to as a tandem solid state photonic amplifier (10).

摘要翻译： 激光系统的实施例有利地使用基于脉冲光纤的激光源（12）输出，其时间脉冲分布可被编程为呈现一定范围的脉冲形状。 脉冲光纤激光器受到峰值功率限制，以防止发生不期望的非线性效应; 因此，这些器件的激光输出功率随后在二极管泵浦固态光子功率放大器（DPSS-PA）（16）中放大。 DPSS PA提供将脉冲光纤主振荡器功率放大器（14）的期望的低峰值功率输出放大到更高的峰值功率电平，从而也可以在指定的脉冲重复频率下有效地增加每个脉冲的可用能量。 脉冲光纤主振荡器功率放大器和二极管泵浦固态功率放大器的组合被称为串联固态光子放大器（10）。

公开(公告)号：US20110298156A1

公开(公告)日：2011-12-08

申请号：US13076810

申请日：2011-03-31

申请人： Andrew Hooper ,  David Barsic ,  Kelly J. Bruland ,  Daragh S. Finn ,  Lynn Sheehan ,  Xiaoyuan Peng ,  Yasu Osako ,  Jim Dumestre ,  William J. Jordens

发明人： Andrew Hooper ,  David Barsic ,  Kelly J. Bruland ,  Daragh S. Finn ,  Lynn Sheehan ,  Xiaoyuan Peng ,  Yasu Osako ,  Jim Dumestre ,  William J. Jordens

IPC分类号： B29C35/08

CPC分类号： H01S3/102 ,  B23K26/0622 ,  B23K26/064 ,  B23K26/389 ,  B23K26/40 ,  B23K26/705 ,  B23K2103/172 ,  B23K2103/50 ,  H01L21/6836 ,  H01L24/27 ,  H01L24/29 ,  H01L24/83 ,  H01L2221/68327 ,  H01L2224/27436 ,  H01L2224/2919 ,  H01L2224/83191 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01023 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01055 ,  H01L2924/01056 ,  H01L2924/0106 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/0665 ,  H01L2924/12043 ,  H01L2924/13091 ,  H01L2924/14 ,  H01S3/0057 ,  H01S3/1305 ,  H01L2924/00 ,  H01L2924/3512

摘要： Tailored laser pulse shapes are used for processing workpieces. Laser dicing of semiconductor device wafers on die-attach film (DAF), for example, may use different tailored laser pulse shapes for scribing device layers down to a semiconductor substrate, dicing the semiconductor substrate, cutting the underlying DAF, and/or post processing of the upper die edges to increase die break strength. Different mono-shape laser pulse trains may be used for respective recipe steps or passes of a laser beam over a scribe line. In another embodiment, scribing a semiconductor device wafer includes only a single pass of a laser beam along a scribe line using a mixed-shape laser pulse train that includes at least two laser pulses that are different than one another. In addition, or in other embodiments, one or more tailored pulse shapes may be selected and provided to the workpiece on-the-fly. The selection may be based on sensor feedback.

摘要翻译： 定制的激光脉冲形状用于加工工件。 例如，半导体器件晶片在芯片附着膜（DAF）上的激光切割可以使用不同的定制的激光脉冲形状，用于将器件层划分到半导体衬底，切割半导体衬底，切割下面的DAF和/或后处理 的上模边缘以增加冲模强度。 不同的单形激光脉冲序列可以用于激光束在划线上的相应配方步骤或通过。 在另一个实施例中，划线半导体器件晶片仅使用包括彼此不同的至少两个激光脉冲的混合形激光脉冲串沿着划线的激光束的单次通过。 另外，或者在其他实施例中，可以选择一个或多个定制的脉冲形状并将其提供给工件。 选择可以基于传感器反馈。

公开(公告)号：US20090245304A1

公开(公告)日：2009-10-01

申请号：US12059955

申请日：2008-03-31

申请人： Xiaoyuan Peng ,  Wensheng Ren

发明人： Xiaoyuan Peng ,  Wensheng Ren

IPC分类号： H01S3/13

CPC分类号： H01S3/2333 ,  H01S3/005 ,  H01S3/0064 ,  H01S3/061 ,  H01S3/1603 ,  H01S3/1623 ,  H01S3/163 ,  H01S3/1673 ,  H01S3/2316 ,  H01S3/2341

摘要： Anisotropic crystals such as Nd:YVO4, Nd:YLF, and Nd:GdVO4 have become preferred gain materials for many laser applications. The anisotropic gain medium without ancillary compensation ensures there is no degradation of laser modes when passing through the gain medium. An optical power amplifier that incorporates an anisotropic gain medium achieves power scaling with multiple passes while also maintaining good mode matching between the laser and the pump during each pass. Preferred embodiments implement for multiple passes of a seed laser beam through an anisotropic gain medium with substantially zero angular beam displacement during each pass. The multi-pass system provides an economical, reliable method of achieving high TEM00 power to meet the demands of micromachining, via drilling, and harmonic conversion applications.

摘要翻译： 诸如Nd：YVO4，Nd：YLF和Nd：GdVO4的各向异性晶体已成为许多激光应用的优选增益材料。 无辅助补偿的各向异性增益介质确保通过增益介质时激光模式不会降低。 结合各向异性增益介质的光功率放大器实现多次通过的功率缩放，同时在每次通过期间也保持激光器和泵之间的良好模式匹配。 优选实施例实现种子激光束的多遍通过各向异性增益介质，每次通过期间具有基本为零的角度束位移。 多通道系统提供了一种经济可靠的方法，可实现高TEM00功率，以满足微加工，钻孔和谐波转换应用的需求。

公开(公告)号：US08598490B2

公开(公告)日：2013-12-03

申请号：US13076810

申请日：2011-03-31

申请人： Andrew Hooper ,  David Barsic ,  Kelly J. Bruland ,  Daragh S. Finn ,  Lynn Sheehan ,  Xiaoyuan Peng ,  Yasu Osako ,  Jim Dumestre ,  William J. Jordens

发明人： Andrew Hooper ,  David Barsic ,  Kelly J. Bruland ,  Daragh S. Finn ,  Lynn Sheehan ,  Xiaoyuan Peng ,  Yasu Osako ,  Jim Dumestre ,  William J. Jordens

IPC分类号： H01L21/78

CPC分类号： H01S3/102 ,  B23K26/0622 ,  B23K26/064 ,  B23K26/389 ,  B23K26/40 ,  B23K26/705 ,  B23K2103/172 ,  B23K2103/50 ,  H01L21/6836 ,  H01L24/27 ,  H01L24/29 ,  H01L24/83 ,  H01L2221/68327 ,  H01L2224/27436 ,  H01L2224/2919 ,  H01L2224/83191 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01023 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01055 ,  H01L2924/01056 ,  H01L2924/0106 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/0665 ,  H01L2924/12043 ,  H01L2924/13091 ,  H01L2924/14 ,  H01S3/0057 ,  H01S3/1305 ,  H01L2924/00 ,  H01L2924/3512

摘要： Tailored laser pulse shapes are used for processing workpieces. Laser dicing of semiconductor device wafers on die-attach film (DAF), for example, may use different tailored laser pulse shapes for scribing device layers down to a semiconductor substrate, dicing the semiconductor substrate, cutting the underlying DAF, and/or post processing of the upper die edges to increase die break strength. Different mono-shape laser pulse trains may be used for respective recipe steps or passes of a laser beam over a scribe line. In another embodiment, scribing a semiconductor device wafer includes only a single pass of a laser beam along a scribe line using a mixed-shape laser pulse train that includes at least two laser pulses that are different than one another. In addition, or in other embodiments, one or more tailored pulse shapes may be selected and provided to the workpiece on-the-fly. The selection may be based on sensor feedback.

摘要翻译： 定制的激光脉冲形状用于加工工件。 例如，半导体器件晶片在芯片附着膜（DAF）上的激光切割可以使用不同的定制的激光脉冲形状，用于将器件层划分到半导体衬底，切割半导体衬底，切割下面的DAF和/或后处理 的上模边缘以增加冲模强度。 不同的单形激光脉冲序列可以用于激光束在划线上的相应配方步骤或通过。 在另一个实施例中，使用包括彼此不同的至少两个激光脉冲的混合形状的激光脉冲串，划线半导体器件晶片仅包括激光束沿着划线的单次通过。 另外，或者在其他实施例中，可以选择一个或多个定制的脉冲形状并将其提供给工件。 选择可以基于传感器反馈。

公开(公告)号：US07813389B2

公开(公告)日：2010-10-12

申请号：US12268203

申请日：2008-11-10

申请人： Xiaoyuan Peng ,  David Barsic ,  William J. Jordens ,  Qi Wang

发明人： Xiaoyuan Peng ,  David Barsic ,  William J. Jordens ,  Qi Wang

IPC分类号： H01S3/30 ,  H01S3/10 ,  H01S3/13

CPC分类号： H01S3/06754 ,  H01S3/2316 ,  H01S3/2383 ,  H01S5/005 ,  H01S5/0092 ,  H01S5/0428 ,  H01S5/12

摘要： A programmable laser pulse combines electrical modulation of the pulse frequency and optical modulation of the pulse shape to form laser pulses of prescribed pulse shapes. A prescribed pulse shape features high peak power and low average power. The laser system disclosed also allows for power-scaling and nonlinear conversions to other (shorter or longer) wavelengths. The system provides an economical reliable alternative to using a laser source with high repetition rates to achieve shaped pulses at a variety of wavelengths. The combinatorial scheme disclosed is inherently more efficient than existing subtractive methods.

摘要翻译： 可编程激光脉冲组合脉冲频率的电调制和脉冲形状的光调制形成规定脉冲形状的激光脉冲。 规定的脉冲形状具有高峰值功率和低平均功率。 所公开的激光系统还允许对其它（更短或更长）波长进行功率缩放和非线性转换。 该系统提供了使用具有高重复率的激光源实现各种波长的成形脉冲的经济可靠的替代方案。 所公开的组合方案固有地比现有的减法方法更有效。