公开(公告)号：US07796671B2

公开(公告)日：2010-09-14

申请号：US12059955

申请日：2008-03-31

申请人： Xiaoyuan Peng ,  Wensheng Ren

发明人： Xiaoyuan Peng ,  Wensheng Ren

IPC分类号： H01S3/09

CPC分类号： H01S3/2333 ,  H01S3/005 ,  H01S3/0064 ,  H01S3/061 ,  H01S3/1603 ,  H01S3/1623 ,  H01S3/163 ,  H01S3/1673 ,  H01S3/2316 ,  H01S3/2341

摘要： Anisotropic crystals such as Nd:YVO4, Nd:YLF, and Nd:GdVO4 have become preferred gain materials for many laser applications. The anisotropic gain medium without ancillary compensation ensures there is no degradation of laser modes when passing through the gain medium. An optical power amplifier that incorporates an anisotropic gain medium achieves power scaling with multiple passes while also maintaining good mode matching between the laser and the pump during each pass. Preferred embodiments implement for multiple passes of a seed laser beam through an anisotropic gain medium with substantially zero angular beam displacement during each pass. The multi-pass system provides an economical, reliable method of achieving high TEM00 power to meet the demands of micromachining, via drilling, and harmonic conversion applications.

摘要翻译： 诸如Nd：YVO4，Nd：YLF和Nd：GdVO4的各向异性晶体已成为许多激光应用的优选增益材料。 无辅助补偿的各向异性增益介质确保通过增益介质时激光模式不会降低。 结合各向异性增益介质的光功率放大器实现多次通过的功率缩放，同时在每次通过期间也保持激光器和泵之间的良好模式匹配。 优选实施例实现种子激光束的多遍通过各向异性增益介质，每次通过期间具有基本为零的角度束位移。 多通道系统提供了一种经济可靠的方法，可实现高TEM00功率，以满足微加工，钻孔和谐波转换应用的需求。

公开(公告)号：US20100189145A1

公开(公告)日：2010-07-29

申请号：US12752994

申请日：2010-04-01

申请人： Xiaoyuan Peng ,  Wensheng Ren

发明人： Xiaoyuan Peng ,  Wensheng Ren

IPC分类号： H01S3/14

CPC分类号： H01S3/094 ,  H01S3/0606 ,  H01S3/10092 ,  H01S3/1603 ,  H01S3/1671

摘要： High-power, diode-pumped solid state (DPSS) pulsed lasers are preferred for applications such as micromachining, via drilling of integrated circuits, and ultraviolet (UV) conversion. Nd:YVO4 (vanadate) lasers are good candidates for high power applications because they feature a high energy absorption coefficient over a wide bandwidth of pumping wavelengths. However, vanadate has poor thermo-mechanical properties, in that the material is stiff and fractures easily when thermally stressed. By optimizing laser parameters and selecting pumping wavelengths and doping a concentration of the gain medium to control the absorption coefficient less than 2 cm−1 such as the pumping wavelength between about 910 nm and about 920 nm, a doped vanadate laser may be enhanced to produce as much as 100 W of output power without fracturing the crystal material, while delivering a 40% reduction in thermal lensing.

摘要翻译： 大功率，二极管泵浦固态（DPSS）脉冲激光器适用于微加工，通过钻孔集成电路和紫外线（UV）转换等应用。 Nd：YVO4（钒酸盐）激光器是高功率应用的理想选择，因为它们在宽带宽的泵浦波长下具有高能量吸收系数。 然而，钒酸盐具有差的热机械性能，因为当热应力时材料是刚性的并且容易断裂。 通过优化激光参数并选择泵浦波长并掺杂增益介质的浓度以控制小于2cm -1的吸收系数，例如在约910nm和约920nm之间的泵浦波长，可以增强掺杂的钒酸盐激光器以产生 多达100W的输出功率而不会破裂晶体材料，同时减少40％的热透镜。

公开(公告)号：US08248688B2

公开(公告)日：2012-08-21

申请号：US12374989

申请日：2007-07-25

申请人： Brian W. Baird ,  David M. Hemenway ,  Xiaoyuan Peng ,  Wensheng Ren

发明人： Brian W. Baird ,  David M. Hemenway ,  Xiaoyuan Peng ,  Wensheng Ren

IPC分类号： H01S4/00 ,  H04B10/17

CPC分类号： H01S3/2316 ,  B23K26/0622 ,  H01S3/0064 ,  H01S3/0085 ,  H01S3/06758 ,  H01S3/09408 ,  H01S3/0941 ,  H01S3/09415 ,  H01S3/10038 ,  H01S3/2333

摘要： Embodiments of laser systems advantageously use pulsed optical fiber-based laser source (12) output, the temporal pulse profile of which may be programmed to assume a range of pulse shapes. Pulsed fiber lasers are subject to peak power limits to prevent an onset of undesirable nonlinear effects; therefore, the laser output power of these devices is subsequently amplified in a diode-pumped solid state photonic power amplifier (DPSS-PA) (16). The DPSS PA provides for amplification of the desirable low peak power output of a pulsed fiber master oscillator power amplifier (14) to much higher peak power levels and thereby also effectively increases the available energy per pulse at a specified pulse repetition frequency. The combination of the pulsed fiber master oscillator power amplifier and the diode-pumped solid state power amplifier is referred to as a tandem solid state photonic amplifier (10).

摘要翻译： 激光系统的实施例有利地使用基于脉冲光纤的激光源（12）输出，其时间脉冲分布可被编程为呈现一定范围的脉冲形状。 脉冲光纤激光器受到峰值功率限制，以防止发生不期望的非线性效应; 因此，这些器件的激光输出功率随后在二极管泵浦固态光子功率放大器（DPSS-PA）（16）中放大。 DPSS PA提供将脉冲光纤主振荡器功率放大器（14）的期望的低峰值功率输出放大到更高的峰值功率电平，从而也可以在指定的脉冲重复频率下有效地增加每个脉冲的可用能量。 脉冲光纤主振荡器功率放大器和二极管泵浦固态功率放大器的组合被称为串联固态光子放大器（10）。

公开(公告)号：US20090245304A1

公开(公告)日：2009-10-01

申请号：US12059955

申请日：2008-03-31

申请人： Xiaoyuan Peng ,  Wensheng Ren

发明人： Xiaoyuan Peng ,  Wensheng Ren

IPC分类号： H01S3/13

CPC分类号： H01S3/2333 ,  H01S3/005 ,  H01S3/0064 ,  H01S3/061 ,  H01S3/1603 ,  H01S3/1623 ,  H01S3/163 ,  H01S3/1673 ,  H01S3/2316 ,  H01S3/2341

摘要： Anisotropic crystals such as Nd:YVO4, Nd:YLF, and Nd:GdVO4 have become preferred gain materials for many laser applications. The anisotropic gain medium without ancillary compensation ensures there is no degradation of laser modes when passing through the gain medium. An optical power amplifier that incorporates an anisotropic gain medium achieves power scaling with multiple passes while also maintaining good mode matching between the laser and the pump during each pass. Preferred embodiments implement for multiple passes of a seed laser beam through an anisotropic gain medium with substantially zero angular beam displacement during each pass. The multi-pass system provides an economical, reliable method of achieving high TEM00 power to meet the demands of micromachining, via drilling, and harmonic conversion applications.

摘要翻译： 诸如Nd：YVO4，Nd：YLF和Nd：GdVO4的各向异性晶体已成为许多激光应用的优选增益材料。 无辅助补偿的各向异性增益介质确保通过增益介质时激光模式不会降低。 结合各向异性增益介质的光功率放大器实现多次通过的功率缩放，同时在每次通过期间也保持激光器和泵之间的良好模式匹配。 优选实施例实现种子激光束的多遍通过各向异性增益介质，每次通过期间具有基本为零的角度束位移。 多通道系统提供了一种经济可靠的方法，可实现高TEM00功率，以满足微加工，钻孔和谐波转换应用的需求。

公开(公告)号：US07720121B2

公开(公告)日：2010-05-18

申请号：US12058564

申请日：2008-03-28

申请人： Xiaoyuan Peng ,  Wensheng Ren

发明人： Xiaoyuan Peng ,  Wensheng Ren

IPC分类号： H01S5/00

CPC分类号： H01S3/094 ,  H01S3/0606 ,  H01S3/10092 ,  H01S3/1603 ,  H01S3/1671

摘要： High-power, diode-pumped solid state (DPSS) pulsed lasers are preferred for applications such as micromachining, via drilling of integrated circuits, and ultraviolet (UV) conversion. Nd:YVO4 (vanadate) lasers are good candidates for high power applications because they feature a high energy absorption coefficient over a wide bandwidth of pumping wavelengths. However, vanadate has poor thermo-mechanical properties, in that the material is stiff and fractures easily when thermally stressed. By optimizing laser parameters and selecting pumping wavelengths and doping a concentration of the gain medium to control the absorption coefficient less than 2 cm−1 such as the pumping wavelength between about 910 nm and about 920 nm, a doped vanadate laser may be enhanced to produce as much as 100 W of output power without fracturing the crystal material, while delivering a 40% reduction in thermal lensing.

摘要翻译： 大功率，二极管泵浦固态（DPSS）脉冲激光器适用于微加工，通过钻孔集成电路和紫外线（UV）转换等应用。 Nd：YVO4（钒酸盐）激光器是高功率应用的理想选择，因为它们在宽带宽的泵浦波长下具有高能量吸收系数。 然而，钒酸盐具有差的热机械性能，因为当热应力时材料是刚性的并且容易断裂。 通过优化激光参数并选择泵浦波长并掺杂增益介质的浓度以控制小于2cm -1的吸收系数，例如在约910nm和约920nm之间的泵浦波长，可以增强掺杂的钒酸盐激光器以产生 多达100W的输出功率而不会破裂晶体材料，同时减少40％的热透镜。

公开(公告)号：US20090245317A1

公开(公告)日：2009-10-01

申请号：US12058564

申请日：2008-03-28

申请人： Xiaoyuan Peng ,  Wensheng Ren

发明人： Xiaoyuan Peng ,  Wensheng Ren

IPC分类号： H01S3/091

CPC分类号： H01S3/094 ,  H01S3/0606 ,  H01S3/10092 ,  H01S3/1603 ,  H01S3/1671

摘要： High-power, diode-pumped solid state (DPSS) pulsed lasers are preferred for applications such as micromachining, via drilling of integrated circuits, and ultraviolet (UV) conversion. Nd:YVO4 (vanadate) lasers are good candidates for high power applications because they feature a high energy absorption coefficient over a wide bandwidth of pumping wavelengths. However, vanadate has poor thermo-mechanical properties, in that the material is stiff and fractures easily when thermally stressed. By optimizing laser parameters and selecting pumping wavelengths and doping a concentration of the gain medium to control the absorption coefficient less than 2 cm−1 such as the pumping wavelength between about 910 nm and about 920 nm, a doped vanadate laser may be enhanced to produce as much as 100 W of output power without fracturing the crystal material, while delivering a 40% reduction in thermal lensing.

摘要翻译： 大功率，二极管泵浦固态（DPSS）脉冲激光器适用于微加工，通过钻孔集成电路和紫外线（UV）转换等应用。 Nd：YVO4（钒酸盐）激光器是高功率应用的理想选择，因为它们在宽带宽的泵浦波长下具有高能量吸收系数。 然而，钒酸盐具有差的热机械性能，因为当热应力时材料是刚性的并且容易断裂。 通过优化激光参数并选择泵浦波长并掺杂增益介质的浓度以控制小于2cm -1的吸收系数，例如在约910nm和约920nm之间的泵浦波长，可以增强掺杂的钒酸盐激光器以产生 多达100W的输出功率而不会破裂晶体材料，同时减少40％的热透镜。

公开(公告)号：US20120092755A1

公开(公告)日：2012-04-19

申请号：US12374989

申请日：2007-07-25

申请人： Brian W. Baird ,  David M. Hemenway ,  Xiaoyuan Peng ,  Wensheng Ren

发明人： Brian W. Baird ,  David M. Hemenway ,  Xiaoyuan Peng ,  Wensheng Ren

IPC分类号： G02F1/365 ,  B23K26/00 ,  H01S3/091 ,  H01S3/10 ,  H01S3/067

CPC分类号： H01S3/2316 ,  B23K26/0622 ,  H01S3/0064 ,  H01S3/0085 ,  H01S3/06758 ,  H01S3/09408 ,  H01S3/0941 ,  H01S3/09415 ,  H01S3/10038 ,  H01S3/2333

摘要： Embodiments of laser systems advantageously use pulsed optical fiber-based laser source (12) output, the temporal pulse profile of which may be programmed to assume a range of pulse shapes. Pulsed fiber lasers are subject to peak power limits to prevent an onset of undesirable nonlinear effects; therefore, the laser output power of these devices is subsequently amplified in a diode-pumped solid state photonic power amplifier (DPSS-PA) (16). The DPSS PA provides for amplification of the desirable low peak power output of a pulsed fiber master oscillator power amplifier (14) to much higher peak power levels and thereby also effectively increases the available energy per pulse at a specified pulse repetition frequency. The combination of the pulsed fiber master oscillator power amplifier and the diode-pumped solid state power amplifier is referred to as a tandem solid state photonic amplifier (10).

摘要翻译： 激光系统的实施例有利地使用基于脉冲光纤的激光源（12）输出，其时间脉冲分布可被编程为呈现一定范围的脉冲形状。 脉冲光纤激光器受到峰值功率限制，以防止发生不期望的非线性效应; 因此，这些器件的激光输出功率随后在二极管泵浦固态光子功率放大器（DPSS-PA）（16）中放大。 DPSS PA提供将脉冲光纤主振荡器功率放大器（14）的期望的低峰值功率输出放大到更高的峰值功率电平，从而也可以在指定的脉冲重复频率下有效地增加每个脉冲的可用能量。 脉冲光纤主振荡器功率放大器和二极管泵浦固态功率放大器的组合被称为串联固态光子放大器（10）。

公开(公告)号：US07813394B2

公开(公告)日：2010-10-12

申请号：US12752994

申请日：2010-04-01

申请人： Xiaoyuan Peng ,  Wensheng Ren

发明人： Xiaoyuan Peng ,  Wensheng Ren

IPC分类号： H01S3/14

CPC分类号： H01S3/094 ,  H01S3/0606 ,  H01S3/10092 ,  H01S3/1603 ,  H01S3/1671

摘要： High-power, diode-pumped solid state (DPSS) pulsed lasers are preferred for applications such as micromachining, via drilling of integrated circuits, and ultraviolet (UV) conversion. Nd:YVO4 (vanadate) lasers are good candidates for high power applications because they feature a high energy absorption coefficient over a wide bandwidth of pumping wavelengths. However, vanadate has poor thermo-mechanical properties, in that the material is stiff and fractures easily when thermally stressed. By optimizing laser parameters and selecting pumping wavelengths and doping a concentration of the gain medium to control the absorption coefficient less than 2 cm−1 such as the pumping wavelength between about 910 nm and about 920 nm, a doped vanadate laser may be enhanced to produce as much as 100 W of output power without fracturing the crystal material, while delivering a 40% reduction in thermal lensing.

摘要翻译： 大功率，二极管泵浦固态（DPSS）脉冲激光器适用于微加工，通过钻孔集成电路和紫外线（UV）转换等应用。 Nd：YVO4（钒酸盐）激光器是高功率应用的理想选择，因为它们在宽带宽的泵浦波长下具有高能量吸收系数。 然而，钒酸盐具有差的热机械性能，因为当热应力时材料是刚性的并且容易断裂。 通过优化激光参数并选择泵浦波长并掺杂增益介质的浓度以控制小于2cm -1的吸收系数，例如在约910nm和约920nm之间的泵浦波长，可以增强掺杂的钒酸盐激光器以产生 多达100W的输出功率而不会破裂晶体材料，同时减少40％的热透镜。

公开(公告)号：US20130178011A1

公开(公告)日：2013-07-11

申请号：US13598170

申请日：2012-08-29

申请人： David S. Ginley ,  Calvin J. Curtis ,  Marinus Franciscus Antonius Maria van Hest ,  Heather A. S. Platt ,  Alexander Miedaner ,  David E. Carlson ,  Murry S. Bennett ,  Wensheng Ren

发明人： David S. Ginley ,  Calvin J. Curtis ,  Marinus Franciscus Antonius Maria van Hest ,  Heather A. S. Platt ,  Alexander Miedaner ,  David E. Carlson ,  Murry S. Bennett ,  Wensheng Ren

IPC分类号： H01L31/18

CPC分类号： H01L31/18 ,  H01L21/2225 ,  H01L21/228 ,  H01L21/268 ,  H01L31/0682 ,  H01L31/1804 ,  H01L31/1864 ,  Y02E10/547 ,  Y02P70/521

摘要： Dopant compositions comprising a semiconductor material are described. Examples of dopant compositions comprise a particulate dopant component and a liquid or paste component, or comprise a dopant component and a particulate silicon component. Methods of forming doped regions in a semiconductor substrate material using the dopant compositions are described. A dopant composition including a dopant particulate component is described as a dopant source in a method for the formation of radiation-fired or radiation-doped contacts, for example in the formation of laser-fired or laser-doped contacts. Examples of the method find application in relation to the manufacture of photovoltaic cells. The use of doped particulate material, for example a composition including doped silicon powder, may reduce the likelihood of damage to the substrate.

摘要翻译： 描述了包含半导体材料的掺杂剂组合物。 掺杂剂组合物的实例包括颗粒状掺杂剂组分和液体或糊状组分，或包含掺杂剂组分和颗粒状硅组分。 描述了使用掺杂剂组合物在半导体衬底材料中形成掺杂区域的方法。 在用于形成辐射燃烧或辐射掺杂的触点的方法中，例如在激光烧制或激光掺杂触点的形成中，包括掺杂剂颗粒组分的掺杂剂组合物被描述为掺杂剂源。 该方法的实例涉及与光伏电池的制造有关的应用。 使用掺杂的颗粒材料，例如包括掺杂硅粉末的组合物，可能降低对基材的损伤的可能性。