公开(公告)号：US20190292653A1

公开(公告)日：2019-09-26

申请号：US16302593

申请日：2016-05-18

Applicant: Stefan BANGERT ,  Oliver HEIMEL ,  Dieter HAAS ,  Tommaso VERCESI ,  Applied Materials, Inc.

Inventor： Stefan BANGERT ,  Oliver HEIMEL ,  Dieter HAAS ,  Tommaso VERCESI

IPC: C23C14/24 ,  C23C14/12 ,  C23C14/56

Abstract: An apparatus for contactless transportation of a deposition source is provided. The apparatus includes a deposition source assembly. The deposition source assembly includes the deposition source. The deposition source assembly includes a first active magnetic unit. The apparatus includes a guiding structure extending in a source transportation direction. The deposition source assembly is movable along the guiding structure. The first active magnetic unit and the guiding structure are configured for providing a first magnetic levitation force for levitating the deposition source assembly.

公开(公告)号：US20120219725A1

公开(公告)日：2012-08-30

申请号：US13394126

申请日：2010-09-02

Applicant: Andrea Baccini ,  Giorgio Cellere ,  Luigi De Santi ,  Marco Galiazzo ,  Gianfranco Pasqualin ,  Tommaso Vercesi

Inventor： Andrea Baccini ,  Giorgio Cellere ,  Luigi De Santi ,  Marco Galiazzo ,  Gianfranco Pasqualin ,  Tommaso Vercesi

IPC: B05D5/00 ,  B05C9/12 ,  B05D3/06 ,  B05D3/00 ,  B05D3/02 ,  B05C11/00 ,  B05C9/14

CPC classification number: H01L21/67225 ,  B41F15/0863 ,  B41F15/26 ,  B41F33/0081 ,  H01L21/67173 ,  H01L21/6723

Abstract: An apparatus for processing a substrate includes an inspection system disposed in a first position to detect the location and orientation of the substrate supported on a supporting surface of a processing nest positioned in the first position and one or more processing heads disposed in the second and third positions and configured to perform a first and a second process on the substrate when the processing nest is moved to the second and third positions by an actuator assembly. A method for processing a substrate includes detecting the location and orientation of the substrate disposed on the processing nest which is positioned in the first position and aligning one or more processing heads to the substrate when the processing nest is positioned in the second and third positions and under the processing heads using data detected by an inspection system positioned in the first position.

Abstract translation: 一种用于处理衬底的设备包括检查系统，该检查系统设置在第一位置以检测支撑在位于第一位置的处理套筒的支撑表面上的衬底的位置和取向以及设置在第二和第三位置中的一个或多个处理头 位置并且被配置为当通过致动器组件将处理嵌套移动到第二和第三位置时在基板上执行第一和第二处理。 一种用于处理衬底的方法包括：检测设置在处理套筒上的衬底的位置和取向，位于第一位置，并且当处理嵌套位于第二和第三位置时将一个或多个处理头对准衬底，以及 在处理头下方使用由位于第一位置的检查系统检测到的数据。

公开(公告)号：US08215473B2

公开(公告)日：2012-07-10

申请号：US12418912

申请日：2009-04-06

Applicant: Andrea Baccini ,  Marco Galiazzo ,  Daniele Andreola ,  Luigi De Santi ,  Christian Zorzi ,  Tommaso Vercesi

Inventor： Andrea Baccini ,  Marco Galiazzo ,  Daniele Andreola ,  Luigi De Santi ,  Christian Zorzi ,  Tommaso Vercesi

IPC: B65G1/06

CPC classification number: H01L21/67715 ,  H01L21/67721 ,  H01L21/67748 ,  H01L21/68764 ,  H01L21/68771

Abstract: Embodiments of the present invention provide an apparatus and method for processing substrates using a multiple screen printing chamber processing system that has an increased system throughput, improved system uptime, and improved device yield performance, while maintaining a repeatable and accurate screen printing process on the processed substrates. In one embodiment, the multiple screen printing chamber processing system is adapted to perform a screen printing process within a portion of a crystalline silicon solar cell production line in which a substrate is patterned with a desired material, and then processed in one or more subsequent processing chambers.

Abstract translation: 本发明的实施例提供了一种使用多丝网印刷室处理系统处理基板的装置和方法，该处理系统具有增加的系统吞吐量，改进的系统正常运行时间和提高的装置产量性能，同时在处理过的维持一个可重复和精确的丝网印刷过程 底物。 在一个实施例中，多丝网印刷室处理系统适于在晶体硅太阳能电池生产线的一部分内执行丝网印刷工艺，其中基板被所需材料图案化，然后在一个或多个后续处理中进行处理 房间。

公开(公告)号：US20120225518A1

公开(公告)日：2012-09-06

申请号：US13394130

申请日：2010-09-02

Applicant: Luigi De Santi ,  Andrea Baccini ,  Giorgio Cellere ,  Marco Galiazzo ,  Gianfranco Pasqualin ,  Tommaso Vercesi

Inventor： Luigi De Santi ,  Andrea Baccini ,  Giorgio Cellere ,  Marco Galiazzo ,  Gianfranco Pasqualin ,  Tommaso Vercesi

IPC: H01L31/18 ,  B05D5/12 ,  B05C11/00 ,  B05D5/00

CPC classification number: H01L21/67736 ,  B41P2215/11 ,  H01L21/681 ,  H01L31/1876 ,  H05K1/0269 ,  H05K3/0008 ,  H05K3/1216 ,  H05K3/1241 ,  H05K2203/163 ,  Y02E10/50 ,  Y02P70/521

Abstract: A method of detecting the alignment of a substrate during a sequence of printing steps, comprises detecting in a detection unit a position of at least one printing track that forms a printed pattern onto a surface of the substrate in a first printing station, determining a reference point in at least a portion of the printing track, comparing the actual position of the reference point with an expected or previously detected position of the reference point, determining an offset between the actual position and the expected or previously detected position of the reference point, adjusting the reciprocal position between the printing head of a second printing station and the substrate to account for the determined offset, and then printing a second pattern over the first pattern.

Abstract translation: 一种在打印步骤序列期间检测基板的对准的方法包括在检测单元中检测在第一印刷站中形成印刷图案的至少一个印刷轨迹的位置到基板的表面上，确定参考 指向所述打印轨道的至少一部分，将所述参考点的实际位置与所述参考点的预期或先前检测到的位置进行比较，确定所述实际位置与所述参考点的预期或预先检测到的位置之间的偏移， 调整第二印刷台的打印头和基板之间的往复位置以考虑确定的偏移，然后在第一图案上印刷第二图案。

公开(公告)号：US20090305441A1

公开(公告)日：2009-12-10

申请号：US12418912

申请日：2009-04-06

Applicant: Andrea BACCINI ,  Marco GALIAZZO ,  Daniele ANDREOLA ,  Luigi DE SANTI ,  Christian ZORZI ,  Tommaso VERCESI

Inventor： Andrea BACCINI ,  Marco GALIAZZO ,  Daniele ANDREOLA ,  Luigi DE SANTI ,  Christian ZORZI ,  Tommaso VERCESI

IPC: H01L21/66 ,  B05C1/00 ,  B05C11/00 ,  H01L21/31

CPC classification number: H01L21/67715 ,  H01L21/67721 ,  H01L21/67748 ,  H01L21/68764 ,  H01L21/68771

Abstract: Embodiments of the present invention provide an apparatus and method for processing substrates using a multiple screen printing chamber processing system that has an increased system throughput, improved system uptime, and improved device yield performance, while maintaining a repeatable and accurate screen printing process on the processed substrates. In one embodiment, the multiple screen printing chamber processing system is adapted to perform a screen printing process within a portion of a crystalline silicon solar cell production line in which a substrate is patterned with a desired material, and then processed in one or more subsequent processing chambers.

Abstract translation: 本发明的实施例提供了一种使用多丝网印刷室处理系统处理基板的装置和方法，该处理系统具有增加的系统吞吐量，改进的系统正常运行时间和提高的装置产量性能，同时在处理过的维持一个可重复和精确的丝网印刷过程 底物。 在一个实施例中，多丝网印刷室处理系统适于在晶体硅太阳能电池生产线的一部分内执行丝网印刷工艺，其中基板被所需材料图案化，然后在一个或多个后续处理中进行处理 房间。

公开(公告)号：US08748319B2

公开(公告)日：2014-06-10

申请号：US13394124

申请日：2010-09-02

Applicant: Marco Galiazzo ,  Andrea Baccini ,  Giorgio Cellere ,  Luigi De Santi ,  Gianfranco Pasqualin ,  Tommaso Vercesi

Inventor： Marco Galiazzo ,  Andrea Baccini ,  Giorgio Cellere ,  Luigi De Santi ,  Gianfranco Pasqualin ,  Tommaso Vercesi

IPC: H01L21/311

CPC classification number: H05K3/12 ,  H01L31/022425 ,  H01L31/1876 ,  H05K1/0269 ,  H05K3/0008 ,  H05K3/245 ,  H05K2203/1476 ,  H05K2203/163 ,  Y02E10/50 ,  Y02P70/521

Abstract: Embodiments of the invention may provide a method of printing one or more print tracks on a print support, or substrate, comprising two or more printing steps in each of which a layer of material is deposited on the print support according to a predetermined print profile. In each printing step, subsequent to the first step, each layer of material is deposited at least partially on top of the layer of material printed in the preceding printing step, so that each layer of printed material has an identical or different print profile with respect to at least a layer of material underneath. The method may further comprise depositing material in each printing step that is equivalent to or different from the material deposited in at least one of other the print layers.

Abstract translation: 本发明的实施例可以提供一种在打印支撑件或基板上印刷一个或多个打印轨迹的方法，其包括两个或更多个印刷步骤，根据预定的打印轮廓，每个打印步骤中的一层材料沉积在打印支撑件上。 在每个印刷步骤中，在第一步骤之后，每一层材料至少部分沉积在印刷在先前印刷步骤中的材料层的顶部上，使得每层印刷材料具有相同或不同的印刷图形， 至少一层材料在下面。 该方法还可以包括在每个印刷步骤中沉积与沉积在其它印刷层中的至少一个中的材料相当或不同的材料。

公开(公告)号：US20120225188A1

公开(公告)日：2012-09-06

申请号：US13394125

申请日：2010-09-02

Applicant: Marco Galiazzo ,  Andrea Baccini ,  Giorgio Cellere ,  Luigi De Santi ,  Gianfranco Pasqualin ,  Tommaso Vercesi

Inventor： Marco Galiazzo ,  Andrea Baccini ,  Giorgio Cellere ,  Luigi De Santi ,  Gianfranco Pasqualin ,  Tommaso Vercesi

IPC: B05D5/00 ,  B05C11/00 ,  B05D1/36

CPC classification number: H01L31/18 ,  B41M3/008 ,  H05K1/0269 ,  H05K3/0008 ,  H05K3/12 ,  H05K2203/1476 ,  H05K2203/163 ,  H05K2203/166

Abstract: A method for multi-layer printing on a support, comprising a first printing step performed in a printing station in a system, one or more subsequent printing steps that are performed in one or more subsequent printing stations in the system and a plurality of alignment steps performed in the system, wherein the alignment steps are used to effect the correct positioning of a material printed in a subsequent printing step. The method comprises, downstream of each printing step and upstream of each alignment step, a control step in which detection devices detect the position of a layer printed on a support and/or the position of the support in the system by use of a control unit that compares at least one of the positions detected with predefined positions and/or with the positions detected in the previous control step, and wherein the results of the comparison are used in the alignment step.

Abstract translation: 一种用于在支撑体上进行多层印刷的方法，包括在系统中的印刷台中执行的第一印刷步骤，在所述系统中的一个或多个后续印刷台中执行的一个或多个后续印刷步骤以及多个对准步骤 在系统中执行，其中使用对准步骤来实现在随后的打印步骤中印刷的材料的正确定位。 该方法包括在每个打印步骤的下游和每个对准步骤的上游的控制步骤，其中检测装置通过使用控制单元检测印刷在支撑体上的层的位置和/或支撑体在系统中的位置 其将检测到的位置中的至少一个与预定位置和/或与先前控制步骤中检测到的位置进行比较，并且其中比较结果用于对准步骤。

公开(公告)号：US20120223046A1

公开(公告)日：2012-09-06

申请号：US13394124

申请日：2010-09-02

Applicant: Marco Galiazzo ,  Andrea Baccini ,  Giorgio Cellere ,  Luigi De Santi ,  Gianfranco Pasqualin ,  Tommaso Vercesi

Inventor： Marco Galiazzo ,  Andrea Baccini ,  Giorgio Cellere ,  Luigi De Santi ,  Gianfranco Pasqualin ,  Tommaso Vercesi

IPC: H05K3/12 ,  H05K3/22

CPC classification number: H05K3/12 ,  H01L31/022425 ,  H01L31/1876 ,  H05K1/0269 ,  H05K3/0008 ,  H05K3/245 ,  H05K2203/1476 ,  H05K2203/163 ,  Y02E10/50 ,  Y02P70/521

Abstract: Embodiments of the invention may provide a method of printing one or more print tracks on a print support, or substrate, comprising two or more printing steps in each of which a layer of material is deposited on the print support according to a predetermined print profile. In each printing step, subsequent to the first step, each layer of material is deposited at least partially on top of the layer of material printed in the preceding printing step, so that each layer of printed material has an identical or different print profile with respect to at least a layer of material underneath. The method may further comprise depositing material in each printing step that is equivalent to or different from the material deposited in at least one of other the print layers.

Abstract translation: 本发明的实施例可以提供一种在打印支撑件或基板上印刷一个或多个打印轨迹的方法，其包括两个或更多个印刷步骤，根据预定的打印轮廓，每个打印步骤中的一层材料沉积在打印支撑件上。 在每个印刷步骤中，在第一步骤之后，每一层材料至少部分沉积在印刷在先前印刷步骤中的材料层的顶部上，使得每层印刷材料具有相同或不同的印刷图形， 至少一层材料在下面。 该方法还可以包括在每个印刷步骤中沉积与沉积在其它印刷层中的至少一个中的材料相当或不同的材料。

公开(公告)号：US20120216694A1

公开(公告)日：2012-08-30

申请号：US13394134

申请日：2010-09-02

Applicant: Marco Galiazzo ,  Andrea Baccini ,  Giorgio Cellere ,  Luigi De Santi ,  Gianfranco Pasqualin ,  Tommaso Vercesi

Inventor： Marco Galiazzo ,  Andrea Baccini ,  Giorgio Cellere ,  Luigi De Santi ,  Gianfranco Pasqualin ,  Tommaso Vercesi

IPC: B41F33/00

CPC classification number: H05K1/0269 ,  H01L31/1876 ,  H05K3/12 ,  H05K2201/0969 ,  H05K2201/09727 ,  H05K2201/09918 ,  H05K2203/1476 ,  H05K2203/166 ,  H05K2203/173 ,  Y02E10/50 ,  Y02P70/521

Abstract: A method for depositing a material on a surface of a substrate includes depositing a first print material and a second print material on the surface of the substrate using a printing apparatus, and depositing a marker element on a portion of the substrate surface. The deposited first print material forms a plurality of first print tracks in a pattern and the deposited second print material forms one or more second print tracks on the surface of the substrate. In addition, the second print tracks includes a centering feature, where there is no second print material within the centering feature and at least a portion of the centering feature is disposed on the portion of the surface of the substrate having the marker element. Further, at least a portion of the second print tracks cover at least a portion of the plurality of first print tracks.

Abstract translation: 一种用于在衬底的表面上沉积材料的方法包括：使用印刷设备在衬底的表面上沉积第一印刷材料和第二印刷材料，以及在衬底表面的一部分上沉积标记元件。 沉积的第一印刷材料以图案形成多个第一印刷轨迹，并且沉积的第二印刷材料在基板的表面上形成一个或多个第二印刷轨迹。 此外，第二打印轨迹包括定心特征，其中在定心特征内不存在第二打印材料，并且定心特征的至少一部分设置在具有标记元件的基底表面的部分上。 此外，第二打印轨道的至少一部分覆盖多个第一打印轨道的至少一部分。

公开(公告)号：US20120216691A1

公开(公告)日：2012-08-30

申请号：US13394135

申请日：2009-09-02

Applicant: Gianfranco Pasqualin ,  Andrea Baccini ,  Giorgio Cellere ,  Luigi De Santi ,  Marco Galiazzo ,  Tommaso Vercesi

Inventor： Gianfranco Pasqualin ,  Andrea Baccini ,  Giorgio Cellere ,  Luigi De Santi ,  Marco Galiazzo ,  Tommaso Vercesi

IPC: B05C17/08

CPC classification number: H02K41/0356 ,  B41F15/44 ,  H05K3/1233 ,  H05K2203/0139

Abstract: An apparatus for screen printing a surface of a substrate includes a screen printing net, a print extremity element, and a supporting structure supporting the print extremity element. The supporting structure includes a slider coupled to the print extremity element and adapted to guide the movement of the print extremity element in a first direction, a support frame having a housing that is associated with a portion of the slider so as to allow movement of the slider relative to the support frame, and an actuation member coupled to the slider. The print extremity element urges a print material through the screen printing net onto the surface of the substrate. The actuation member positions the print extremity element relative to the screen printing net in the first direction, and includes magnets disposed within the housing of the support frame, and an electric coil disposed proximate to the magnets.

Abstract translation: 用于丝网印刷基材表面的装置包括丝网印刷网，印刷末端元件和支撑印刷末端元件的支撑结构。 所述支撑结构包括耦合到所述打印末端元件并适于引导所述打印末端元件沿第一方向的移动的滑块，所述滑块具有与滑块的一部分相关联的壳体，以便允许 滑块相对于支撑框架，以及联接到滑块的致动构件。 印刷末端元件通过丝网印刷网将印刷材料推送到基材的表面上。 所述致动构件使所述打印末端元件相对于所述丝网印刷网沿所述第一方向定位，并且包括设置在所述支撑框架的壳体内的磁体和靠近所述磁体设置的电线圈。