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公开(公告)号：US20070069161A1
公开(公告)日：2007-03-29
申请号：US11521074
申请日：2006-09-14
申请人： David Camm , Sergiy Dets , Kevin McDonnell , Greg Stuart , Tilman Thrum , Igor Rudic , Ljubomir Kaludjercic
发明人： David Camm , Sergiy Dets , Kevin McDonnell , Greg Stuart , Tilman Thrum , Igor Rudic , Ljubomir Kaludjercic
IPC分类号： G01J3/10
CPC分类号： F27B17/0025 , H01L21/67115 , H01L21/67248 , H01L22/20
摘要： A first heat-treating method involves monitoring at least one thermal efficiency parameter associated with an irradiance system configured to produce an irradiance flash incident on a surface of a workpiece, and automatically updating control information used by the irradiance system to produce the irradiance flash, in response to the monitoring of the thermal efficiency parameter. A second method involves predicting a heating effect of an irradiance flash to be incident upon a surface of a workpiece, in response to a measurement of a heating parameter of the surface, and pre-adjusting the irradiance flash, in response to the predicted heating effect. A third method involves measuring a temperature of a surface of a workpiece during an initial portion of an irradiance flash incident on the surface, and controlling a power of a remaining portion of the irradiance flash, in response to the temperature.
摘要翻译： 第一热处理方法包括监测与被配置为产生入射在工件表面上的辐照闪光相关联的辐射系统的至少一个热效率参数，并且自动更新由辐照系统使用的控制信息以产生辐照闪光， 响应于热效率参数的监测。 第二种方法包括响应于表面的加热参数的测量以及响应于预测的加热效应来预先调节辐照度闪光来预测辐射闪光的加热效应入射到工件的表面上 。 第三种方法包括测量在入射到表面上的辐照闪光的初始部分期间工件表面的温度，以及响应于温度来控制辐照闪光的剩余部分的功率。
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公开(公告)号：US09482468B2
公开(公告)日：2016-11-01
申请号：US11521074
申请日：2006-09-14
申请人： David Malcolm Camm , Sergiy Dets , Kevin McDonnell , Greg Stuart , Tilman Thrum , Igor Rudic , Ljubomir Kaludjercic
发明人： David Malcolm Camm , Sergiy Dets , Kevin McDonnell , Greg Stuart , Tilman Thrum , Igor Rudic , Ljubomir Kaludjercic
CPC分类号： F27B17/0025 , H01L21/67115 , H01L21/67248 , H01L22/20
摘要： A first heat-treating method involves monitoring at least one thermal efficiency parameter associated with an irradiance system configured to produce an irradiance flash incident on a surface of a workpiece, and automatically updating control information used by the irradiance system to produce the irradiance flash, in response to the monitoring of the thermal efficiency parameter. A second method involves predicting a heating effect of an irradiance flash to be incident upon a surface of a workpiece, in response to a measurement of a heating parameter of the surface, and pre-adjusting the irradiance flash, in response to the predicted heating effect. A third method involves measuring a temperature of a surface of a workpiece during an initial portion of an irradiance flash incident on the surface, and controlling a power of a remaining portion of the irradiance flash, in response to the temperature.
摘要翻译： 第一热处理方法包括监测与被配置为产生入射在工件表面上的辐照闪光相关联的辐射系统的至少一个热效率参数，并且自动更新由辐照系统使用的控制信息以产生辐照闪光， 响应于热效率参数的监测。 第二种方法包括响应于表面的加热参数的测量以及响应于预测的加热效应来预先调节辐照度闪光来预测辐射闪光的加热效应入射到工件的表面上 。 第三种方法包括测量在入射到表面上的辐照闪光的初始部分期间工件表面的温度，以及响应于温度来控制辐照闪光的剩余部分的功率。
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公开(公告)号：US20050179354A1
公开(公告)日：2005-08-18
申请号：US10777995
申请日：2004-02-12
申请人： David Camm , Chee Chin , Rick Doolan , Tony Hewett , Arne Kjorvel , Tony Komasa , Mike Krasnich , Steve McCoy , Joseph Reyers , Igor Rudic , Ludmila Shepelev , Greg Stuart , Tilman Thrum , Alex Viel
发明人： David Camm , Chee Chin , Rick Doolan , Tony Hewett , Arne Kjorvel , Tony Komasa , Mike Krasnich , Steve McCoy , Joseph Reyers , Igor Rudic , Ludmila Shepelev , Greg Stuart , Tilman Thrum , Alex Viel
摘要： An apparatus for producing electromagnetic radiation includes a flow generator configured to generate a flow of liquid along an inside surface of an envelope, first and second electrodes configured to generate an electrical arc within the envelope to produce the electromagnetic radiation, and an exhaust chamber extending outwardly beyond one of the electrodes, configured to accommodate a portion of the flow of liquid. In another aspect, the flow generator is electrically insulated. In another aspect, the electrodes are configured to generate an electrical discharge pulse to produce an irradiance flash, and the apparatus includes a removal device configured to remove particulate contamination from the liquid, the particulate contamination being released during the flash and being different than that released by the electrodes during continuous operation.
摘要翻译： 一种用于产生电磁辐射的装置包括：流动发生器，其被配置成沿着外壳的内表面产生液体流;第一和第二电极，被配置为在外壳内产生电弧以产生电磁辐射;以及排气室向外延伸 超过一个电极，被配置为容纳液体流的一部分。 在另一方面，流动发生器是电绝缘的。 在另一方面，电极被配置为产生放电脉冲以产生辐照闪光，并且该装置包括被配置为从液体中除去微粒污染物的去除装置，微粒污染物在闪光期间被释放并且与释放的不同 通过电极连续运行。
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公开(公告)号：US20100276611A1
公开(公告)日：2010-11-04
申请号：US12835589
申请日：2010-07-13
申请人： David Malcolm Camm , Chee Chin , Rick Doolan , Tony Hewett , Arne Kjorvel , Tony Komasa , Mike Krasnich , Steve McCoy , Joseph Reyers , Igor Rudic , Ludmila Shepelev , Greg Stuart , Tilman Thrum , Alex Viel
发明人： David Malcolm Camm , Chee Chin , Rick Doolan , Tony Hewett , Arne Kjorvel , Tony Komasa , Mike Krasnich , Steve McCoy , Joseph Reyers , Igor Rudic , Ludmila Shepelev , Greg Stuart , Tilman Thrum , Alex Viel
摘要： An apparatus for producing electromagnetic radiation includes a flow generator configured to generate a flow of liquid along an inside surface of an envelope, first and second electrodes configured to generate an electrical arc within the envelope to produce the electromagnetic radiation, and an exhaust chamber extending outwardly beyond one of the electrodes, configured to accommodate a portion of the flow of liquid. In another aspect, the flow generator is electrically insulated. In another aspect, the electrodes are configured to generate an electrical discharge pulse to produce an irradiance flash, and the apparatus includes a removal device configured to remove particulate contamination from the liquid, the particulate contamination being released during the flash and being different than that released by the electrodes during continuous operation.
摘要翻译： 一种用于产生电磁辐射的装置包括：流动发生器，其被配置成沿着外壳的内表面产生液体流;第一和第二电极，被配置为在外壳内产生电弧以产生电磁辐射;以及排气室向外延伸 超过一个电极，被配置为容纳液体流的一部分。 在另一方面，流动发生器是电绝缘的。 在另一方面，电极被配置为产生放电脉冲以产生辐照闪光，并且该装置包括被配置为从液体中除去微粒污染物的去除装置，微粒污染在闪光期间被释放，并且与释放的不同 通过电极连续运行。
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公开(公告)号：US08384274B2
公开(公告)日：2013-02-26
申请号：US12835589
申请日：2010-07-13
申请人： David Malcolm Camm , Chee Chin , Rick Doolan , Tony Hewett , Arne Kjorvel , Tony Komasa , Mike Krasnich , Steve McCoy , Joseph Reyers , Igor Rudic , Ludmila Shepelev , Greg Stuart , Tilman Thrum , Alex Viel
发明人： David Malcolm Camm , Chee Chin , Rick Doolan , Tony Hewett , Arne Kjorvel , Tony Komasa , Mike Krasnich , Steve McCoy , Joseph Reyers , Igor Rudic , Ludmila Shepelev , Greg Stuart , Tilman Thrum , Alex Viel
摘要： An apparatus for producing electromagnetic radiation includes a flow generator configured to generate a flow of liquid along an inside surface of an envelope, first and second electrodes configured to generate an electrical arc within the envelope to produce the electromagnetic radiation, and an exhaust chamber extending outwardly beyond one of the electrodes, configured to accommodate a portion of the flow of liquid. In another aspect, the flow generator is electrically insulated. In another aspect, the electrodes are configured to generate an electrical discharge pulse to produce an irradiance flash, and the apparatus includes a removal device configured to remove particulate contamination from the liquid, the particulate contamination being released during the flash and being different than that released by the electrodes during continuous operation.
摘要翻译： 一种用于产生电磁辐射的装置包括：流动发生器，其被配置成沿着外壳的内表面产生液体流;第一和第二电极，被配置为在外壳内产生电弧以产生电磁辐射;以及排气室向外延伸 超过一个电极，被配置为容纳液体流的一部分。 在另一方面，流动发生器是电绝缘的。 在另一方面，电极被配置为产生放电脉冲以产生辐照闪光，并且该装置包括被配置为从液体中除去微粒污染物的去除装置，微粒污染在闪光期间被释放，并且与释放的不同 通过电极连续运行。
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公开(公告)号：US07781947B2
公开(公告)日：2010-08-24
申请号：US10777995
申请日：2004-02-12
申请人： David Malcolm Camm , Chee Chin , Rick Doolan , Tony Hewett , Arne Kjorvel , Tony Komasa , Mike Krasnich , Steve McCoy , Joseph Reyers , Igor Rudic , Ludmila Shepelev , Greg Stuart , Tilman Thrum , Alex Viel
发明人： David Malcolm Camm , Chee Chin , Rick Doolan , Tony Hewett , Arne Kjorvel , Tony Komasa , Mike Krasnich , Steve McCoy , Joseph Reyers , Igor Rudic , Ludmila Shepelev , Greg Stuart , Tilman Thrum , Alex Viel
摘要： An apparatus for producing electromagnetic radiation includes a flow generator configured to generate a flow of liquid along an inside surface of an envelope, first and second electrodes configured to generate an electrical arc within the envelope to produce the electromagnetic radiation, and an exhaust chamber extending outwardly beyond one of the electrodes, configured to accommodate a portion of the flow of liquid. In another aspect, the flow generator is electrically insulated. In another aspect, the electrodes are configured to generate an electrical discharge pulse to produce an irradiance flash, and the apparatus includes a removal device configured to remove particulate contamination from the liquid, the particulate contamination being released during the flash and being different than that released by the electrodes during continuous operation.
摘要翻译： 一种用于产生电磁辐射的装置包括：流动发生器，其被配置成沿着外壳的内表面产生液体流;第一和第二电极，被配置为在外壳内产生电弧以产生电磁辐射;以及排气室向外延伸 超过一个电极，被配置为容纳液体流的一部分。 在另一方面，流动发生器是电绝缘的。 在另一方面，电极被配置为产生放电脉冲以产生辐照闪光，并且该装置包括被配置为从液体中除去微粒污染物的去除装置，微粒污染在闪光期间被释放，并且与释放的不同 通过电极连续运行。
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