发明授权
- 专利标题: High-intensity electromagnetic radiation apparatus and methods
- 专利标题(中): 高强度电磁辐射装置及方法
-
申请号: US12835589申请日: 2010-07-13
-
公开(公告)号: US08384274B2公开(公告)日: 2013-02-26
- 发明人: David Malcolm Camm , Chee Chin , Rick Doolan , Tony Hewett , Arne Kjorvel , Tony Komasa , Mike Krasnich , Steve McCoy , Joseph Reyers , Igor Rudic , Ludmila Shepelev , Greg Stuart , Tilman Thrum , Alex Viel
- 申请人: David Malcolm Camm , Chee Chin , Rick Doolan , Tony Hewett , Arne Kjorvel , Tony Komasa , Mike Krasnich , Steve McCoy , Joseph Reyers , Igor Rudic , Ludmila Shepelev , Greg Stuart , Tilman Thrum , Alex Viel
- 申请人地址: US CA Freemont
- 专利权人: Mattson Technology, Inc.
- 当前专利权人: Mattson Technology, Inc.
- 当前专利权人地址: US CA Freemont
- 代理机构: Knobbe, Martens, Olson & Bear, LLP
- 主分类号: H01J61/52
- IPC分类号: H01J61/52 ; H01J1/02
摘要:
An apparatus for producing electromagnetic radiation includes a flow generator configured to generate a flow of liquid along an inside surface of an envelope, first and second electrodes configured to generate an electrical arc within the envelope to produce the electromagnetic radiation, and an exhaust chamber extending outwardly beyond one of the electrodes, configured to accommodate a portion of the flow of liquid. In another aspect, the flow generator is electrically insulated. In another aspect, the electrodes are configured to generate an electrical discharge pulse to produce an irradiance flash, and the apparatus includes a removal device configured to remove particulate contamination from the liquid, the particulate contamination being released during the flash and being different than that released by the electrodes during continuous operation.
公开/授权文献
信息查询