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公开(公告)号：US20050179354A1
公开(公告)日：2005-08-18
申请号：US10777995
申请日：2004-02-12
申请人： David Camm , Chee Chin , Rick Doolan , Tony Hewett , Arne Kjorvel , Tony Komasa , Mike Krasnich , Steve McCoy , Joseph Reyers , Igor Rudic , Ludmila Shepelev , Greg Stuart , Tilman Thrum , Alex Viel
发明人： David Camm , Chee Chin , Rick Doolan , Tony Hewett , Arne Kjorvel , Tony Komasa , Mike Krasnich , Steve McCoy , Joseph Reyers , Igor Rudic , Ludmila Shepelev , Greg Stuart , Tilman Thrum , Alex Viel
摘要： An apparatus for producing electromagnetic radiation includes a flow generator configured to generate a flow of liquid along an inside surface of an envelope, first and second electrodes configured to generate an electrical arc within the envelope to produce the electromagnetic radiation, and an exhaust chamber extending outwardly beyond one of the electrodes, configured to accommodate a portion of the flow of liquid. In another aspect, the flow generator is electrically insulated. In another aspect, the electrodes are configured to generate an electrical discharge pulse to produce an irradiance flash, and the apparatus includes a removal device configured to remove particulate contamination from the liquid, the particulate contamination being released during the flash and being different than that released by the electrodes during continuous operation.
摘要翻译： 一种用于产生电磁辐射的装置包括：流动发生器，其被配置成沿着外壳的内表面产生液体流;第一和第二电极，被配置为在外壳内产生电弧以产生电磁辐射;以及排气室向外延伸 超过一个电极，被配置为容纳液体流的一部分。 在另一方面，流动发生器是电绝缘的。 在另一方面，电极被配置为产生放电脉冲以产生辐照闪光，并且该装置包括被配置为从液体中除去微粒污染物的去除装置，微粒污染物在闪光期间被释放并且与释放的不同 通过电极连续运行。
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公开(公告)号：US09627244B2
公开(公告)日：2017-04-18
申请号：US10742575
申请日：2003-12-19
申请人： David Malcolm Camm , Guillaume Sempere , Ljubomir Kaludjercic , Gregory Stuart , Mladen Bumbulovic , Tim Tran , Sergiy Dets , Tony Komasa , Marc Rudolph , Joseph Cibere
发明人： David Malcolm Camm , Guillaume Sempere , Ljubomir Kaludjercic , Gregory Stuart , Mladen Bumbulovic , Tim Tran , Sergiy Dets , Tony Komasa , Marc Rudolph , Joseph Cibere
IPC分类号： H01L21/687
CPC分类号： H01L21/68728 , H01L21/68721 , H01L21/68757
摘要： Apparatuses and methods for supporting a workpiece such as a semiconductor wafer. A support system is configured to support the workpiece while allowing thermally-induced motion of the workpiece, which may include thermal bowing or thermal bending. The system may include a support member having a moveable engagement portion engageable with the workpiece, the engagement portion being moveable to allow the thermally-induced motion of the workpiece while supporting the workpiece. The moveable engagement portion may include a plurality of moveable engagement portions of a plurality of respective support members, which may be resiliently engageable with the workpiece. The support members may include flexible support members each having an unconstrained portion and a constrained portion, and the moveable engagement portions may include the unconstrained portions. Alternatively, the support members may be rigid and the system may include a plurality of force applicators such as springs in communication with the support members.
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公开(公告)号：US08384274B2
公开(公告)日：2013-02-26
申请号：US12835589
申请日：2010-07-13
申请人： David Malcolm Camm , Chee Chin , Rick Doolan , Tony Hewett , Arne Kjorvel , Tony Komasa , Mike Krasnich , Steve McCoy , Joseph Reyers , Igor Rudic , Ludmila Shepelev , Greg Stuart , Tilman Thrum , Alex Viel
发明人： David Malcolm Camm , Chee Chin , Rick Doolan , Tony Hewett , Arne Kjorvel , Tony Komasa , Mike Krasnich , Steve McCoy , Joseph Reyers , Igor Rudic , Ludmila Shepelev , Greg Stuart , Tilman Thrum , Alex Viel
摘要： An apparatus for producing electromagnetic radiation includes a flow generator configured to generate a flow of liquid along an inside surface of an envelope, first and second electrodes configured to generate an electrical arc within the envelope to produce the electromagnetic radiation, and an exhaust chamber extending outwardly beyond one of the electrodes, configured to accommodate a portion of the flow of liquid. In another aspect, the flow generator is electrically insulated. In another aspect, the electrodes are configured to generate an electrical discharge pulse to produce an irradiance flash, and the apparatus includes a removal device configured to remove particulate contamination from the liquid, the particulate contamination being released during the flash and being different than that released by the electrodes during continuous operation.
摘要翻译： 一种用于产生电磁辐射的装置包括：流动发生器，其被配置成沿着外壳的内表面产生液体流;第一和第二电极，被配置为在外壳内产生电弧以产生电磁辐射;以及排气室向外延伸 超过一个电极，被配置为容纳液体流的一部分。 在另一方面，流动发生器是电绝缘的。 在另一方面，电极被配置为产生放电脉冲以产生辐照闪光，并且该装置包括被配置为从液体中除去微粒污染物的去除装置，微粒污染在闪光期间被释放，并且与释放的不同 通过电极连续运行。
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公开(公告)号：US07781947B2
公开(公告)日：2010-08-24
申请号：US10777995
申请日：2004-02-12
申请人： David Malcolm Camm , Chee Chin , Rick Doolan , Tony Hewett , Arne Kjorvel , Tony Komasa , Mike Krasnich , Steve McCoy , Joseph Reyers , Igor Rudic , Ludmila Shepelev , Greg Stuart , Tilman Thrum , Alex Viel
发明人： David Malcolm Camm , Chee Chin , Rick Doolan , Tony Hewett , Arne Kjorvel , Tony Komasa , Mike Krasnich , Steve McCoy , Joseph Reyers , Igor Rudic , Ludmila Shepelev , Greg Stuart , Tilman Thrum , Alex Viel
摘要： An apparatus for producing electromagnetic radiation includes a flow generator configured to generate a flow of liquid along an inside surface of an envelope, first and second electrodes configured to generate an electrical arc within the envelope to produce the electromagnetic radiation, and an exhaust chamber extending outwardly beyond one of the electrodes, configured to accommodate a portion of the flow of liquid. In another aspect, the flow generator is electrically insulated. In another aspect, the electrodes are configured to generate an electrical discharge pulse to produce an irradiance flash, and the apparatus includes a removal device configured to remove particulate contamination from the liquid, the particulate contamination being released during the flash and being different than that released by the electrodes during continuous operation.
摘要翻译： 一种用于产生电磁辐射的装置包括：流动发生器，其被配置成沿着外壳的内表面产生液体流;第一和第二电极，被配置为在外壳内产生电弧以产生电磁辐射;以及排气室向外延伸 超过一个电极，被配置为容纳液体流的一部分。 在另一方面，流动发生器是电绝缘的。 在另一方面，电极被配置为产生放电脉冲以产生辐照闪光，并且该装置包括被配置为从液体中除去微粒污染物的去除装置，微粒污染在闪光期间被释放，并且与释放的不同 通过电极连续运行。
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5.发明授权Methods and systems for supporting a workpiece and for heat-treating the workpiece 有权用于支撑工件和热处理工件的方法和系统公开(公告)号：US08434341B2
公开(公告)日：2013-05-07
申请号：US13359857
申请日：2012-01-27
申请人： David Malcolm Camm , Guillaume Sempere , Ljubomir Kaludjercic , Gregory Stuart , Mladen Bumbulovic , Tim Tran , Sergiy Dets , Tony Komasa , Marc Rudolph , Joseph Cibere
发明人： David Malcolm Camm , Guillaume Sempere , Ljubomir Kaludjercic , Gregory Stuart , Mladen Bumbulovic , Tim Tran , Sergiy Dets , Tony Komasa , Marc Rudolph , Joseph Cibere
CPC分类号： H01L21/68728 , H01L21/68721 , H01L21/68757
摘要： An apparatus for supporting a semiconductor workpiece includes a heating system configured to cause thermally-induced motion of the semiconductor workpiece by heating a surface of the workpiece relative to a bulk of the workpiece. The thermally-induced motion includes vertical motion of an outer edge region of the workpiece and a center of the workpiece relative to each other. The apparatus further includes a support system configured to allow the thermally-induced motion including the vertical motion of the outer edge region of the workpiece and the center of the workpiece relative to each other while supporting the workpiece.
摘要翻译： 用于支撑半导体工件的装置包括加热系统，该加热系统构造成通过相对于工件的大部分加热工件的表面来引起半导体工件的热感应运动。 热诱导运动包括工件的外边缘区域和工件相对于彼此的中心的垂直运动。 该装置还包括支撑系统，该支撑系统构造成允许包括工件的外边缘区域的垂直运动和工件中心相对于彼此同时支撑工件的热感应运动。
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6.发明申请公开(公告)号：US20120118867A1
公开(公告)日：2012-05-17
申请号：US13359857
申请日：2012-01-27
申请人： David Malcolm Camm , Guillaume Sempere , Ljubomir Kaludjercic , Gregory Stuart , Mladen Bumbulovic , Tim Tran , Sergiy Dets , Tony Komasa , Marc Rudolph , Joseph Cibere
发明人： David Malcolm Camm , Guillaume Sempere , Ljubomir Kaludjercic , Gregory Stuart , Mladen Bumbulovic , Tim Tran , Sergiy Dets , Tony Komasa , Marc Rudolph , Joseph Cibere
IPC分类号： H05B3/00
CPC分类号： H01L21/68728 , H01L21/68721 , H01L21/68757
摘要： An apparatus for supporting a semiconductor workpiece includes a heating system configured to cause thermally-induced motion of the semiconductor workpiece by heating a surface of the workpiece relative to a bulk of the workpiece. The thermally-induced motion includes vertical motion of an outer edge region of the workpiece and a center of the workpiece relative to each other. The apparatus further includes a support system configured to allow the thermally-induced motion including the vertical motion of the outer edge region of the workpiece and the center of the workpiece relative to each other while supporting the workpiece.
摘要翻译： 用于支撑半导体工件的装置包括加热系统，该加热系统构造成通过相对于工件的大部分加热工件的表面来引起半导体工件的热感应运动。 热诱导运动包括工件的外边缘区域和工件相对于彼此的中心的垂直运动。 该装置还包括支撑系统，该支撑系统构造成允许包括工件的外边缘区域的垂直运动和工件中心相对于彼此同时支撑工件的热感应运动。
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公开(公告)号：US20100276611A1
公开(公告)日：2010-11-04
申请号：US12835589
申请日：2010-07-13
申请人： David Malcolm Camm , Chee Chin , Rick Doolan , Tony Hewett , Arne Kjorvel , Tony Komasa , Mike Krasnich , Steve McCoy , Joseph Reyers , Igor Rudic , Ludmila Shepelev , Greg Stuart , Tilman Thrum , Alex Viel
发明人： David Malcolm Camm , Chee Chin , Rick Doolan , Tony Hewett , Arne Kjorvel , Tony Komasa , Mike Krasnich , Steve McCoy , Joseph Reyers , Igor Rudic , Ludmila Shepelev , Greg Stuart , Tilman Thrum , Alex Viel
摘要： An apparatus for producing electromagnetic radiation includes a flow generator configured to generate a flow of liquid along an inside surface of an envelope, first and second electrodes configured to generate an electrical arc within the envelope to produce the electromagnetic radiation, and an exhaust chamber extending outwardly beyond one of the electrodes, configured to accommodate a portion of the flow of liquid. In another aspect, the flow generator is electrically insulated. In another aspect, the electrodes are configured to generate an electrical discharge pulse to produce an irradiance flash, and the apparatus includes a removal device configured to remove particulate contamination from the liquid, the particulate contamination being released during the flash and being different than that released by the electrodes during continuous operation.
摘要翻译： 一种用于产生电磁辐射的装置包括：流动发生器，其被配置成沿着外壳的内表面产生液体流;第一和第二电极，被配置为在外壳内产生电弧以产生电磁辐射;以及排气室向外延伸 超过一个电极，被配置为容纳液体流的一部分。 在另一方面，流动发生器是电绝缘的。 在另一方面，电极被配置为产生放电脉冲以产生辐照闪光，并且该装置包括被配置为从液体中除去微粒污染物的去除装置，微粒污染在闪光期间被释放，并且与释放的不同 通过电极连续运行。
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